Patent US2852734A successfully refreshed from Google Patents.
Patent US5227607A successfully refreshed from Google Patents.
US5227607A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Yag laser working machine for precision working of thin-film
Assignee: Innotech Corp
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Filing: 1992-03-12
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Granted: 1993-07-13
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Expires: 2012-03-12
Abstract
Abstract This invention relates to a YAG laser working machine, and an object thereof is to enable highly precise processing such as one required for processing of a photomask which is used at, for example, a step of manufacturing semiconductors. The YAG laser working machine according to this invention is such that a machine body is provided with restriction means for reducing a beam diameter of a laser beam, is provided with shutter means for executing ON·OFF control of application of the laser beam at a location on the outside of the oscillator, and is provided with highly harmonizing means for the laser beam. A base disk on which the machine body is mounted is formed of solid stone, and is mounted on a plurality of legs through interposition of respective pneumatic springs. Pulse signals regarding the X-movement and the Y-movement of an XY-table are processed by an OR circuit. Pulse application of the laser beam is controlled on the basis of the signals processed by the OR circuit.
Inventors
- 👤 Noritaka Ishiyama
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 07:28
CPC Classifications
B; B23; B23K; B23K26/00; B23K26/02; B23K26/06; G; G03; G03F; G03F7/00; G03F7/70; G03F7/70058; G03F7/70091; B23K26/064; B23K26/066; B23K26/08; B23K26/083; B23K26/0853; B23K26/70; B23K26/702
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
132 words
A YAG laser working machine for a thin film precision processing, comprising a working machine body in which a laser beam oscillated by an oscillator generating a Q-switch oscillation state is led by an optical system having a plurality of lenses, and is condensed in the form of a spot by a condenser arranged at a forward end of the optical system, so as to be applied to a workpiece, an XY-table on which the workpiece is mounted, and a base disk on which said machine body and said XY-table are mounted, characterized in that said machine body is provided with restriction means at a location between the plurality of lenses forming the optical system, for cutting off an outer peripheral portion of the laser beam to reduce a beam diameter thereof.
Claim 2
Dependent Claim
132 words
A YAG laser working machine for a thin film precision processing, comprising a working machine body in which a laser beam oscillated by an oscillator generating a Q-switch oscillation state is led by an optical system having a plurality of lenses, and is condensed in the form of a spot by a condenser arranged at a forward end of the optical system, so as to be applied to a workpiece, an XY-table on which the workpiece is mounted, and a base disk on which said machine body and said XY-table are mounted, characterized in that said machine body is provided with restriction means at a location between the plurality of lenses forming the optical system, for cutting off an outer peripheral portion of the laser beam to reduce a beam diameter thereof.
Claim 3
Dependent Claim
31 words
A YAG laser working machine according to claim 1, wherein said machine body is provided with a shutter means for executing ON·OFF control of the laser beam application, outside said oscillator.
Claim 4
Dependent Claim
29 words
A YAG laser working machine according to claim 1, wherein said machine body is provided with highly harmonizing means for converting the laser beam into a high harmonic wave.
Claim 5
Dependent Claim
35 words
A YAG laser working machine according to one of claim 1, wherein said base disk is formed of a solid stone, and is mounted on a plurality of legs by interposition of respective pneumatic springs.
Claim 6
Dependent Claim
60 words
A YAG laser working machine according to one of claim 1, further comprising control means in which data regarding X-movement and Y-movement of said XY-table are obtained as pulse signals by an encoder, the data are processed by an OR circuit, and pulse irradiation of the laser beam is controlled on the basis of an output from said OR circuit.
Claim 7
Dependent Claim
227 words
A YAG laser working machine comprising a machine body in which a laser beam oscillated by an oscillator generating a Q-switch oscillation state is led by an optical system having a plurality of lenses, and is condensed in the form of a spot by a condenser arranged at a forward end of said optical system, an XY-table on which a workpiece is mounted, and a base disk on which said machine body and said XY-table are mounted, characterized in that said machine body is provided with restriction means at a location between the plurality of lenses forming the optical system, for cutting off an outer peripheral portion of the laser beam to reduce a beam diameter thereof, is provided with a shutter means for executing ON·OFF control of the laser beam application, outside said oscillator, and is further provided with highly harmonizing means for converting the laser beam into a high harmonic wave, that said base disk is formed of a solid stone, and is mounted on a plurality of legs by interposition of respective pneumatic springs, and that said XY-table is provided with control means in which data regarding X-movement and Y-movement are obtained as pulse signals by an encoder, the data are processed by an OR circuit, and pulse irradiation of the laser beam is controlled in response to an output from said OR circuit.
Claim 8
Dependent Claim
227 words
A YAG laser working machine comprising a machine body in which a laser beam oscillated by an oscillator generating a Q-switch oscillation state is led by an optical system having a plurality of lenses, and is condensed in the form of a spot by a condenser arranged at a forward end of said optical system, an XY-table on which a workpiece is mounted, and a base disk on which said machine body and said XY-table are mounted, characterized in that said machine body is provided with restriction means at a location between the plurality of lenses forming the optical system, for cutting off an outer peripheral portion of the laser beam to reduce a beam diameter thereof, is provided with a shutter means for executing ON·OFF control of the laser beam application, outside said oscillator, and is further provided with highly harmonizing means for converting the laser beam into a high harmonic wave, that said base disk is formed of a solid stone, and is mounted on a plurality of legs by interposition of respective pneumatic springs, and that said XY-table is provided with control means in which data regarding X-movement and Y-movement are obtained as pulse signals by an encoder, the data are processed by an OR circuit, and pulse irradiation of the laser beam is controlled in response to an output from said OR circuit.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-07-12 | 1997-01-11 | 1997-07-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-07-12 | 2001-01-11 | 2001-07-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-07-12 | 2005-01-11 | 2005-07-13 | $7700.00 | Window Closed / Lapsed |