US5250669A
Expired / Lapsed
US
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Photosensitive compound
Assignee: Fujifilm Wako Pure Chemical Corp
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Filing: 1992-04-23
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Granted: 1993-10-05
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Expires: 2012-04-23
Abstract
Abstract Photosensitive compounds having preferably a functional group such as -SO2Cl, -SO3H, -SO3R, <IMAGE> (R, R', R'' being alkyl) on a terminal benzene or naphthalene ring connected via a methylene group and <IMAGE> moiety are improved in sensitivity to light and thermal stability, and thus useful in a photo resist.
Inventors
- 👤 Kazufumi Ogawa
- 👤 Masayuki Endo
- 👤 Keiji Ohno
- 👤 Mamoru Nagoya
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 21:36
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/0045; C; C07; C07C; C07C17/00; C07C17/093; C07C17/16; C07C245/00; C07C245/12; C07C245/14; C07C309/00; C07C309/01; C07C309/28; C07C309/45; C07C309/52; C07C309/63; C07C309/72; C07C309/76; C07C309/78; C07C309/86; C07C309/88; C07C311/00; C07C311/15; C07C311/16; C07C45/00; C07C45/45; C07C45/455; C07C45/61; C07C45/67; C07C45/68
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
326 words
A compound represented by the formula: ##STR153## wherein R 1 is ##STR154## X 1 and Y 1 are independently a hydrogen atom, a halogen atom, a lower alkyl group having 1 to 5 carbon atoms, a lower alkoxy group having 1 to 5 carbon atoms, --SO 2 Cl, --SO 2 Br, ##STR155## --SO 3 H or --SO 3 R 5 ; R 3 and R 4 are independently a hydrogen atom or a lower alkyl group having 1 to 5 carbon atoms which may have one or more substituents, or R 3 , R 4 and N taken together may form a heterocyclic ring; R 5 is a lower alkyl group having 1 to 5 carbon atoms; the --SO 2 Cl or --SO 2 Br group may include a quaternary salt thereof; the --SO 3 H group may include an ammonium salt thereof, an organic base salt thereof and a quaternary salt thereof; m is an integer of 1 to 20; R 2 is an alkyl group, a cycloalkyl group, a hydroxyalkyl group, an alkoxyalkyl group, ##STR156## X 2 and Y 2 are independently a hydrogen atom, a halogen atom, a lower alkyl group having 1 to 5 carbon atoms, a lower alkoxy group having 1 to 5 carbon atoms, --SO 2 Cl, --SO 2 Br, ##STR157## --SO 3 H or --SO 3 R 8 ; R 6 and R 7 are independently a hydrogen atom or a lower alkyl group having 1 to 5 carbon atoms which may have one or more substituents, or R 6 , R 7 and N taken together may form a heterocyclic ring; R 8 is a lower alkyl group having 1 to 5 carbon atoms; the --SO 2 Cl or --SO 2 Br group may include a quaternary salt thereof; the --SO 3 H group may include an ammonium salt thereof, an organic base salt thereof and a quaternary salt thereof; n is an integer of 1 to 20.
Claim 2
Dependent Claim
326 words
A compound represented by the formula: ##STR153## wherein R 1 is ##STR154## X 1 and Y 1 are independently a hydrogen atom, a halogen atom, a lower alkyl group having 1 to 5 carbon atoms, a lower alkoxy group having 1 to 5 carbon atoms, --SO 2 Cl, --SO 2 Br, ##STR155## --SO 3 H or --SO 3 R 5 ; R 3 and R 4 are independently a hydrogen atom or a lower alkyl group having 1 to 5 carbon atoms which may have one or more substituents, or R 3 , R 4 and N taken together may form a heterocyclic ring; R 5 is a lower alkyl group having 1 to 5 carbon atoms; the --SO 2 Cl or --SO 2 Br group may include a quaternary salt thereof; the --SO 3 H group may include an ammonium salt thereof, an organic base salt thereof and a quaternary salt thereof; m is an integer of 1 to 20; R 2 is an alkyl group, a cycloalkyl group, a hydroxyalkyl group, an alkoxyalkyl group, ##STR156## X 2 and Y 2 are independently a hydrogen atom, a halogen atom, a lower alkyl group having 1 to 5 carbon atoms, a lower alkoxy group having 1 to 5 carbon atoms, --SO 2 Cl, --SO 2 Br, ##STR157## --SO 3 H or --SO 3 R 8 ; R 6 and R 7 are independently a hydrogen atom or a lower alkyl group having 1 to 5 carbon atoms which may have one or more substituents, or R 6 , R 7 and N taken together may form a heterocyclic ring; R 8 is a lower alkyl group having 1 to 5 carbon atoms; the --SO 2 Cl or --SO 2 Br group may include a quaternary salt thereof; the --SO 3 H group may include an ammonium salt thereof, an organic base salt thereof and a quaternary salt thereof; n is an integer of 1 to 20.
