US5232548A
Expired / Lapsed
US
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Discrete fabrication of multi-layer thin film, wiring structures
Assignee: International Business Machines Corp
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Filing: 1991-10-29
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Granted: 1993-08-03
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Expires: 2011-10-29
Abstract
Abstract A multilayer, three-dimensional wiring matrix is fabricated from a plurality of individually testable plane pair sub-units (30). Each of the plane pair sub-units (30) includes a compensator (20) with capping layers (32) laminated on either side. The compensator (20) has a dielectric (14) encapsulated foil (10) which has been patterned with holes (12). Metallization patterns on the surfaces of the compensator (20) provide orthogonal wiring (22), electrical connections (24) to the foil (10), and electrical connections (26) between the top and bottom surfaces. The capping layer (32) includes joining metallurgy (38) at selected locations within a dielectric layer (36) that is in registry with the metallization in the vias (16). The joining metallurgy (38) may be a metal loaded thermoplastic and provides a seal for the vias (16) as well as planarizes the structure. The capping layers (32) may be formed in-situ on the compensator or separately.
Inventors
- 👤 Scott G. Ehrenberg
- 👤 L. Wynn Herron
- 👤 Ekkehard F. Miersch
- 👤 Jae Park
- 👤 Janet L. Poetzinger
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 17:24
CPC Classifications
H; H05; H05K; H05K3/00; H05K3/46; H05K3/4611; H05K3/4614; H05K3/462; H05K1/00; H05K1/02; H05K1/03; H05K1/05; H05K2201/00; H05K2201/06; H05K2201/068; H05K2201/09; H05K2201/09209; H05K2201/095; H05K2201/09509; H05K2201/09536; H05K2201/096; H05K2203/00; H05K2203/03; H05K2203/0338; H05K2203/06; H05K2203/066; H05K2203/15; H05K2203/1572; H05K3/22; H05K3/28; H05K3/281; H05K3/4641; Y; Y10; Y10S; Y10S428/00; Y10S428/901; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49117; Y10T29/49124; Y10T29/49155; Y10T29/49165; Y10T428/00; Y10T428/24; Y10T428/24802; Y10T428/24917
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
270 words
A method for fabricating a multilayer interconnect structure, comprising the steps of: patterning a foil with a plurality of holes; ,; encapsulating said foil in a first dielectric to create an encapsulated foil having planar top and bottom surfaces; creating a plurality of vias in said first dielectric, a number of said vias passing through said holes in said foil and at least one of said vias terminating at said foil underneath said first dielectric; forming metallized patterns on at least one planar surface of said encapsulated foil and in said plurality of vias in said encapsulated foil, said metallized patterns in said vias which pass through said holes in said foil providing an electrical connection which extends between said top and bottom surfaces of said encapsulated foil, said metallized pattern in a via which terminates at said foil underneath said first dielectric providing an electrical connection with said foil; applying capping layers, each of which include a second dielectric and a plurality of electrical interconnection sites filled with joining metallurgy, to said top and bottom surfaces of said encapsulated foil, said electrical interconnection sites being in registry with said vias in said encapsulated foil which pass through said holes in said foil; and joining said capping layers with said top and bottom surfaces of said encapsulated foil to form a plane pair sub-unit in which said metallized patterns in said vias which pass through said holes in said foil form an electrical connection with said joining metallurgy in said capping layers and said first dielectric of said encapsulated foil and said second dielectric of said capping layers bond together.
Claim 2
Independent Claim
270 words
A method for fabricating a multilayer interconnect structure, comprising the steps of: patterning a foil with a plurality of holes; ,; encapsulating said foil in a first dielectric to create an encapsulated foil having planar top and bottom surfaces; creating a plurality of vias in said first dielectric, a number of said vias passing through said holes in said foil and at least one of said vias terminating at said foil underneath said first dielectric; forming metallized patterns on at least one planar surface of said encapsulated foil and in said plurality of vias in said encapsulated foil, said metallized patterns in said vias which pass through said holes in said foil providing an electrical connection which extends between said top and bottom surfaces of said encapsulated foil, said metallized pattern in a via which terminates at said foil underneath said first dielectric providing an electrical connection with said foil; applying capping layers, each of which include a second dielectric and a plurality of electrical interconnection sites filled with joining metallurgy, to said top and bottom surfaces of said encapsulated foil, said electrical interconnection sites being in registry with said vias in said encapsulated foil which pass through said holes in said foil; and joining said capping layers with said top and bottom surfaces of said encapsulated foil to form a plane pair sub-unit in which said metallized patterns in said vias which pass through said holes in said foil form an electrical connection with said joining metallurgy in said capping layers and said first dielectric of said encapsulated foil and said second dielectric of said capping layers bond together.
