US5249195A
Expired / Lapsed
US
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Erbium doped optical devices
Assignee: Nokia Bell Labs
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Filing: 1992-06-30
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Granted: 1993-09-28
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Expires: 2012-06-30
Abstract
Abstract This invention embodies an optical device with a Fabry-Perot cavity formed by two reflective mirrors and an active layer which is doped with a rare earth element selected from lanthanide series elements with number 57 through 71. The thickness of the active layer being a whole number multiple of λ/2 wherein λ is the operating, or emissive, wavelength of the device, said whole number being one of the numbers ranging from 1 to 5, the fundamental mode of the cavity being in resonance with the emission wavelength of said selected rare earth element. Cavity-quality factors exceeding Q=300 and finesses of 73 are achieved with structures consisting of two Si/SiO 2 distributed Bragg reflector (DBR) mirrors and an Er-implanted (λ/2) SiO 2 active region. The bottom DBR mirror consists of four pairs and the upper DBR mirror consists of two-and-a half pairs of quarterwave (λ/4) layers of Si and SiO 2 . Photoluminescence at room temperature reveals a drastic enhancement of the luminescence intensity of the cavity emitted along the optical axis of the cavity versus the luminescence without the top mirror. The luminescence intensity of the cavity is typically 1-2 orders of magnitudes higher as compared to structures without a cavity. Furthermore, since the emission wavelength and the intensity decrease for off-normal emission angles, the change in emission wavelength can be quantitatively described by assuming that the on-axis component of the optical wave is resonant with the cavity.
Inventors
- 👤 Leonard C. Feldman
- 👤 Neil E. J. Hunt
- 👤 Dale C. Jacobson
- 👤 John M. Poate
- 👤 Erdmann F. Schubert
- 👤 Arjen M. Vredenberg
- 👤 Yiu-Huen Wong
- 👤 George J. Zydzik
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 23:02
CPC Classifications
H; H01; H01S; H01S3/00; H01S3/05; H01S3/06; H01S3/0627; H01S3/0602; H01S3/0604; H01S3/14; H01S3/16; H01S3/1601; H01S3/1603; H01S3/1608; H01S3/1628; H01S3/17; H01S3/176; H01S3/177
Claims Analysis
Total Claims: 31
Claim 1
Independent Claim
108 words
A light-emitting device which comprises in an ascending order, a substrate, a bottom reflector mirror, an active layer, and a top reflective layer, said mirrors forming a Fabry-Perot cavity enclosing said active layer, said active layer is doped with a rare earth element selected from lanthanide series elements with numbers 57 through 71, the thickness of the active layer being a whole number multiple of λ/2 wherein λ is the operating (or emission) wavelength of the device, said number being one of the numbers ranging from 1 to 5, the fundamental mode of the cavity being in resonance with the emission wavelength of said selected rare earth element.
Claim 2
Dependent Claim
108 words
A light-emitting device which comprises in an ascending order, a substrate, a bottom reflector mirror, an active layer, and a top reflective layer, said mirrors forming a Fabry-Perot cavity enclosing said active layer, said active layer is doped with a rare earth element selected from lanthanide series elements with numbers 57 through 71, the thickness of the active layer being a whole number multiple of λ/2 wherein λ is the operating (or emission) wavelength of the device, said number being one of the numbers ranging from 1 to 5, the fundamental mode of the cavity being in resonance with the emission wavelength of said selected rare earth element.
Claim 3
Dependent Claim
14 words
The light-emitting device of claim 1 in which said rare earth element comprises Erbium.
Claim 4
Dependent Claim
49 words
The light-emitting device of claim 1 in which said active layer comprises material selected from the group consisting of SiO 2 , Al 2 O 3 , phosphosilicate glass, borosilicate glass, borophosphosilicate glass, boron aluminum silicate glass, germanate glass, tellurite glass, fluoride glass, and Si 3 N 4 .
Claim 5
Dependent Claim
28 words
The light-emitting device of claim 1 in which the material of said active layer comprises material selected from the group consisting of Si, GaAs, InP, GaInAs and GaInPAs.