Claim 3
Dependent Claim
126 words
A compound according to claim 1, which is a compound of the formula: ##STR158## wherein X 1 , Y 1 and m are as defined in claim 1; and R 13 is an alkyl group, a cycloalkyl group, a hydroxyalkyl group or an alkoxyalkyl group, ##STR159## wherein X 1 , Y 1 , R 13 and m are as defined above, ##STR160## wherein X 1 , Y 1 , X 2 , Y 2 , m and n are as defined in claim 1, ##STR161## wherein X 1 , Y 1 , X 2 , Y 2 , m and n are as defined above, ##STR162## wherein X 1 , Y 1 , X 2 , Y 2 , m and n are as defined above.
Claim 4
Dependent Claim
113 words
A compound according to claim 2, wherein the compound of the formula: ##STR163## wherein X 1 , Y 1 , R 13 and m are as defined in claim 2, is a compound of the formula: ##STR164## wherein Z 1 is hydrogen, halogen, alkyl or alkoxy; R 3 and R 4 are independently a hydrogen atom, or a lower alkyl group having 1 to 5 carbon atoms which may have one or more substituents, or R 3 , R 4 and N taken together may form a heterocyclic ring; R 5 is a lower alkyl group having 1 to 5 carbon atoms; and R 13 and m are as defined in claim 2.
Claim 5
Dependent Claim
113 words
A compound according to claim 2, wherein the compound of the formula: ##STR165## wherein X 1 , Y 1 , R 13 and m are as defined in claim 2, is a compound of the formula: ##STR166## wherein Z 1 is hydrogen, halogen, alkyl or alkoxy; R 3 and R 4 are independently a hydrogen atom, or a lower alkyl group having 1 to 5 carbon atoms which may have one or more substituents, or R 3 , R 4 and N taken together may form a heterocyclic ring; R 5 is a lower alkyl group having 1 to 5 carbon atoms; and R 13 and m are as defined in claim 2.
Claim 6
Dependent Claim
137 words
A compound according to claim 2, wherein the compound of the formula: ##STR167## wherein X 1 , Y 1 , X 2 , Y 2 , m and n are as defined in claim 2, is a compound of the formula: ##STR168## wherein Z 1 and Z 2 are independently hydrogen, halogen, alkyl or alkoxy; R 3 , R 4 , R 6 and R 7 are independently a hydrogen atom, or a lower alkyl group having 1 to 5 carbon atoms which may have one or more substituents, or R 3 , R 4 or R 6 , R 7 and N taken together may form a heterocyclic ring; R 5 and R 8 are independently a lower alkyl group having 1 to 5 carbon atoms; and m and n are as defined in claim 2.
Claim 7
Dependent Claim
137 words
A compound according to claim 2, wherein the compound of the formula: ##STR169## wherein X 1 , Y 1 , X 2 , Y 2 , m and n are as defined in claim 2, is a compound of the formula: ##STR170## wherein Z 1 and Z 2 are independently hydrogen, halogen, alkyl or alkoxy; R 3 , R 4 , R 6 and R 7 are independently a hydrogen atom, or a lower alkyl group having 1 to 5 carbon atoms which may have one or more substituents, or R 3 , R 4 or R 6 , R 7 and N taken together may form a heterocyclic ring; R 5 and R 8 are independently a lower alkyl group having 1 to 5 carbon atoms; and m and n are as defined in claim 2.
