Patent US5229642A successfully refreshed from Google Patents.
US5229642A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Resin molded type semiconductor device having a conductor film
Assignee: Hitachi Microcomputer System Ltd
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Filing: 1991-05-21
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Granted: 1993-07-20
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Expires: 2011-05-21
Abstract
Abstract A resin molded type semiconductor device has a metallic guard ring that is formed to cover the peripheral edge of the surface of a tetragonal semiconductor substrate. In order to prevent a passivation film on the guard ring from being cracked by stresses due to a resin mold package concentrating in the four corners of the semiconductor substrate, slits or rows of small holes are formed in the corner portions of the guard ring.
Inventors
- 👤 Yuji Hara
- 👤 Satoru Ito
- 👤 Tatsuro Toya
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 15:29
CPC Classifications
H; H10; H10W; H10W42/00; H10W74/00; H10W74/10; H10W74/131; H10W74/137; H10W74/40; H10W74/43; H10W72/00; H10W72/90; H10W72/931; H10W72/932; H10W90/00; H10W90/701; H10W90/751; H10W90/756
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
272 words
A semiconductor integrated circuit device comprising: (a) a substantially tetragonal semiconductor substrate having a major surface including a first peripheral edge and a second peripheral edge adjacent to said first peripheral edge to define a corner of said major surface of said substantially tetragonal semiconductor substrate; (b) a plurality of active circuit elements which are formed on said major surface of said substantially tetragonal semiconductor substrate; (c) metal wiring means for electrically connecting said plurality of elements formed on said major surface of said semiconductor substrate, said metal wiring means having a broad metal conductor film formed adjacent to said first and second peripheral edges of said major surface of said substantially tetragonal semiconductor substrate, said broad metal conductor film having a bend portion in said corner of said major surface of said semiconductor substrate defining an inner corner portion and an outer corner portion, and said broad metal conductor film extending continuously along said first and second peripheral edges to form the bend portion in said corner of said major surface of said semiconductor substrate; (d) an inorganic passivation film formed over said metal wiring means, (e) a thermosetting sealing resin which is formed over said inorganic passivation film and which encapsulates said semiconductor substrate, said broad metal conductor film having one slit formed in said bend portion in said corner and said one slit intersecting an imaginary line passing from said inner corner portion to said outer corner portion, and the width of said broad metal conductor film being sufficient to act as wiring for applying a power source or a ground potential for said plurality of active circuit elements.
Claim 2
Dependent Claim
272 words
A semiconductor integrated circuit device comprising: (a) a substantially tetragonal semiconductor substrate having a major surface including a first peripheral edge and a second peripheral edge adjacent to said first peripheral edge to define a corner of said major surface of said substantially tetragonal semiconductor substrate; (b) a plurality of active circuit elements which are formed on said major surface of said substantially tetragonal semiconductor substrate; (c) metal wiring means for electrically connecting said plurality of elements formed on said major surface of said semiconductor substrate, said metal wiring means having a broad metal conductor film formed adjacent to said first and second peripheral edges of said major surface of said substantially tetragonal semiconductor substrate, said broad metal conductor film having a bend portion in said corner of said major surface of said semiconductor substrate defining an inner corner portion and an outer corner portion, and said broad metal conductor film extending continuously along said first and second peripheral edges to form the bend portion in said corner of said major surface of said semiconductor substrate; (d) an inorganic passivation film formed over said metal wiring means, (e) a thermosetting sealing resin which is formed over said inorganic passivation film and which encapsulates said semiconductor substrate, said broad metal conductor film having one slit formed in said bend portion in said corner and said one slit intersecting an imaginary line passing from said inner corner portion to said outer corner portion, and the width of said broad metal conductor film being sufficient to act as wiring for applying a power source or a ground potential for said plurality of active circuit elements.
Claim 3
Dependent Claim
19 words
A semiconductor integrated circuit device according to claim 1, further comprising: an another slit juxtaposed to said one slit.
Claim 4
Dependent Claim
19 words
A semiconductor integrated circuit device according to claim 1, wherein said broad metal conductor film comprises an aluminum film.