Claim 6
Dependent Claim
37 words
The light-emitting device of claim 1 in which said mirrors are selected from distributed Bragg reflector (DBR) mirrors, metal mirrors, conductive oxide mirrors, and their combination so as to provide the said fundamental mode of the cavity.
Claim 7
Dependent Claim
152 words
The light-emitting device of claim 1 in which said active layer is selected from glass-like materials and tetrahedrally bonded semiconductor materials, each of said mirrors comprising a DBR mirror, the DBR mirrors consisting each of a plurality of pairs of layers, the thickness of each layer being equal to λ/4, one layer of each pair having a higher refractive index than the other, and one layer of each mirror having a certain refractive index being adjacent to the active layer having a different refractive index, which is lower than said certain refractive index, the number of pairs of layers in the bottom DBR mirror ranging from 2 to 10, and the number of pairs of layers in the top DBR mirror being smaller than the number of pairs of layers in the bottom DBR mirror and ranging from 1 to 4, and a capping layer on top of the top DBR mirror.
Claim 8
Dependent Claim
50 words
The light-emitting device of claim 1 in which the material of said layers of the DBR mirrors is selected from the group consisting of Si, Ge, SiO 2 , Al 2 O 3 , and TiO 2 , such that the two layers in each pair have different refractive indices.
Claim 9
Dependent Claim
18 words
The light-emitting device of claim 1 in which the material of said active layer comprises SiO 2 .
Claim 10
Dependent Claim
26 words
The light-emitting device of claim 1 in which one layer in each pair of layers comprises SiO 2 and another layer in the pair comprises Si.
Claim 11
Dependent Claim
51 words
The light-emitting device of claim 1 in which the active layer comprises Si and the layers in the bottom DBR mirror begin with SiO 2 adjacent the substrate and end with Si adjacent the active layer, and the layers in the top DBR mirror begin with Si adjacent the active layer.
Claim 12
Dependent Claim
38 words
The light-emitting device of claim 10 in which the number of pairs of layers in the bottom DBR mirror is 4 and layers in the top mirror is 2.5 with an upper layer acting as the capping layer.
Claim 13
Dependent Claim
28 words
The light-emitting device of claim 10 in which said rare earth element comprises Erbium, and said device is capable of spontaneous photoluminescence at wavelength of approximately 1.5 μm.
Claim 14
Dependent Claim
202 words
A light-emitting device which comprises, in an ascending order, a substrate, a bottom distributed Bragg reflector (DBR) mirror, an active layer, and a top distributed Bragg reflector (DBR) mirror, said active layer being of a glass-like material doped with a rare earth element selected from lanthanide series elements with numbers 57 through 71, the thickness of the active layer being a whole number multiple of λ/2 wherein λ is the operating wavelength of the device, said number being one of the numbers ranging from 1 to 5, said DBR mirrors consisting each of a plurality of pairs of layers, the thickness of each layer being equal to λ/4, one layer of each pair having a higher refractive index than the other, and one layer of each mirror having a certain refractive index being adjacent to the active layer having a different refractive index, the number of pairs of layers in said bottom DBR mirror ranging from 2 to 10, and the number of pairs of layers in said top DBR mirror being smaller than the number of pairs of layers in the bottom DBR mirror and ranging from 1 to 4, and a capping layer on top of the top DBR mirror.
Claim 15
Dependent Claim
202 words
A light-emitting device which comprises, in an ascending order, a substrate, a bottom distributed Bragg reflector (DBR) mirror, an active layer, and a top distributed Bragg reflector (DBR) mirror, said active layer being of a glass-like material doped with a rare earth element selected from lanthanide series elements with numbers 57 through 71, the thickness of the active layer being a whole number multiple of λ/2 wherein λ is the operating wavelength of the device, said number being one of the numbers ranging from 1 to 5, said DBR mirrors consisting each of a plurality of pairs of layers, the thickness of each layer being equal to λ/4, one layer of each pair having a higher refractive index than the other, and one layer of each mirror having a certain refractive index being adjacent to the active layer having a different refractive index, the number of pairs of layers in said bottom DBR mirror ranging from 2 to 10, and the number of pairs of layers in said top DBR mirror being smaller than the number of pairs of layers in the bottom DBR mirror and ranging from 1 to 4, and a capping layer on top of the top DBR mirror.
