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US5239194A Expired / Lapsed US ⏱️ 0.0 years remaining

Semiconductor device having increased electrostatic breakdown voltage

Assignee: Toshiba Corp
•
Filing: 1991-02-28
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Granted: 1993-08-24
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Expires: 2011-02-28
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Abstract

Abstract A semiconductor substrate has a plurality of MOS transistors formed therein. Each of the transistors comprises high density diffusion regions having high impurity density and serving as source and drain, low density diffusion regions having low impurity density and extending in contact with the high density diffusion regions, respectively, a channel region formed between the low density diffusion regions, and a gate formed above the substrate and insulated from the channel region. One of the transistors has its drain connected to an input/output terminal. The low density diffusion region of the one has impurity density higher than that of the other. The channel length of the one is greater than that of the other.

Inventors

  • 👤 Satoshi Ohtani
  • 👤 Masayuki Yoshida
  • 👤 Nobutaka Kitagawa
  • 👤 Tomotaka Saito

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-02 13:00
CPC Classifications
H; H10; H10D; H10D89/00; H10D89/60; H10D89/601; H10D89/811; H10D30/00; H10D30/60; H10D30/601; H10D64/00; H10D64/20; H10D64/27; H10D64/311; H10D64/411; H10D64/511; H10D84/00; H10D84/01; H10D84/0123; H10D84/0126; H10D84/0165; H10D84/0181; H10D84/80; H10D84/82; H10D84/83; H10D84/85

