US5248402A — Apple-shaped magnetron for sputtering system

Claim 1

Independent Claim 92 words

In a sputtering system having a magnetron formed of an array of permanent magnets rotated in proximity to a plane target disposed in a vacuum chamber, the improvement comprising: a. said array being arranged to form a magnetic path that is generally apple shaped with a center of rotation for said array being proximate to a stem region of said apple shape; b. said path having an opposed pair of approximately semi-circular lobes extending from said stem region; and c. said path having an indentation joining said lobes opposite said stem region.

Claim 2

Dependent Claim 92 words

In a sputtering system having a magnetron formed of an array of permanent magnets rotated in proximity to a plane target disposed in a vacuum chamber, the improvement comprising: a. said array being arranged to form a magnetic path that is generally apple shaped with a center of rotation for said array being proximate to a stem region of said apple shape; b. said path having an opposed pair of approximately semi-circular lobes extending from said stem region; and c. said path having an indentation joining said lobes opposite said stem region.

Claim 3

Dependent Claim 80 words

The improvement of claim 1 wherein said array is formed of generally oblong permanent magnets arranged in polar pairs with an outer magnet of each pair being arranged tangentially to said path and an inner magnet of each pair being arranged radially of said path except in said stem region and in said indentation where an outer one of said magnets is arranged radially of said path and an inner one of said magnets is arranged tangentially of said path.

Claim 4

Dependent Claim 24 words

The improvement of claim 2 wherein said inner one of said magnets in said stem region is arranged radially inward of adjacent inner magnets.

Claim 5

Dependent Claim 23 words

The improvement of claim 2 wherein said inner one of said magnets in said stem region is arranged on said center of rotation.

Claim 6

Dependent Claim 22 words

The improvement of claim 2 wherein said inner one of said magnets in said indentation is radially even with adjacent inner magnets.

Claim 7

Dependent Claim 31 words

The improvement of claim 1 wherein said array is configured relative to said target so that erosion occurs on all regions of said target to keep said target clean during sputtering.

Claim 8

Dependent Claim 31 words

The improvement of claim 1 wherein a maximum distance across said path between said lobes is about double a minimum distance across said path between said stem region and said indentation.

Claim 9

Dependent Claim 128 words

An improved shape for a magnetic path formed by an array of oppositely poled pairs of permanent magnets rotatably arranged in a plane parallel with a target in a sputtering system comprising: a. said path resembling a cross section of an apple having a center line extending through a stem region and an indent region opposite said stem region; b. said path being inturned in said stem region to a position proximate to an axis of rotation for said array; c. a pair of opposed lobes of said path extending from said stem region to said indent region on opposite sides of said center line, said lobes being approximately semi-circular in shape; and d. said path in said indent region being inturned less than in said stem region.

Claim 10

Dependent Claim 128 words

An improved shape for a magnetic path formed by an array of oppositely poled pairs of permanent magnets rotatably arranged in a plane parallel with a target in a sputtering system comprising: a. said path resembling a cross section of an apple having a center line extending through a stem region and an indent region opposite said stem region; b. said path being inturned in said stem region to a position proximate to an axis of rotation for said array; c. a pair of opposed lobes of said path extending from said stem region to said indent region on opposite sides of said center line, said lobes being approximately semi-circular in shape; and d. said path in said indent region being inturned less than in said stem region.

Claim 11

Dependent Claim 74 words

The magnetic path of claim 8 wherein said permanent magnets are generally oblong and are arranged with an outer magnet of each pair being tangential to said path and an inner one of each pair being radial of said path except in said stem region and in said indent region where an outer one of said magnets is radial of said path and an inner one of said magnets is tangential of said path.

Claim 12

Dependent Claim 24 words

The magnetic path of claim 9 wherein said inner one of said magnets in said stem region is arranged on said center of rotation.

Claim 13

Dependent Claim 25 words

The magnetic path of claim 9 wherein said inner one of said magnets in said stem region is arranged radially inward of adjacent inner magnets.