Claim 5
Dependent Claim
19 words
A semiconductor integrated circuit device according to claim 3, further comprising: an another slit juxtaposed to said one slit.
Claim 6
Dependent Claim
19 words
A semiconductor integrated circuit device according to claim 3, wherein said inorganic passivation film comprises a silicon nitride film.
Claim 7
Dependent Claim
20 words
A semiconductor integrated circuit device according to claim 3, further comprising a further passivation film under said metal wiring means.
Claim 8
Dependent Claim
19 words
A semiconductor integrated circuit device according to claim 6, wherein said further passivation film comprises a phosphosilicate glass film.
Claim 9
Dependent Claim
297 words
A semiconductor integrated circuit device according; (a) a substantially tetragonal semiconductor substrate having a major surface including a first peripheral edge and a second peripheral edge adjacent to said first peripheral edge to define a corner of said major surface of said substantially tetragonal semiconductor substrate; (b) a plurality of active circuit elements which are formed on said major surface of said substantially tetragonal semiconductor substrate; (c) a plurality of bonding pads formed on said major surface of said substantially tetragonal semiconductor substrate; (d) a metal wiring electrically connecting one of said plurality of active circuit elements and one of said bonding pads, and a broad metal conductor film formed adjacent to said first and second peripheral edges of said major surface of said substantially tetragonal semiconductor substrate, said broad metal conductor film having a bend portion in said corner of said major surface of said semiconductor substrate and having an inner corner portion and an outer corner portion at said bend portion, and said broad metal conductor film extending continuously along said first and second peripheral edges to form said bend portion in said corner of said major surface of said semiconductor substrate; (e) an inorganic passivation film formed over said metal wiring and said broad metal conductor film; and (f) a thermosetting sealing resin which is formed over said inorganic passivation film and which encapsulates said semiconductor substrate, said broad metal conductor film being divided into a plurality of branches at said bend portion and said plurality of branches intersecting an imaginary line passing from said inner corner portion to said outer corner portion, and the width of said broad metal conductor film being sufficient to act as wiring for applying a power source or a ground potential for said plurality of active circuit elements.
Claim 10
Dependent Claim
297 words
A semiconductor integrated circuit device according; (a) a substantially tetragonal semiconductor substrate having a major surface including a first peripheral edge and a second peripheral edge adjacent to said first peripheral edge to define a corner of said major surface of said substantially tetragonal semiconductor substrate; (b) a plurality of active circuit elements which are formed on said major surface of said substantially tetragonal semiconductor substrate; (c) a plurality of bonding pads formed on said major surface of said substantially tetragonal semiconductor substrate; (d) a metal wiring electrically connecting one of said plurality of active circuit elements and one of said bonding pads, and a broad metal conductor film formed adjacent to said first and second peripheral edges of said major surface of said substantially tetragonal semiconductor substrate, said broad metal conductor film having a bend portion in said corner of said major surface of said semiconductor substrate and having an inner corner portion and an outer corner portion at said bend portion, and said broad metal conductor film extending continuously along said first and second peripheral edges to form said bend portion in said corner of said major surface of said semiconductor substrate; (e) an inorganic passivation film formed over said metal wiring and said broad metal conductor film; and (f) a thermosetting sealing resin which is formed over said inorganic passivation film and which encapsulates said semiconductor substrate, said broad metal conductor film being divided into a plurality of branches at said bend portion and said plurality of branches intersecting an imaginary line passing from said inner corner portion to said outer corner portion, and the width of said broad metal conductor film being sufficient to act as wiring for applying a power source or a ground potential for said plurality of active circuit elements.