Claim 3
Dependent Claim
50 words
A method as recited in claim 1 wherein said step of encapsulating said foil is performed by laminating a fully cured thermoplastic material having a low glass transition temperature onto said foil, said fully cured thermoplastic material developing an adhesion to said foil and filling said holes in said foil.
Claim 4
Dependent Claim
68 words
A method as recited in claim 1 wherein said step of encapsulating said foil is performed by laminating a first fully cured material having a high glass transition temperature having a coating of a second fully cured thermoplastic material which has a low glass transition temperature onto said foil, said second fully cured thermoplastic material developing an adhesion to said foil and filling said holes in said foil.
Claim 5
Dependent Claim
38 words
A method as recited in claim 1 wherein said step of encapsulating said foil is performed by a controlled conformal process which simultaneously encapsulates said foil and creates said vias which extend through said holes in said foil.
Claim 6
Dependent Claim
112 words
A method as recited in claim 1 wherein said step of applying said capping layers includes the following steps: forming layers of said second dielectric on dimensionally stable carriers; creating blind holes in said layers of said second dielectric; filling said blind holes with said joining metallurgy to create a structure having a carrier topped with a capping layer comprised of a dielectric and joining metallurgy; laminating at least two of said structures having said carrier topped with said capping layer to said top and bottom surfaces of said encapsulated foil, respectively; and removing said carriers from said top and bottom surfaces of said encapsulated foil while leaving said capping layers thereon.
Claim 7
Dependent Claim
54 words
A method as recited in claim 5 wherein said joining metallurgy is a metal loaded thermoplastic material in the form of a screenable paste and said step of filling said blind holes includes the steps of depositing said screenable paste into said blind holes and allowing a solvent in said screenable paste to dry.
Claim 8
Dependent Claim
22 words
A method as recited in claim 5 wherein the thermal coefficient of expansion of said foil and said carrier are approximately equal.
Claim 9
Dependent Claim
125 words
A method as recited in claim 1 wherein said step of applying said capping layers includes the steps of: coating said second dielectric on said top and bottom surfaces of said encapsulated foil; forming blind holes in said second dielectric at points in registry with said vias which pass through said holes in said foil; depositing joining metallurgy in said blind holes in said second dielectric to complete capping layers including said second dielectric and said joining metallurgy in-situ on said encapsulated foil; and joining said capping layers to said encapsulated foil wherein said joining metallurgy forms an electrical connection with said metallized patterns in said vias which pass through said holes in said foil and said second dielectric bonds together with said first dielectric.
Claim 10
Dependent Claim
50 words
A method as recited in claim 8 wherein said joining metallurgy is a metal loaded thermoplastic material in the form of a screenable paste and said step of depositing includes the steps of filling said blind holes with screenable paste and allowing a solvent in said screenable paste to dry.
Claim 11
Dependent Claim
48 words
A method as recited in claim 1 further comprising the steps of: stacking a plurality of plane pair sub-units with electrical interconnection sites of the capping layers of adjacent plane pair sub-units in alignment; and laminating said plane pair sub-units together to form a three dimensional wiring matrix.
Claim 12
Dependent Claim
77 words
A method as recited in claim 1 further comprising the steps of: stacking a plurality of plane pair sub-units with electrical interconnection sites of the capping layers of adjacent plane pair sub-units in alignment; positioning the stack of plane pair sub-units on a stiffener or electronic component; and laminating said plane pair sub-units and said stiffener or electronic component together to form a three dimensional wiring matrix as a unitary structure with said stiffener or electronic component.
Claim 13
Dependent Claim
185 words
A plane pair sub-unit for incorporation into a three dimensional wiring matrix, comprising: a dielectric encapsulated foil including a foil patterned with a plurality of holes and a first dielectric encapsulating said foil, said first dielectric having a plurality of vias wherein a number of said vias pass through said holes in said foil and at least one of said vias opens on said foil; metallized patterns formed on at least one of a top and bottom surface of said dielectric encapsulated foil; first via metallizations in said vias passing through said holes in said foil, said first via metallizations providing an electrical connection which extends between said top and bottom surfaces of said dielectric encapsulated foil; a second via metallization in a via which opens on said foil, said second via metallization providing an electrical connection with said foil; and capping layers on said top and bottom surfaces of said dielectric encapsulated foil, said capping layers including a second dielectric having a plurality of electrical interconnection sites filled with joining metallurgy where said electrical interconnection sites are in registry with said first via metallizations.