Claim 14

Dependent Claim 24 words

The magnetic path of claim 11 Wherein said inner one of said magnets in said indent region is radially even with adjacent inner magnets.

Claim 15

Dependent Claim 32 words

The magnetic path of claim 8 wherein said array is configured relative to said target so that erosion occurs on all regions of said target to keep said target clean during sputtering.

Claim 16

Dependent Claim 33 words

The magnetic path of claim 8 wherein a maximum distance across said path between said lobes is about double a minimum distance across said path between said stem region and said indent region.

Claim 17

Dependent Claim 32 words

The magnetic path of claim 14 wherein said array is configured relative to said target so that erosion occurs on all regions of said target to keep said target clean during sputtering.

Claim 18

Dependent Claim 136 words

A rotatable permanent magnet array for a magnetron, said array being arranged in a plane parallel with and proximate to a target in a sputtering system, said array comprising: a. oppositely poled pairs of said permanent magnets being arranged on opposite sides of a magnetic path extending in a pair of opposed symmetric lobes leading away from the region of a rotational axis for said array; b. said symmetric lobes being shaped like a cross section of an apple and being inturned to meet in a stem region proximate to said rotational axis; c. each of said lobes being approximately semi-circular from said stem region to an indent region opposite said stem region; and d. said path in said indent region being curved inward by less than the inturn of said lobes at said stem region.

Claim 19

Dependent Claim 136 words

A rotatable permanent magnet array for a magnetron, said array being arranged in a plane parallel with and proximate to a target in a sputtering system, said array comprising: a. oppositely poled pairs of said permanent magnets being arranged on opposite sides of a magnetic path extending in a pair of opposed symmetric lobes leading away from the region of a rotational axis for said array; b. said symmetric lobes being shaped like a cross section of an apple and being inturned to meet in a stem region proximate to said rotational axis; c. each of said lobes being approximately semi-circular from said stem region to an indent region opposite said stem region; and d. said path in said indent region being curved inward by less than the inturn of said lobes at said stem region.

Claim 20

Dependent Claim 32 words

The array of claim 16 wherein a maximum distance across said path between said lobes is about double a minimum distance across said path between said stem region and said indent region.

Claim 21

Dependent Claim 37 words

The array of claim 17 wherein said magnets are generally oblong with an outer magnet of each pair being arranged tangentially to said lobes and an inner magnet of each pair being arranged radially of said lobes.

Claim 22

Dependent Claim 37 words

The array of claim 18 wherein said stem region and said indent region have a outer one of said magnets arranged radially of said path and an inner one of said magnets arranged tangentially of said path.

Claim 23

Dependent Claim 24 words

The array of claim 19 wherein said inner one of said magnets in said stem region is arranged radially inward of adjacent inner magnets.

Claim 24

Dependent Claim 23 words

The array of claim 19 wherein said inner one of said magnets in said stem region is arranged on said center of rotation.

Claim 25

Dependent Claim 22 words

The array of claim 19 wherein said inner one of said magnets in said indentation is radially even with adjacent inner magnets.

Claim 26

Dependent Claim 31 words

The array of claim 16 wherein said array is configured relative to said target so that erosion occurs on all regions of said target to keep said target clean during sputtering.

Claim 27

Dependent Claim 32 words

The array of claim 23 wherein a maximum distance across said path between said lobes is about double a minimum distance across said path between said stem region and said indent region.

Claim 28

Dependent Claim 37 words

The array of claim 24 wherein said magnets are generally oblong with an outer magnet of each pair being arranged tangentially to said lobes and an inner magnet of each pair being arranged radially of said lobes.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	1996-09-27	1997-03-29	1997-09-28	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	2000-09-27	2001-03-29	2001-09-28	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2004-09-27	2005-03-29	2005-09-28	$7700.00	Window Closed / Lapsed

Apple-shaped magnetron for sputtering system

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