US5258097A
Expired / Lapsed
US
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Dry-release method for sacrificial layer microstructure fabrication
Assignee: UNIVERSISTY OF MICHIGAN
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Filing: 1992-11-12
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Granted: 1993-11-02
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Expires: 2012-11-12
Abstract
Abstract A dry-release method for sacrificial layer microstructure fabrication is provided in which a structural layer is anchored to a substrate and deposited on a sacrificial layer located therebetween. Thereafter, holes are etched through the structural layer. Some of the holes are covered with a polymer layer, and portions of the sacrificial layer are then etched through the uncovered holes in the structural layer, creating void areas extending to the substrate. Preferably, the void areas also include undercut areas. The void areas are then filled with a protective polymer layer, creating temporary posts that extend from the surface of the substrate to the structural layer. The sacrificial layer is then removed by means of wet etching. The temporary posts provide support for the structural layer against capillary forces which are created by the evaporation of liquids used in the wet etching process. After wet etching of the sacrificial layer is completed, the temporary posts are removed by a dry etching technique. The resulting microstructure consists of a free-standing structural layer that is anchored to the substrate.
Inventors
- 👤 Carlos H. Mastrangelo
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 05:47
CPC Classifications
B; B81; B81C; B81C1/00; B81C1/00912; B81C1/0092; B81C1/00944; B23; B23P; B23P15/00; G; G01; G01P; G01P15/00; G01P15/02; G01P15/08; G01P15/0802; H; H10; H10P; H10P72/00; H10P72/70; H10P72/74; B81C2201/00; B81C2201/01; B81C2201/0101; B81C2201/0128; B81C2201/013; B81C2201/0132
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
84 words
A method for microstructure fabrication comprising the steps of: providing a substrate; depositing a sacrificial layer upon a surface of said substrate; depositing a structural layer on a surface of said sacrificial layer such that said sacrificial layer is positioned between said substrate and said structural layer, and said structural layer is anchored to said substrate; forming at least one temporary post extending toward said substrate from said structural layer to support said structural layer; removing said sacrificial layer; and removing said temporary posts.
Claim 2
Independent Claim
84 words
A method for microstructure fabrication comprising the steps of: providing a substrate; depositing a sacrificial layer upon a surface of said substrate; depositing a structural layer on a surface of said sacrificial layer such that said sacrificial layer is positioned between said substrate and said structural layer, and said structural layer is anchored to said substrate; forming at least one temporary post extending toward said substrate from said structural layer to support said structural layer; removing said sacrificial layer; and removing said temporary posts.
Claim 3
Independent Claim
139 words
The method of microstructure fabrication of wherein said step of forming at least one temporary post comprises the steps of: etching at least one hole in said structural layer; applying an etchant through said at least one hole to form a void area in said sacrificial layer, said void area extending toward said substrate from said hole in said structural layer; depositing a column forming layer resistant to said sacrificial layer etchant through said at least one hole to substantially fill said void area, and applying said column forming layer to at least a portion of said structural layer, whereby said column forming layer in said void area forms a post imbedded in said sacrificial layer; and removing said column forming layer from said structural layer except where said column forming layer extends over said at least one hole.
Claim 4
Independent Claim
139 words
The method of microstructure fabrication of wherein said step of forming at least one temporary post comprises the steps of: etching at least one hole in said structural layer; applying an etchant through said at least one hole to form a void area in said sacrificial layer, said void area extending toward said substrate from said hole in said structural layer; depositing a column forming layer resistant to said sacrificial layer etchant through said at least one hole to substantially fill said void area, and applying said column forming layer to at least a portion of said structural layer, whereby said column forming layer in said void area forms a post imbedded in said sacrificial layer; and removing said column forming layer from said structural layer except where said column forming layer extends over said at least one hole.
Claim 5
Dependent Claim
90 words
The method of microstructure fabrication of claim 2 wherein said step of removing said column forming layer from said structural layer comprises the steps of: depositing a film of material resistant to plasma etching in a pattern over the surface of said column forming layer, said pattern overlying each of said holes through which said column forming layer is disposed to substantially fill said void area; removing said column forming layer generally outside said pattern from said structural layer by plasma etching; removing said film of material in said pattern.
