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Zinc oxide sintered body, and preparation process and use thereof

Assignee: Tosoh Corp
•
Filing: 1992-03-02
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Granted: 1993-08-17
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Expires: 2012-03-02
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Abstract

Abstract An electroconductive zinc oxide sintered body composed of sintered particles fusion-bonded in the grain boundaries thereof; which has a sintered density of from 5 to 5.5 g/cm 3 ; and which does not substantially contain closed cells isolated from the outside in the interior of the sintered body. The electroconductive zinc oxide sintered body is prepared by sintering a mixture of an oxide of an element having a positive valency of at least 3 and zinc oxide in the presence of water at a temperature of at least 1,300° C. The electroconductive zinc oxide sintered body is used as a sputtering target for the preparation of a low resistance, transparent electroconductive film.

Inventors

  • 👤 Nobuhiro Ogawa
  • 👤 Takashi Mori

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-08 07:05
CPC Classifications
C; C04; C04B; C04B35/00; C04B35/01; C04B35/453; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/3407; C23C14/3414; H; H01; H01B; H01B1/00; H01B1/06; H01B1/08

Claims Analysis

Total Claims: 6
Claim 1
Independent Claim 186 words
A process for the preparation of an electroconductive zinc oxide sintered body, which comprises the steps of: mixing powdery zinc oxide and a powdery hydrate of at least one oxide of an element having a positive valency of at least 3, and sintering the mixture at a temperature of at least 1,300° C.; said element being selected from the group consisting of Sc and Y of groups IIIB of the Periodic Table, B, Al, Ga, In and Tl of the group IIIA, Ti, Zr, Hf and Th of the group IVB, C, Si, Ge, Sn and Pb of the group IVA, V, Nb, Ta and Pa of the group VB, As, Sb and Bi of the group VA, Cr, Mo, W and U of the group VIB, Se, Te and Po of the group VIA, Mn, Tc and Re of the group VIIB, Fe, Co, Ni, Ru, Rh, Pd, OS, Ir and Pt of the group VIII, lanthanide elements, and actinide elements, and the amount of said element being from 0.1 to 20 atomic % based on the amount of the zinc of the zinc oxide.
Claim 2
Dependent Claim 186 words
A process for the preparation of an electroconductive zinc oxide sintered body, which comprises the steps of: mixing powdery zinc oxide and a powdery hydrate of at least one oxide of an element having a positive valency of at least 3, and sintering the mixture at a temperature of at least 1,300° C.; said element being selected from the group consisting of Sc and Y of groups IIIB of the Periodic Table, B, Al, Ga, In and Tl of the group IIIA, Ti, Zr, Hf and Th of the group IVB, C, Si, Ge, Sn and Pb of the group IVA, V, Nb, Ta and Pa of the group VB, As, Sb and Bi of the group VA, Cr, Mo, W and U of the group VIB, Se, Te and Po of the group VIA, Mn, Tc and Re of the group VIIB, Fe, Co, Ni, Ru, Rh, Pd, OS, Ir and Pt of the group VIII, lanthanide elements, and actinide elements, and the amount of said element being from 0.1 to 20 atomic % based on the amount of the zinc of the zinc oxide.
Claim 3
Dependent Claim 38 words
The process according to claim 1, wherein the amount of the element having a positive valency of at least 3 is from 0.5 to 5 atomic % based on the amount of the zinc of the zinc oxide.
Claim 4
Dependent Claim 40 words
The process according to claim 1, wherein the mixture of the oxide of the element having a positive valency of at least 3 and the zinc oxide is first molded, and the resulting molded mixture is then subjected to sintering.
Claim 5
Dependent Claim 28 words
The process according to claim 1, wherein the sintering is carried out at a temperature of from 1,400° C. to 1,500° C. for from 5 to 20 hours.
Claim 6
Dependent Claim 22 words
The process according to claim 1, wherein the sintering is carried out at a temperature of from 1,450° C. to 1,500° C.

References Cited (Backward Citations)

US3538023A Cited
US4142996A Cited
US4767729A Cited
US4948529A Cited
US5102650A Cited
US5026672A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1996-08-16 1997-02-15 1997-08-17 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2000-08-16 2001-02-15 2001-08-17 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2004-08-16 2005-02-15 2005-08-17 $7700.00 Window Closed / Lapsed

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