Claim 16
Dependent Claim
44 words
The light-emitting device of claim 13 in which the material of said active layer comprises material selected from the group consisting of silicon dioxide, aluminum oxide, phosphosilicate glass, borosilicate glass, borophosphosilicate glass, germanate glass, tellurite glass, fluoride glass, and Si 3 N 4 .
Claim 17
Dependent Claim
28 words
The light-emitting device of claim 14 in which the material of said active layer comprises material selected from the group consisting of Si, GaAs, InP, GaInAs and GaInPAs.
Claim 18
Dependent Claim
14 words
The light-emitting device of claim 13 in which said rare earth element comprises Erbium.
Claim 19
Dependent Claim
18 words
The light-emitting device of claim 13 in which the material of said active layer comprises SiO 2 .
Claim 20
Dependent Claim
49 words
The light-emitting device of claim 13 which the material of said layers of said DBR mirrors is selected from the group consisting of Si, Ge, SiO 2 , Al 2 O 3 , and TiO 2 , such that the two layers in each pair have different refractive indices.
Claim 21
Dependent Claim
26 words
The light-emitting device of claim 13 in which one layer in each pair of layers comprises SiO 2 and another layer in the pair comprises Si.
Claim 22
Dependent Claim
52 words
The light-emitting device of claim 13 in which the active layer comprises SiO 2 , the layers in said bottom DBR mirror being with SiO 2 adjacent the substrate and end with Si adjacent the active layer, and the layers in said top DBR mirror begin with Si adjacent the active layer.
Claim 23
Dependent Claim
21 words
The light-emitting device of claim 20 in which the number of pairs of layers in the bottom DBR mirror is 4.
Claim 24
Dependent Claim
29 words
The light-emitting device of claim 20 in which the number of pairs of layers in the top mirror is 2.5 with an upper layer acting as the capping layer.
Claim 25
Dependent Claim
28 words
The light-emitting device of claim 13 in which said rare earth element comprises Erbium, and said device is capable of spontaneous photoluminescence at wavelength of approximately 1.5 μm.
Claim 26
Dependent Claim
75 words
A light-emitting device which comprises, upon a substrate, a bottom reflector mirror, an active layer and a top reflective mirror, said active layer is doped with Erbium, the thickness of the active layer being a whole number multiple of λ/2, wherein λ is the operating wavelength of the device, said number being one of numbers ranging from 1 to 5, the fundamental mode of the cavity being in resonance with the emission wavelength of erbium.
Claim 27
Dependent Claim
75 words
A light-emitting device which comprises, upon a substrate, a bottom reflector mirror, an active layer and a top reflective mirror, said active layer is doped with Erbium, the thickness of the active layer being a whole number multiple of λ/2, wherein λ is the operating wavelength of the device, said number being one of numbers ranging from 1 to 5, the fundamental mode of the cavity being in resonance with the emission wavelength of erbium.
Claim 28
Dependent Claim
18 words
The light-emitting device of claim 24 in which the material of said active layer comprises SiO 2 .
Claim 29
Dependent Claim
79 words
The light-emitting device of claim 24 in which each of said mirror is a distributed Bragg reflector mirror consisting each of a plurality of pairs of layers, one layer of each pair having a higher index of refraction than the other layer of the pair, the thickness of each layer being λ/4, the number of pairs of layers in one DBR mirror ranging from 2 to 10, and the number of pairs of layers ranging from 1 to 4.
Claim 30
Dependent Claim
26 words
The light-emitting device of claim 26 in which one layer in each pair of layers comprises SiO 2 and another layer in each pair comprises Si.
Claim 31
Dependent Claim
50 words
The light-emitting device of claim 27 in which the material of the active layer comprises SiO 2 , the bottom DBR mirror has 4 pairs of layers and the top DBR mirror has 2.5 pairs of layers with the uppermost layer of the top mirror acting as a capping layer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1996-09-27 | 1997-03-29 | 1997-09-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-09-27 | 2001-03-29 | 2001-09-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-09-27 | 2005-03-29 | 2005-09-28 | $7700.00 | Window Closed / Lapsed |