Claims Analysis

Total Claims: 16
Claim 1
Independent Claim 164 words
A semiconductor device comprising: a terminal for external connection; a first circuit comprising at least one insulated-gate field effect transistor having a drain portion coupled to the terminal, the transistor of the first circuit including a high density diffusion region having a high impurity density and an impurity diffusion region having a lower impurity density which extends in contact with the high density diffusion region; and a second circuit comprising at least one insulated-gate field effect transistor having a gate portion coupled to the terminal, the transistor of the second circuit including a high density diffusion region having a high impurity density and an impurity diffusion region having a lower impurity density which extends in contact with the high density diffusion region of that transistor, the impurity density of the impurity diffusion region in the insulated-gate field effect transistor of the first circuit being higher than the impurity density of the impurity diffusion region in the insulated-gate field effect transistor of the second circuit.
Claim 2
Dependent Claim 164 words
A semiconductor device comprising: a terminal for external connection; a first circuit comprising at least one insulated-gate field effect transistor having a drain portion coupled to the terminal, the transistor of the first circuit including a high density diffusion region having a high impurity density and an impurity diffusion region having a lower impurity density which extends in contact with the high density diffusion region; and a second circuit comprising at least one insulated-gate field effect transistor having a gate portion coupled to the terminal, the transistor of the second circuit including a high density diffusion region having a high impurity density and an impurity diffusion region having a lower impurity density which extends in contact with the high density diffusion region of that transistor, the impurity density of the impurity diffusion region in the insulated-gate field effect transistor of the first circuit being higher than the impurity density of the impurity diffusion region in the insulated-gate field effect transistor of the second circuit.
Claim 3
Dependent Claim 18 words
The semiconductor device according to claim 1, wherein the impurity diffusion regions have a Lightly Doped Drain structure.
Claim 4
Dependent Claim 16 words
The semiconductor device according to claim 1, wherein the impurity diffusion regions have a double-diffusion structure.
Claim 5
Dependent Claim 34 words
The semiconductor device according to claim 1, wherein the insulated-gate field effect transistor of the first circuit has a channel length greater than that of the insulated-gate field effect transistor of the second circuit.
Claim 6
Dependent Claim 198 words
A semiconductor device comprising: a terminal for external connection; a first circuit comprising at least one insulated-gate field effect transistor having a drain portion coupled to the terminal, the transistor of the first circuit including a high density diffusion region having a high impurity density and an impurity diffusion region having a lower impurity density which extends in contact with the high density diffusion region; and a second circuit comprising at least one insulated-gate field effect transistor having a gate portion coupled to the terminal, the transistor of the second circuit including a high density diffusion region having a high impurity density and an impurity diffusion region having a lower impurity density which extends in contact with the high density diffusion region of that transistor, the impurity density of the impurity diffusion region in the insulated-gate field effect transistor of the first circuit being higher than the impurity density of the impurity diffusion region in the insulated-gate field effect transistor of the second circuit, and the impurity density of the impurity diffusion region of the insulated-gate field effect transistor of the first circuit falling within a range of 3×10 19 cm -3 to 3×10 20 cm -3 .
Claim 7
Dependent Claim 198 words
A semiconductor device comprising: a terminal for external connection; a first circuit comprising at least one insulated-gate field effect transistor having a drain portion coupled to the terminal, the transistor of the first circuit including a high density diffusion region having a high impurity density and an impurity diffusion region having a lower impurity density which extends in contact with the high density diffusion region; and a second circuit comprising at least one insulated-gate field effect transistor having a gate portion coupled to the terminal, the transistor of the second circuit including a high density diffusion region having a high impurity density and an impurity diffusion region having a lower impurity density which extends in contact with the high density diffusion region of that transistor, the impurity density of the impurity diffusion region in the insulated-gate field effect transistor of the first circuit being higher than the impurity density of the impurity diffusion region in the insulated-gate field effect transistor of the second circuit, and the impurity density of the impurity diffusion region of the insulated-gate field effect transistor of the first circuit falling within a range of 3×10 19 cm -3 to 3×10 20 cm -3 .
Claim 8
Dependent Claim 58 words
The semiconductor device according to claim 4, wherein the channel length of the insulated-gate field effect transistor of the first circuit is 1.2 μm or more, 1.5 μm or more, or 1.9 μm or more against 0.8 μm, 1.0 μm, or 1.2 μm for the channel length of the insulated-gate field effect transistor of the second circuit, respectively.
Claim 9
Dependent Claim 191 words
A semiconductor device comprising: a terminal for external connection; a first circuit comprising at least one insulated-gate field effect transistor having a drain portion coupled to the terminal, the transistor of the first circuit including a high density diffusion region having a high impurity density and an impurity diffusion region having a lower impurity density which extends in contact with the high density diffusion region, the impurity density of the impurity diffusion region of the insulated-gate field effect transistor of the first circuit falling within a range of 3×10 19 cm -3 to 3×10 20 cm -3 ; and a second circuit comprising at least one insulated-gate field effect transistor having a gate portion coupled to the terminal, the transistor of the second circuit including a high density diffusion region having a high impurity density and an impurity diffusion region having a lower impurity density which extends in contact with the high density diffusion region of that transistor, the impurity density of the impurity diffusion region of the insulated-gate field effect transistor of the second circuit falling within a range of 3×10 18 cm -3 to 1×10 19 cm -3 .
Claim 10
Dependent Claim 191 words
A semiconductor device comprising: a terminal for external connection; a first circuit comprising at least one insulated-gate field effect transistor having a drain portion coupled to the terminal, the transistor of the first circuit including a high density diffusion region having a high impurity density and an impurity diffusion region having a lower impurity density which extends in contact with the high density diffusion region, the impurity density of the impurity diffusion region of the insulated-gate field effect transistor of the first circuit falling within a range of 3×10 19 cm -3 to 3×10 20 cm -3 ; and a second circuit comprising at least one insulated-gate field effect transistor having a gate portion coupled to the terminal, the transistor of the second circuit including a high density diffusion region having a high impurity density and an impurity diffusion region having a lower impurity density which extends in contact with the high density diffusion region of that transistor, the impurity density of the impurity diffusion region of the insulated-gate field effect transistor of the second circuit falling within a range of 3×10 18 cm -3 to 1×10 19 cm -3 .
Claim 11
Dependent Claim 226 words