Claim 8
Dependent Claim
139 words
A compound according to claim 2, wherein the compound of the formula: ##STR171## wherein X 1 , Y 1 , X 2 , Y 2 , m and n are as defined in claim 2, is a compound of the formula: ##STR172## wherein Z 1 and Z 2 are independently hydrogen, halogen, alkyl or alkoxy; R 3 , R 4 , R 6 and R 7 are independently are independently a hydrogen atom, or a lower alkyl group having 1 to 5 carbon atoms which may have one or more substituents, or R 3 , R 4 or R 6 , R 7 and N taken together may form a heterocyclic ring; R 5 and R 8 are independently a lower alkyl group having 1 to 5 carbon atoms; and m and n are as defined in claim 2.
Claim 9
Dependent Claim
13 words
A compound according to claim 5, which is represented by the formula: ##STR173##
Claim 10
Dependent Claim
41 words
A compound according to claim 5, which is represented by the formula: ##STR174## wherein Z 1 and Z 2 are independently hydrogen or alkyl; m is an integer of 1 to 20 and n is an integer of 1 to 20.
Claim 11
Dependent Claim
41 words
A compound according to claim 5, which is represented by the formula: ##STR175## wherein Z 1 and Z 2 are independently hydrogen or alkyl; m is an integer of 1 to 20 and n is an integer of 1 to 20.
Claim 12
Dependent Claim
89 words
A compound according to claim 5, which is represented by the formula: ##STR176## wherein Z 1 and Z 2 are independently hydrogen, or alkyl; R 3 , R 4 , R 6 and R 7 are independently a hydrogen atom, or a lower alkyl group having 1 to 5 carbon atoms, or R 3 , R 4 or R 6 , R 7 and N taken together may form a heterocyclic ring; m is an integer of 1 to 20; and n is an integer of 1 to 20.
Claim 13
Dependent Claim
315 words
A photosensitive compound according to claim 1, which is a compound of the formula: ##STR177## wherein X 1 and Y 1 are independently a hydrogen atom, a halogen atom, a lower alkyl group having 1 to 5 carbon atoms, a lower alkoxy group having 1 to 5 carbon atoms, --SO 2 Cl, --SO 2 Br, ##STR178## --SO 3 H or --SO 3 R 5 ; R 3 and R 4 are independently a hydrogen atom or a lower alkyl group having 1 to 5 carbon atoms which may have one or more substituents, or R 3 , R 4 and N taken together may form a heterocyclic ring; R 5 is a lower alkyl group having 1 to 5 carbon atoms; the --SO 2 Cl or --SO 2 Br group may include a quaternary salt thereof; the --SO 3 H group may include an ammonium salt thereof, an organic base salt thereof and a quaternary salt thereof; m is an integer of 1 to 20; X 2 and Y 2 are independently a hydrogen atom, a halogen atom, a lower alkyl group having 1 to 5 carbon atoms, a lower alkoxy group having 1 to 5 carbon atoms, --SO 2 Cl, --SO 2 Br, ##STR179## --SO 3 H or --SO 3 R 8 ; R 6 and R 7 are independently a hydrogen atom or a lower alkyl group having 1 to 5 carbon atoms which may have one or more substituents or R 6 , R 7 and N taken together may form a heterocyclic ring; R 8 is a lower alkyl group having 1 to 5 carbon atoms; the --SO 2 Cl or --SO 2 Br group may include a quaternary salt thereof; the --SO 3 H group may includes an ammonium salt thereof, an organic base salt thereof and a quaternary salt thereof; and n is an integer of 1 to 20.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1996-10-04 | 1997-04-05 | 1997-10-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-10-04 | 2001-04-05 | 2001-10-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-10-04 | 2005-04-05 | 2005-10-05 | $7700.00 | Window Closed / Lapsed |