Piezoresistive sensor

Claim 2

A process for preparing a sintered metal titanate sensor, comprising the steps of: (a) providing a material comprised of metal titanate, from about 0.01 to about 5.0 atom percent based on the weight of metal titanate of an aliovalent, cationic dopant, and from about 0.1 to about 1.0 weight percent based on the weight of metal titanate of cationic counterdopant, wherein:

Claim 3

said metal titanate is selected from the group consisting of barium titanate, strontium titanate, lead titanate, and mixtures thereof; 2. the cation in said aliovalent dopant is selected from the group consisting of lanthanum, yttrium, niobium, antimony, samarium, holmium, gadolinium, and mixtures thereof; 3. the cation in said cationic counterdopant is selected from the group consisting of chromium, manganese, iron, cobalt, nickel, copper, and mixtures thereof; and 4. at least about 1.1 atoms of said aliovalent dopant cation are present for each atom of counterdopant cation in said material; and (b) forming said material into a green body; (c) raising the temperature of said green body from ambient to about 1,300 degrees Celsius while contacting said green body with air; (d) raising the temperature of said green body to a temperature of from about 1,300 Celsius to about 1,500 Celsius while contacting said green body with an oxygen-free atmosphere; and (e) cooling said green body from a temperature of from about 1,300 to about 1,500 Celsius to ambient while contacting said green body with an oxidizing gas.

Claim 4

said metal titanate is selected from the group consisting of barium titanate, strontium titanate, lead titanate, and mixtures thereof; 2. the cation in said aliovalent dopant is selected from the group consisting of lanthanum, yttrium, niobium, antimony, samarium, holmium, gadolinium, and mixtures thereof; 3. the cation in said cationic counterdopant is selected from the group consisting of chromium, manganese, iron, cobalt, nickel, copper, and mixtures thereof; and 4. at least about 1.1 atoms of said aliovalent dopant cation are present for each atom of counterdopant cation in said material; and (b) forming said material into a green body; (c) raising the temperature of said green body from ambient to about 1,300 degrees Celsius while contacting said green body with air; (d) raising the temperature of said green body to a temperature of from about 1,300 Celsius to about 1,500 Celsius while contacting said green body with an oxygen-free atmosphere; and (e) cooling said green body from a temperature of from about 1,300 to about 1,500 Celsius to ambient while contacting said green body with an oxidizing gas.

Claim 5

The process as recited in claim 1, wherein said metal titanate is barium titanate.

Claim 6

The process as recited in claim 2, wherein said oxygen-free atmosphere is nitrogen.

Claim 7

The process as recited in claim 3, wherein said oxidizing gas is oxygen.

Claim 8

The process as recited in claim 4, wherein said material comprised of barium titanate is a gel comprised of said barium titanate.

Claim 9

The process as recited in claim 5, wherein said gel is dried until it contains less than about 1.0 weight percent of moisture, thereby providing a dried barium titanate composition.

Claim 10

The process as recited in claim 6, wherein said dried barium titanate composition is calcined at a temperature of from about 200 to about 1,000 Celsius for from about 1 to about 10 hours, thereby producing a calcined barium titanate composition.

Claim 11

The process as recited in claim 7, wherein said calcined barium titanate composition is mixed with from about 10 to about 50 weight percent, based on the weight of barium titanate and binder, of organic binder, thereby forming a mixture of calcined barium titanate and binder.

Claim 12

The process as recited in claim 8, wherein said mixture of calcined barium titanate and binder is formed into a green body.

Claim 13

The process as recited in claim 9, wherein the temperature of said green body is raised from ambient to a temperature of about 700 degrees Celsius at a rate of less than about 50 degrees Celsius per hour while contacting said green body with air.

Claim 14

The process as recited in claim 10, wherein the temperature of said green body is raised from a temperature of from about 700 to about 1,300 Celsius at a rate different than the rate of claim 10 while contacting said green body with air.