Patent US5225771A successfully refreshed from Google Patents.
US5225771A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Making and testing an integrated circuit using high density probe points
Assignee: Elm Technology Corp
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Filing: 1991-10-11
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Granted: 1993-07-06
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Expires: 2011-10-11
Abstract
Abstract Individual transistor or logic unit testing is accomplished by a specially fabricated flexible tester surface made in one embodiment of several layers of flexible silicon dioxide, each layer containing vias and conductive traces leading to thousands of microscopic metal probe points on one side of the test surface. The probe points electrically contact the contacts on the wafer under test by fluid pressure.
Inventors
- 👤 Glenn J. Leedy
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 13:20
CPC Classifications
G; G11; G11C; G11C29/00; G11C29/006; G01; G01R; G01R1/00; G01R1/02; G01R1/06; G01R1/067; G01R1/06711; G01R1/06716; G01R1/073; G01R1/07307; G01R1/0735; G01R31/00; G01R31/28; G01R31/282; G01R31/2831; G01R31/316; G01R31/317; G01R31/3181; G01R31/319; G01R31/31903; G01R31/31905; G01R31/31912; G03; G03F; G03F7/00; G03F7/70; G03F7/70425; G03F7/70466; G03F7/70483; G03F7/70605; G03F7/70653; G03F7/70658; H; H10; H10P; H10P74/00; H10P74/23; H10P74/232; G01R1/06755; G01R1/06761; G01R1/07314; G01R31/2851; G01R31/2886; G01R31/2889; H10W; H10W70/00; H10W70/60; H10W70/62; H10W70/63
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
67 words
A tester surface comprising: a substrate formed of a flexible material; a plurality of probe points extending from the substrate, each probe point including an outer layer of the same flexible material forming a continuous layer with the flexible material of the substrate and an inner layer of conductive metal formed within the outer layer defining an enclosed respective cavity, wherein the probe point is resiliently compressible.
Claim 2
Dependent Claim
67 words
A tester surface comprising: a substrate formed of a flexible material; a plurality of probe points extending from the substrate, each probe point including an outer layer of the same flexible material forming a continuous layer with the flexible material of the substrate and an inner layer of conductive metal formed within the outer layer defining an enclosed respective cavity, wherein the probe point is resiliently compressible.
Claim 3
Dependent Claim
81 words
A test surface comprising: a substrate formed of a flexible material; a plurality of probe points extending from the substrate, each probe point including an outer layer of flexible material defining an enclosed respective cavity and having an inner layer of conductive metal formed within the outer layer, wherein the outer layer is of the same material as and forms a single continuous layer with the substrate, wherein the probe point is resiliently compressible by at least 10% of its length.
Claim 4
Dependent Claim
81 words
A test surface comprising: a substrate formed of a flexible material; a plurality of probe points extending from the substrate, each probe point including an outer layer of flexible material defining an enclosed respective cavity and having an inner layer of conductive metal formed within the outer layer, wherein the outer layer is of the same material as and forms a single continuous layer with the substrate, wherein the probe point is resiliently compressible by at least 10% of its length.
Claim 5
Dependent Claim
17 words
The device of claim 2, wherein the cavity of each probe point is filled with a fluid.
Claim 6
Dependent Claim
18 words
The device of claim 2, wherein the cavity of each probe point is filled with an elastomeric polymer.
Claim 7
Dependent Claim
35 words
The device of claim 2, wherein each probe point includes a metal tip formed on an end of the probe point farthest from the substrate, the tip being in electrical contact with the inner layer.
Claim 8
Dependent Claim
18 words
The device of claim 2, wherein the substrate comprises a polymer film less than 10 μm in thickness.
Claim 9
Dependent Claim
15 words
The device of claim 2, wherein the tester surface includes at least 1000 probe points.
Claim 10
Dependent Claim
19 words
The device of claim 2, wherein each probe point has a maximum outside diameter of less than one mil.
Claim 11
Dependent Claim
21 words
The device of claim 2, further comprising a rigid substrate layer on which said first layer of flexible material is formed.
Claim 12
Dependent Claim
84 words
A tester surface comprising: a substrate formed of a flexible material; a plurality of probe points extending from the substrate, each probe point including an outer layer of flexible material defining a respective cavity and having an inner layer of conductive metal formed within the outer layer, wherein the outer layer is joined to the substrate, wherein the probe point is resiliently compressible by at least 10% of its length, and wherein both the substrate and the outer layer comprise low stress silicon dioxide.
Claim 13
Dependent Claim
84 words
A tester surface comprising: a substrate formed of a flexible material; a plurality of probe points extending from the substrate, each probe point including an outer layer of flexible material defining a respective cavity and having an inner layer of conductive metal formed within the outer layer, wherein the outer layer is joined to the substrate, wherein the probe point is resiliently compressible by at least 10% of its length, and wherein both the substrate and the outer layer comprise low stress silicon dioxide.
Claim 14
Dependent Claim
18 words
The device of claim 2, wherein each probe point has a diameter of about four micrometers or less.
Claim 15
Dependent Claim
35 words
The device of claim 2, wherein a sidewall of each probe point including the outer layer of conductive material and the inner layer of conductive material has a thickness of less than about 4000 Å.
Claim 16
Dependent Claim
30 words
The device of claim 5, wherein the metal tip is located at the extremity of an elongated extension of the inner layer of conductive metal extending outwards from said cavity.
Claim 17
Dependent Claim
19 words
The device of claim 13, wherein the elongated extension is capable of bending at least 10% of its length.
Claim 18
Dependent Claim
19 words
The device of claim 2, wherein adjacent probe points have a spacing center-to-center of less than about six micrometers.
Claim 19
Dependent Claim
14 words
The device of claim 2, wherein said flexible material comprises low stress silicon nitride.
Claim 20
Dependent Claim
35 words
The device of claim 16, wherein each probe point includes a conductive tip formed on an end of the probe point farthest from the substrate, the tip being in electrical contact with the inner layer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-07-05 | 1997-01-04 | 1997-07-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-07-05 | 2001-01-04 | 2001-07-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-07-05 | 2005-01-04 | 2005-07-06 | $7700.00 | Window Closed / Lapsed |