US5234864A
Expired / Lapsed
US
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Method for interconnecting layers in a semiconductor device using two etching gases
Assignee: Samsung Electronics Co Ltd
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Filing: 1991-12-06
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Granted: 1993-08-10
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Expires: 2011-12-06
Abstract
Abstract A method for interconnecting layers in a semiconductor device is disclosed. The device includes a lower conductive layer formed by capping a second conductive layer on a first conductive layer, a contact window formed in an inter-insulating layer on the lower conductive layer, and an upper conductive layer connected to the lower conductive layer through the contact window. The contact window is formed by removing a portion of the inter-insulating layer where the contact will be formed using a first etching gas, and removing a portion of the second conductive layer where the contact will be formed using a second etching gas. The contact resistance becomes uniform by preventing the formation of a non-volatile mixture in the contact window, and the reliability of the device is improved by planarizing the surface of the lower conductive layer.
Inventors
- 👤 Jin-hong Kim
- 👤 Chang-lyong Song
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 13:01
CPC Classifications
H; H10; H10P; H10P50/00; H10P50/20; H10P50/26; H10P50/264; H10P50/266; H10P50/267; H10P50/28; H10P50/282; H10P50/283; H10W; H10W20/00; H10W20/01; H10W20/071; H10W20/081; H10W20/082; H10W20/40; H10W20/41; H10W20/42; Y; Y10; Y10S; Y10S148/00; Y10S148/131
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
96 words
A method for interconnecting layers in a semiconductor device comprising a lower conductive layer formed by capping a first conductive layer with a second conductive layer formed of material having low reflexibility, a contact window formed in an inter-insulating layer on said lower conductive layer, and an upper conductive layer connected to said lower conductive layer through said contact window, wherein said contact window is formed by the steps of: removing a portion of said inter-insulating layer, using a first etching gas; and removing a portion of said second conductive layer, using a second etching gas.
Claim 2
Independent Claim
96 words
A method for interconnecting layers in a semiconductor device comprising a lower conductive layer formed by capping a first conductive layer with a second conductive layer formed of material having low reflexibility, a contact window formed in an inter-insulating layer on said lower conductive layer, and an upper conductive layer connected to said lower conductive layer through said contact window, wherein said contact window is formed by the steps of: removing a portion of said inter-insulating layer, using a first etching gas; and removing a portion of said second conductive layer, using a second etching gas.
Claim 3
Dependent Claim
34 words
A method for interconnecting layers in a semiconductor device as claimed in claim 1, wherein said first conductive layer is formed of a material selected from a group consisting of aluminum and aluminum alloy.
Claim 4
Dependent Claim
24 words
A method for interconnecting layers in a semiconductor device as claimed in claim 1, wherein said second conductive layer is formed of titanium nitride.
Claim 5
Dependent Claim
26 words
A method for interconnecting layers in a semiconductor device as claimed in claim 3, wherein said second conductive layer material has a thickness of about 300Å-600Å.
Claim 6
Dependent Claim
22 words
A method for interconnecting layers in a semiconductor device as claimed in claim 1, wherein said first etching gas is fluorine mixture.
Claim 7
Dependent Claim
44 words
A method for interconnecting layers in a semiconductor device as claimed in claim 5, wherein the mixture used as said fluorine mixture is a member selected from a group consisting of CHF 3 /CF 4 /He and CH 4 /CHF 3 /O 2 .
Claim 8
Dependent Claim
37 words
A method for interconnecting layers in a semiconductor device as claimed in claim 1, wherein said second etching gas is a gas which does not generate a nonvolatile mixture when reacted with said first conductive layer material.
Claim 9
Dependent Claim
23 words
A method for interconnecting layers in a semiconductor device as claimed in claim 7, wherein said second etching gas is a chlorine mixture.
Claim 10
Dependent Claim
26 words
A method for interconnecting layers in a semiconductor device as claimed in claim 8, wherein said chlorine mixture is BCl 3 /Cl 2 /H 2 .
Claim 11
Dependent Claim
35 words
A method for interconnecting layers in a semiconductor device as claimed in claim 1, wherein said step of removing said inter-insulating layer continues until said a predetermined thickness of said second conductive layer is removed.
Claim 12
Dependent Claim
31 words
A method for interconnecting layers in a semiconductor device as claimed in claim 10, wherein said predetermined thickness is less than 50% of the initial thickness of said second conductive layer.
Claim 13
Dependent Claim
35 words
A method for interconnecting layers in a semiconductor device as claimed in claim 1, wherein said step of removing said second conductive layer continues until a predetermined thickness of said first conductive layer is removed.