A semiconductor device comprising: a terminal for external connection; a first circuit comprising at least one insulted-gate field effect transistor having a drain portion coupled to the terminal, the transistor of the first circuit including high density diffusion regions having a high impurity density, impurity diffusion regions having a lower impurity density which extend in contact with the high density diffusion regions, respectively, a channel region formed between the impurity diffusion regions, and a gate insulated from the channel regions; and a second circuit comprising at least one insulated-gate field effect transistor, the transistor of the second circuit including high density diffusion regions having a high impurity density, impurity diffusion regions having a lower impurity density which extend in contact with the high density diffusion regions of that transistor, respectively, a channel region formed between the impurity diffusion regions of that transistor, and a gate portion coupled to the terminal and insulated from the channel region of that transistor, the impurity density of the impurity diffusion region in the insulated-gate field effect transistor of the first circuit being higher than the impurity density of the impurity diffusion region in the insulated-gate field effect transistor of the second circuit, and the channel length of the insulated-gate field effect transistor of the first circuit being greater than that of the insulated-gate field effect transistor of the second circuit.
Claim 12
Dependent Claim 226 words
A semiconductor device comprising: a terminal for external connection; a first circuit comprising at least one insulted-gate field effect transistor having a drain portion coupled to the terminal, the transistor of the first circuit including high density diffusion regions having a high impurity density, impurity diffusion regions having a lower impurity density which extend in contact with the high density diffusion regions, respectively, a channel region formed between the impurity diffusion regions, and a gate insulated from the channel regions; and a second circuit comprising at least one insulated-gate field effect transistor, the transistor of the second circuit including high density diffusion regions having a high impurity density, impurity diffusion regions having a lower impurity density which extend in contact with the high density diffusion regions of that transistor, respectively, a channel region formed between the impurity diffusion regions of that transistor, and a gate portion coupled to the terminal and insulated from the channel region of that transistor, the impurity density of the impurity diffusion region in the insulated-gate field effect transistor of the first circuit being higher than the impurity density of the impurity diffusion region in the insulated-gate field effect transistor of the second circuit, and the channel length of the insulated-gate field effect transistor of the first circuit being greater than that of the insulated-gate field effect transistor of the second circuit.
Claim 13
Dependent Claim 259 words
A semiconductor device comprising: a terminal for external connection; a semiconductor substrate; a first circuit comprising at least one insulated-gate field effect transistor having a drain portion coupled to the terminal, the transistor of the first circuit including high density diffusion regions having a high impurity density and being formed in the substrate, impurity diffusion regions having a lower impurity density which extend in the substrate in contact with the high density diffusion regions, respectively, a channel region formed between the impurity diffusion regions, and a gate formed above the substrate and insulated from the channel region; and a second circuit comprising at least one insulated-gate field effect transistor, the transistor of the second circuit including high density diffusion regions having a high impurity density and being formed in the substrate, impurity diffusion regions having a lower impurity density and extending in the substrate in contact with the high density diffusion regions of that transistor, respectively, a channel region formed between the impurity diffusion regions of that transistor, and a gate portion coupled to the terminal of that transistor, formed above the substrate, and insulated from the channel region of that transistor, the impurity density of the impurity diffusion region in the insulated-gate field effect transistor of the first circuit being higher than the impurity density of the impurity diffusion region in the insulated-gate field effect transistor of the second circuit, and the channel length of the insulated-gate field effect transistor of the first circuit being greater than that of the insulated-gate field effect transistor of the second circuit.
Claim 14
Dependent Claim 259 words
A semiconductor device comprising: a terminal for external connection; a semiconductor substrate; a first circuit comprising at least one insulated-gate field effect transistor having a drain portion coupled to the terminal, the transistor of the first circuit including high density diffusion regions having a high impurity density and being formed in the substrate, impurity diffusion regions having a lower impurity density which extend in the substrate in contact with the high density diffusion regions, respectively, a channel region formed between the impurity diffusion regions, and a gate formed above the substrate and insulated from the channel region; and a second circuit comprising at least one insulated-gate field effect transistor, the transistor of the second circuit including high density diffusion regions having a high impurity density and being formed in the substrate, impurity diffusion regions having a lower impurity density and extending in the substrate in contact with the high density diffusion regions of that transistor, respectively, a channel region formed between the impurity diffusion regions of that transistor, and a gate portion coupled to the terminal of that transistor, formed above the substrate, and insulated from the channel region of that transistor, the impurity density of the impurity diffusion region in the insulated-gate field effect transistor of the first circuit being higher than the impurity density of the impurity diffusion region in the insulated-gate field effect transistor of the second circuit, and the channel length of the insulated-gate field effect transistor of the first circuit being greater than that of the insulated-gate field effect transistor of the second circuit.
Claim 15
Dependent Claim 192 words
A semiconductor device comprising: a terminal for external connection; a first circuit comprising at least one insulated-gate field effect transistor having a drain portion coupled to the terminal, the transistor of the first circuit including a high density diffusion region having a high impurity density and an impurity diffusion region having a lower impurity density which extends in contact with the high density diffusion region; and a second circuit comprising at least one insulated-gate field effect transistor, the transistor of the second circuit including a high density diffusion region having a high impurity density and an impurity diffusion region having a lower impurity density which extends in contact with the high density diffusion region of that transistor, the impurity density of the impurity diffusion region in the insulated-gate field effect transistor of the first circuit being higher than the impurity density of the impurity diffusion region in the insulated-gate field effect transistor of the second circuit, and the impurity density of the impurity diffusion region in the insulated-gate field effect transistor of the second circuit being set in such a manner that an electrostatic breakdown uniformly occurs in a gate width direction.
Claim 16
Dependent Claim 192 words
A semiconductor device comprising: a terminal for external connection; a first circuit comprising at least one insulated-gate field effect transistor having a drain portion coupled to the terminal, the transistor of the first circuit including a high density diffusion region having a high impurity density and an impurity diffusion region having a lower impurity density which extends in contact with the high density diffusion region; and a second circuit comprising at least one insulated-gate field effect transistor, the transistor of the second circuit including a high density diffusion region having a high impurity density and an impurity diffusion region having a lower impurity density which extends in contact with the high density diffusion region of that transistor, the impurity density of the impurity diffusion region in the insulated-gate field effect transistor of the first circuit being higher than the impurity density of the impurity diffusion region in the insulated-gate field effect transistor of the second circuit, and the impurity density of the impurity diffusion region in the insulated-gate field effect transistor of the second circuit being set in such a manner that an electrostatic breakdown uniformly occurs in a gate width direction.

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US4656492A Cited
EP0114491A1 Cited
US4918501A Cited
EP0189914A2 Cited
JPS61216477A Cited
EP0217525A1 Cited
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JPS63122175A Cited

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Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
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