US4548078A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Integral flow sensor and channel assembly
Assignee: Honeywell Inc
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Filing: 1984-07-25
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Granted: 1985-10-22
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Expires: 2004-07-25
Abstract
Abstract Disclosed is an integral flow sensor and channel assembly comprising a flow sensor having a sensing element integral to a semiconductor body. The assembly further comprises support structure for supporting the flow sensor, the support structure having a first surface. An enclosed flow channel comprises the first surface formed into a groove running below the sensing element. The flow channel comprises an inlet and an outlet for providing flow across the sensing element. The sensing element is located in the flow channel between the inlet and the outlet. The support structure comprises apparatus for flip-chip mounting the semiconductor body, and the semiconductor body is flip-chip mounted so that the sensing element is positioned over the groove in the support structure.
Inventors
- 👤 Philip J. Bohrer
- 👤 Robert E. Higashi
- 👤 Robert G. Johnson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 01:47
CPC Classifications
G; G01; G01F; G01F1/00; G01F1/68; G01F1/684; G01F1/6845; G01F1/6842; G01F1/696; G01F1/698
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
114 words
An integral flow sensor and channel assembly comprising: a flow sensor having a sensing element integral to a semiconductor body; support means for supporting the flow sensor, the support means having a first surface; an enclosed flow channel comprising the first surface formed into a groove running below the sensing element, the flow channel comprising an inlet and an outlet for providing flow across the sensing element, the sensing element being located in the flow channel between the inlet and the outlet; the support means comprising means for flip-chip mounting the semiconductor body; and the semiconductor body being flip-chip mounted so that the sensing element is positioned over the groove in the support means.
Claim 2
Dependent Claim
114 words
An integral flow sensor and channel assembly comprising: a flow sensor having a sensing element integral to a semiconductor body; support means for supporting the flow sensor, the support means having a first surface; an enclosed flow channel comprising the first surface formed into a groove running below the sensing element, the flow channel comprising an inlet and an outlet for providing flow across the sensing element, the sensing element being located in the flow channel between the inlet and the outlet; the support means comprising means for flip-chip mounting the semiconductor body; and the semiconductor body being flip-chip mounted so that the sensing element is positioned over the groove in the support means.
Claim 3
Dependent Claim
40 words
The apparatus of claim 1 wherein the support means further comprises: circuitry for operating the sensor; and electrical connections for connecting the sensor and circuit; the flow channel, sensor, circuitry, and electrical connections all being integral to the support means.
Claim 4
Dependent Claim
34 words
The apparatus of claim 2 wherein the flow channel is configured to provide at the sensing element a substantially fully developed flow profile which is substantially independent of a flow profile entering the inlet.
Claim 5
Dependent Claim
22 words
The apparatus of claim 3 wherein the support means comprises means for orienting the flow sensor for a desired response to flow.
Claim 6
Dependent Claim
16 words
The apparatus of claim 4 wherein the means for orienting comprises the means for flip-chip mounting.
Claim 7
Dependent Claim
14 words
The apparatus of claim 5 wherein the support means comprises a printed circuit board.
Claim 8
Dependent Claim
14 words
The apparatus of claim 4 wherein the support means comprises a printed circuit board.
Claim 9
Dependent Claim
14 words
The apparatus of claim 3 wherein the support means comprises a printed circuit board.
Claim 10
Dependent Claim
14 words
The apparatus of claim 2 wherein the support means comprises a printed circuit board.
Claim 11
Dependent Claim
14 words
The apparatus of claim 1 wherein the support means comprises a printed circuit board.
Claim 12
Dependent Claim
13 words
The apparatus of claim 5 wherein the support means comprises a ceramic substrate.
Claim 13
Dependent Claim
13 words
The apparatus of claim 4 wherein the support means comprises a ceramic substrate.
Claim 14
Dependent Claim
13 words
The apparatus of claim 3 wherein the support means comprises a ceramic substrate.
Claim 15
Dependent Claim
13 words
The apparatus of claim 2 wherein the support means comprises a ceramic substrate.
Claim 16
Dependent Claim
13 words
The apparatus of claim 1 wherein the support means comprises a ceramic substrate.
Claim 17
Dependent Claim
13 words
The apparatus of claim 5 wherein the support means comprises a semiconductor substrate.
Claim 18
Dependent Claim
13 words
The apparatus of claim 4 wherein the support means comprises a semiconductor substrate.
Claim 19
Dependent Claim
13 words
The apparatus of claim 3 wherein the support means comprises a semiconductor substrate.
Claim 20
Dependent Claim
13 words
The apparatus of claim 2 wherein the support means comprises a semiconductor substrate.
Claim 21
Dependent Claim
13 words
The apparatus of claim 1 wherein the support means comprises a semiconductor substrate.
Claim 22
Dependent Claim
23 words
The apparatus of claim 2 wherein the support means comprises a means for orienting the flow sensor for a desired response to flow.
Claim 23
Dependent Claim
23 words
The apparatus of claim 1 wherein the support means comprises a means for orienting the flow sensor for a desired response to flow.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-10-21 | 1989-04-22 | 1989-10-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-10-21 | 1993-04-22 | 1993-10-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-10-21 | 1997-04-22 | 1997-10-22 | $7700.00 | Window Closed / Lapsed |