Claim 14
Dependent Claim
23 words
A method for interconnecting layers in a semiconductor device as claimed in claim 12, wherein said predetermined thickness is about 200Å to 500Å.
Claim 15
Dependent Claim
32 words
A method for interconnecting layers in a semiconductor device as claimed in claim 1, wherein said steps for removing said inter-insulating layer and said second conductive layer are performed in respective chambers.
Claim 16
Dependent Claim
108 words
A method for interconnecting layers in a semiconductor device as claimed in claim 1, wherein said second etching gas comprises a chlorine mixture of BCl 3 /Cl 2 /H 2 and said step of removing a portion of said second conductive layer is performed at a ratio of BCl 3 to Cl 2 , a gas pressure, and a RF power, such that if "1" is assumed as an etch rate of any one material among materials forming said inter-insulating layer, said first conductive layer, and said second conductive layer, materials other than said any one material are removed at an etch rate in the range of 0.7-1.3.
Claim 17
Independent Claim
173 words
A method for interconnecting layers in a semiconductor device having a substrate, a lower conductive layer, a contact window, and an upper conductive layer, said method comprising the steps of: forming a first conductive layer composed of a material selected from a group consisting of aluminum and aluminum alloy on the semiconductor substrate; forming a second conductive layer having a low reflexibility on the whole surface of said first conductive layer; forming said lower conductive layer by patterning said first and second conductive layers; forming an inter-insulating layer by coating an insulating material over the whole surface of the structure resulting from the patterning of said first and second conductive layers; forming said contact window by removing a portion of said inter-insulating layer on said lower conductive layer using a fluorine mixture; removing said second conductive layer exposes through said contact window, using a chlorine mixture; and forming said upper conductive layer by depositing and patterning a third conductive layer over the whole surface of the structure resulting from the previous two steps.
Claim 18
Independent Claim
173 words
A method for interconnecting layers in a semiconductor device having a substrate, a lower conductive layer, a contact window, and an upper conductive layer, said method comprising the steps of: forming a first conductive layer composed of a material selected from a group consisting of aluminum and aluminum alloy on the semiconductor substrate; forming a second conductive layer having a low reflexibility on the whole surface of said first conductive layer; forming said lower conductive layer by patterning said first and second conductive layers; forming an inter-insulating layer by coating an insulating material over the whole surface of the structure resulting from the patterning of said first and second conductive layers; forming said contact window by removing a portion of said inter-insulating layer on said lower conductive layer using a fluorine mixture; removing said second conductive layer exposes through said contact window, using a chlorine mixture; and forming said upper conductive layer by depositing and patterning a third conductive layer over the whole surface of the structure resulting from the previous two steps.
Claim 19
Dependent Claim
23 words
A method for interconnecting layers in a semiconductor device as claimed in claim 16, wherein said second conductive layer material is titanium nitride.
Claim 20
Dependent Claim
40 words
A method for interconnecting layers in a semiconductor device as claimed in claim 16, wherein said fluorine mixture is a member selected from a group consisting of CHF 3 /CF 4 /He and CF 4 /CHF 3 /O 2 .
Claim 21
Dependent Claim
26 words
A method for interconnecting layers in a semiconductor device as claimed in claim 16, wherein said chlorine mixture is BCl 3 /CL 2 /H 2 .
Claim 22
Dependent Claim
42 words
A method for interconnecting layers in a semiconductor device as claimed in claim 16, wherein said step of forming said contact window by removing the portion of said inter-insulating layer continues until a predetermined thickness of said second conductive layer is removed.
Claim 23
Dependent Claim
31 words
A method for interconnecting layers in a semiconductor device as claimed in claim 20, wherein said predetermined thickness is less than 50% of the initial thickness of said second conductive layer.
Claim 24
Dependent Claim
40 words
A method for interconnecting layers in a semiconductor device as claimed in claim 16, wherein said step of removing said second conductive layer exposed through said contact window continues until a predetermined thickness of said first conductive layer is removed.
Claim 25
Dependent Claim
21 words
A method for interconnecting layers in a semiconductor device as claimed in claim 22, wherein said predetermined thickness is about 200Å-500Å.
Claim 26
Dependent Claim
108 words
A method for interconnecting layers in a semiconductor device as claimed in claim 22, wherein said second etching gas comprises a chlorine mixture of BCl 3 /Cl 2 /H 2 and said step of removing a portion of said second conductive layer is performed at a ratio of BCl 3 to Cl 2 , a gas pressure, and a RF power, such that if "1" is assumed as an etch rate of any one material among materials forming said inter-insulating layer, said first conductive layer, and said second conductive layer, materials other than said any one material are removed at an etch rate in the range of 0.7-1.3.
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