Claim 11
Dependent Claim
290 words
A semiconductor integrated circuit device comprising: (a) a substantially tetragonal semiconductor substrate having a major surface including a first peripheral edge and a second peripheral edge adjacent to said first peripheral edge to define a corner of said major surface of said substantially tetragonal semiconductor substrate; (b) a plurality of active circuit elements which are formed on said major surface of said substantially tetragonal semiconductor substrate; (c) a plurality of bonding pads formed on said major surface of said substantially tetragonal semiconductor substrate; (d) a metal wiring electrically connecting one of said plurality of active circuit elements and one of said bonding pads, and a broad metal conductor film formed adjacent to said first and second peripheral edges of said major surface of said substantially tetragonal semiconductor substrate, said broad metal conductor film having a bend portion in said corner of said major surface of said semiconductor substrate, said bend portion providing an inner corner portion and an outer corner portion and said broad metal conductor film extending continuously along said first and second peripheral edges to form said bend portion in said corner of said major surface of said semiconductor substrate; (e) an inorganic passivation film formed over said metal wiring and said broad metal conductor film; and (f) a thermosetting sealing resin which is formed over said inorganic passivation film and which encapsulates said semiconductor substrate, said broad metal conductor film having one slit formed in said corner and said one slit intersecting an imaginary line passing from said inner corner portion to said outer corner portion and the width of said broad metal conductor film being sufficient to act as wiring for applying a power source or a ground potential for said plurality of active circuit elements.
Claim 12
Dependent Claim
290 words
A semiconductor integrated circuit device comprising: (a) a substantially tetragonal semiconductor substrate having a major surface including a first peripheral edge and a second peripheral edge adjacent to said first peripheral edge to define a corner of said major surface of said substantially tetragonal semiconductor substrate; (b) a plurality of active circuit elements which are formed on said major surface of said substantially tetragonal semiconductor substrate; (c) a plurality of bonding pads formed on said major surface of said substantially tetragonal semiconductor substrate; (d) a metal wiring electrically connecting one of said plurality of active circuit elements and one of said bonding pads, and a broad metal conductor film formed adjacent to said first and second peripheral edges of said major surface of said substantially tetragonal semiconductor substrate, said broad metal conductor film having a bend portion in said corner of said major surface of said semiconductor substrate, said bend portion providing an inner corner portion and an outer corner portion and said broad metal conductor film extending continuously along said first and second peripheral edges to form said bend portion in said corner of said major surface of said semiconductor substrate; (e) an inorganic passivation film formed over said metal wiring and said broad metal conductor film; and (f) a thermosetting sealing resin which is formed over said inorganic passivation film and which encapsulates said semiconductor substrate, said broad metal conductor film having one slit formed in said corner and said one slit intersecting an imaginary line passing from said inner corner portion to said outer corner portion and the width of said broad metal conductor film being sufficient to act as wiring for applying a power source or a ground potential for said plurality of active circuit elements.
Claim 13
Dependent Claim
22 words
A semiconductor integrated circuit device according to claim 9, wherein said broad metal conductor film and metal wiring comprise an aluminum film,
Claim 14
Dependent Claim
19 words
A semiconductor integrated circuit device according to claim 10, wherein said inorganic passivation film comprises a silicon nitride film.
Claim 15
Dependent Claim
29 words
A semiconductor integrated circuit device according to claim 10, wherein said broad metal conductor film has a right-angle bend portion in said corner of said substantially tetragonal semiconductor substrate.
Claim 16
Dependent Claim
26 words
A semiconductor integrated circuit device according to claim 12, wherein said broad metal conductor film is arranged between said bonding pads and said first peripheral edge.
Claim 17
Dependent Claim
21 words
A semiconductor integrated circuit device according to claim 10, wherein said metal wiring is thinner than said broad metal conductor film.
Claim 18
Dependent Claim
25 words
A semiconductor integrated circuit device according to claim 9, further comprising a further passivation film under said metal wiring and said broad metal conductor film.
Claim 19
Dependent Claim
19 words
A semiconductor integrated circuit device according to claim 15, wherein said further passivation film comprises a phosphosilicate glass film.
Claim 20
Dependent Claim
39 words
A semiconductor integrated circuit device according to claim 10, wherein said plurality of bonding pads comprise said aluminum film and said metal wiring and said one of said plurality of bonding pads are integrally formed with said aluminum film.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-07-19 | 1997-01-18 | 1997-07-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-07-19 | 2001-01-18 | 2001-07-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-07-19 | 2005-01-18 | 2005-07-20 | $7700.00 | Window Closed / Lapsed |