Claim 14
Dependent Claim
185 words
A plane pair sub-unit for incorporation into a three dimensional wiring matrix, comprising: a dielectric encapsulated foil including a foil patterned with a plurality of holes and a first dielectric encapsulating said foil, said first dielectric having a plurality of vias wherein a number of said vias pass through said holes in said foil and at least one of said vias opens on said foil; metallized patterns formed on at least one of a top and bottom surface of said dielectric encapsulated foil; first via metallizations in said vias passing through said holes in said foil, said first via metallizations providing an electrical connection which extends between said top and bottom surfaces of said dielectric encapsulated foil; a second via metallization in a via which opens on said foil, said second via metallization providing an electrical connection with said foil; and capping layers on said top and bottom surfaces of said dielectric encapsulated foil, said capping layers including a second dielectric having a plurality of electrical interconnection sites filled with joining metallurgy where said electrical interconnection sites are in registry with said first via metallizations.
Claim 15
Dependent Claim
27 words
A plane pair sub-unit as recited in claim 12 wherein said foil provides stiffness to said plane pair sub-unit and has a low thermal coefficient of expansion.
Claim 16
Dependent Claim
33 words
A plane pair sub-unit as recited in claim 12 wherein said foil serves as a ground or reference plane for said plane pair sub-unit via said electrical connection provided by said second metallization.
Claim 17
Dependent Claim
22 words
A plane pair sub-unit as recited in claim 12 wherein said first dielectric includes a thermoplastic having a low glass transition temperature.
Claim 18
Dependent Claim
26 words
A plane pair sub-unit as recited in claim 15 wherein said thermoplastic is selected from the group consisting of filled or unfilled polytetrafluoroethylene, polysulfone, and polyimidesiloxane.
Claim 19
Dependent Claim
30 words
A plane pair sub-unit as recited in claim 12 wherein said first via metallizations do not completely fill said vias and provide a hollow passage through said dielectric encapsulated foil.
Claim 20
Dependent Claim
18 words
A plane pair sub-unit as recited in claim 12 wherein said joining metallurgy is a metal filled thermoplastic.
Claim 21
Dependent Claim
198 words
A three dimensional wiring matrix comprised of a plurality of plane pair sub-units laminated together in an aligned stack, each of said plane pair sub-units comprising: a dielectric encapsulated foil including a foil patterned with a plurality of holes and a first dielectric encapsulating said foil, said first dielectric having a plurality of vias wherein a number of said vias pass through said holes in said foil and at least one of said vias opens on said foil; metallized patterns formed on at least one of a top and bottom surface of said dielectric encapsulated foil; first via metallizations in said vias passing through said holes in said foil, said first via metallizations providing an electrical connection which extends between said top and bottom surfaces of said dielectric encapsulated foil; a second via metallization in a via which opens on said foil, said second via metallization providing an electrical connection with said foil; and capping layers on said top and bottom surfaces of said dielectric encapsulated foil, said capping layers including a second dielectric having a plurality of electrical interconnection sites filled with joining metallurgy where said electrical interconnection sites are in registry with said first via metallizations.
Claim 22
Dependent Claim
198 words
A three dimensional wiring matrix comprised of a plurality of plane pair sub-units laminated together in an aligned stack, each of said plane pair sub-units comprising: a dielectric encapsulated foil including a foil patterned with a plurality of holes and a first dielectric encapsulating said foil, said first dielectric having a plurality of vias wherein a number of said vias pass through said holes in said foil and at least one of said vias opens on said foil; metallized patterns formed on at least one of a top and bottom surface of said dielectric encapsulated foil; first via metallizations in said vias passing through said holes in said foil, said first via metallizations providing an electrical connection which extends between said top and bottom surfaces of said dielectric encapsulated foil; a second via metallization in a via which opens on said foil, said second via metallization providing an electrical connection with said foil; and capping layers on said top and bottom surfaces of said dielectric encapsulated foil, said capping layers including a second dielectric having a plurality of electrical interconnection sites filled with joining metallurgy where said electrical interconnection sites are in registry with said first via metallizations.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-08-02 | 1997-02-01 | 1997-08-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-08-02 | 2001-02-01 | 2001-08-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-08-02 | 2005-02-01 | 2005-08-03 | $7700.00 | Window Closed / Lapsed |