Claim 6
Dependent Claim
34 words
The method of microstructure fabrication of claim 2 wherein said step of applying an etchant through said at least one hole includes forming a void area including an undercut area in said sacrificial layer.
Claim 7
Dependent Claim
37 words
The method of microstructure fabrication of claim 2 wherein said step of applying an etchant through said at least one hole includes forming a void area extending from said hole in said structural layer to said substrate.
Claim 8
Dependent Claim
46 words
The method of microstructure fabrication of claim 2 wherein said step of depositing a column forming layer resistant to said sacrificial layer etchant through said at least one hole to substantially fill said void area comprises disposing a polymer by vapor deposition in said void area.
Claim 9
Dependent Claim
28 words
The method of microstructure fabrication of claim 2 wherein said step of depositing a column forming layer resistant to said sacrificial layer etchant comprises depositing a conformal polymer.
Claim 10
Dependent Claim
30 words
The method of microstructure fabrication of claim 2 wherein said step of etching at least one hole comprises etching a plurality of holes in said structural layer in an array.
Claim 11
Dependent Claim
75 words
The method of microstructure fabrication of claim 2 wherein: said step of etching at least one hole comprises etching a plurality of holes in said structural layer; and said method further comprises the steps of: covering at least one of said plurality of holes with a protective layer resistant to sacrificial layer etchant; and after said step of applying an etchant through at least one hole to form a void area, removing said protective layer.
Claim 12
Dependent Claim
45 words
The method of microstructure fabrication of claim 9 wherein: said step of depositing a structural layer comprises depositing a layer comprising polysilicon; said step of covering at least one of said plurality of holes with a protective layer is performed by applying a photoresist polymer.
Claim 13
Dependent Claim
25 words
The method of microstructure fabrication of claim 1 wherein said step of removing said sacrificial layer comprises the step of performing a wet etching technique.
Claim 14
Dependent Claim
28 words
The method of microstructure fabrication of claim 1 wherein said step of removing said temporary posts comprises the step of etching said temporary posts using a dry-etching method.
Claim 15
Dependent Claim
19 words
The method of microstructure fabrication of claim 12 wherein said step of etching said temporary posts comprises plasma etching.
Claim 16
Dependent Claim
37 words
The method of microstructure fabrication of claim 1 wherein said step of depositing a sacrificial layer comprises depositing a high-temperature resistant sacrificial layer capable of remaining substantially unaffected by temperatures of at least approximately 600 degrees centigrade.
Claim 17
Dependent Claim
47 words
The method of microstructure fabrication of claim 1 wherein the step of depositing a sacrificial layer includes preparing said sacrificial layer for deposition of a structural layer thereon including the step of etching at least one opening through said sacrificial layer to the surface of said substrate.
Claim 18
Dependent Claim
32 words
The method of microstructure fabrication of claim 1 wherein said step of forming at least one temporary post comprises forming said post of a material which is removable by a dry-release method.
Claim 19
Dependent Claim
40 words
The method of microstructure fabrication of claim 16 wherein said step of forming said at least one temporary post of a material which is removable by a dry-release method comprises forming said post of a polymer removable by dry-etching techniques.
Claim 20
Independent Claim
303 words
A method for microstructure fabrication comprising the steps of: providing a substrate; depositing a sacrificial layer upon a surface of said substrate; depositing a structural layer on a surface of said sacrificial layer such that said sacrificial layer is positioned between said substrate and said structural layer and said structural layer is anchored to said substrate; forming at least one temporary post extending between said substrate and said structural layer to support said structural layer, said step of forming including the steps of: etching at least one hole in said structural layer; applying an etchant through said at least one hole to form a void area including an undercut area in said sacrificial layer, said void area extending from said substrate to said hole in said structural layer; depositing a column forming layer resistant to said sacrificial layer etchant through said at least one hole to substantially fill said undercut area, and applying said column forming layer to at least a portion of said structural layer, whereby said column forming layer in said undercut area forms a post imbedded in said sacrificial layer; and removing said column forming layer from said structural layer except where said column forming layer extends over said at least one hole, said step of removing including: depositing a film of material resistant to at least one dry etching technique in a pattern over the surface of said column forming layer, said pattern covering each of said holes through which said column forming layer is disposed form said undercut area; removing said column forming layer generally outside said pattern from said structural layer by said at least one dry etching technique; and removing said film of material in said pattern; removing said sacrificial layer by a wet etching technique; and removing said temporary posts by a dry etching technique.
Claim 21
Independent Claim
303 words
A method for microstructure fabrication comprising the steps of: providing a substrate; depositing a sacrificial layer upon a surface of said substrate; depositing a structural layer on a surface of said sacrificial layer such that said sacrificial layer is positioned between said substrate and said structural layer and said structural layer is anchored to said substrate; forming at least one temporary post extending between said substrate and said structural layer to support said structural layer, said step of forming including the steps of: etching at least one hole in said structural layer; applying an etchant through said at least one hole to form a void area including an undercut area in said sacrificial layer, said void area extending from said substrate to said hole in said structural layer; depositing a column forming layer resistant to said sacrificial layer etchant through said at least one hole to substantially fill said undercut area, and applying said column forming layer to at least a portion of said structural layer, whereby said column forming layer in said undercut area forms a post imbedded in said sacrificial layer; and removing said column forming layer from said structural layer except where said column forming layer extends over said at least one hole, said step of removing including: depositing a film of material resistant to at least one dry etching technique in a pattern over the surface of said column forming layer, said pattern covering each of said holes through which said column forming layer is disposed form said undercut area; removing said column forming layer generally outside said pattern from said structural layer by said at least one dry etching technique; and removing said film of material in said pattern; removing said sacrificial layer by a wet etching technique; and removing said temporary posts by a dry etching technique.
Claim 22
Independent Claim
203 words
A method for microstructure fabrication comprising the steps of: providing a substrate; depositing a sacrificial layer upon a surface of said substrate; anchoring a structural layer to the surface of said substrate in a manner such that said sacrificial layer is located between said substrate and said structural layer; etching a plurality of holes through said structural layer to said sacrificial layer; depositing a protective layer upon at least a portion of said structural layer and over at least one of said holes leaving at least one hole uncovered; etching portions of said sacrificial layer through said at least one uncovered hole in said structural layer to create a void area associated with said at least one uncovered hole, which void area extends toward the surface of said substrate; removing said protective layer; depositing a column forming layer upon at least a portion of said structural layer and into said void area to form temporary posts; masking portions of said column forming layer filling said void areas with mask material; etching unmasked portions of said column forming layer; removing said mask material from portions of said column forming layer; removing said sacrificial layer; and removing said column forming layer including said temporary posts.
Claim 23
Independent Claim
203 words
A method for microstructure fabrication comprising the steps of: providing a substrate; depositing a sacrificial layer upon a surface of said substrate; anchoring a structural layer to the surface of said substrate in a manner such that said sacrificial layer is located between said substrate and said structural layer; etching a plurality of holes through said structural layer to said sacrificial layer; depositing a protective layer upon at least a portion of said structural layer and over at least one of said holes leaving at least one hole uncovered; etching portions of said sacrificial layer through said at least one uncovered hole in said structural layer to create a void area associated with said at least one uncovered hole, which void area extends toward the surface of said substrate; removing said protective layer; depositing a column forming layer upon at least a portion of said structural layer and into said void area to form temporary posts; masking portions of said column forming layer filling said void areas with mask material; etching unmasked portions of said column forming layer; removing said mask material from portions of said column forming layer; removing said sacrificial layer; and removing said column forming layer including said temporary posts.
Claim 24
Dependent Claim
34 words
The method of microstructure fabrication of claim 19 wherein said step of applying an etchant through said at least one hole includes forming a void area including an undercut area in said sacrificial layer.
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| 7.5 Years (Year 8) | 2000-11-01 | 2001-05-03 | 2001-11-02 | $3760.00 | Window Closed / Lapsed |
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