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US5223721A
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Diamond n-type semiconductor diamond p-n junction diode
Assignee: Tokai University
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Filing: 1992-02-07
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Granted: 1993-06-29
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Expires: 2012-02-07
Abstract
Abstract A diamond n-type semiconductor including a substrate and a phosphorus element-doped diamond thin film disposed on the substrate. The diamond thin film is deposited by vaporizing a solution comprising a liquid organic compound as the diamond material with diphosphorus pentoxide (P 2 O 5 ) dissolved therein, and subjecting the resultant gas to a hot filament CVD method.
Inventors
- 👤 Masamori Iida
- 👤 Tateki Kurosu
- 👤 Ken Okano
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 22:06
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/20; H10P14/29; H10P14/2901; H10D; H10D62/00; H10D62/80; H10D62/83; H10D62/8303; H10D8/00; H10D8/01; H10D8/043; H10D8/051; H10P14/24; H10P14/2902; H10P14/2905; H10P14/32; H10P14/3202; H10P14/3204; H10P14/3206; H10P14/34; H10P14/3402; H10P14/3404; H10P14/3406; H10P14/3438; H10P14/3441; H10P14/3442; H10P14/3444
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
56 words
A diamond n-type semiconductor comprising a substrate and a phosphorus element-doped diamond thin film deposited on the substrate, which has been formed by vaporizing a solution comprising a liquid organic compound as a diamond material and diphosphorus pentoxide (P 2 O 5 ) dissolved therein, and subjecting the resultant gas to a hot filament CVD method.
Claim 2
Dependent Claim
56 words
A diamond n-type semiconductor comprising a substrate and a phosphorus element-doped diamond thin film deposited on the substrate, which has been formed by vaporizing a solution comprising a liquid organic compound as a diamond material and diphosphorus pentoxide (P 2 O 5 ) dissolved therein, and subjecting the resultant gas to a hot filament CVD method.
Claim 3
Dependent Claim
125 words
A diamond p-n junction diode, comprising a substrate, a first diamond thin film doped with a phosphorus element disposed on the substrate, and a second diamond thin film doped with an element deposited on the first diamond thin film, wherein the first diamond thin film has been formed by vaporizing a solution comprising a liquid organic compound as a diamond material and diphosphorus pentoxide (P 2 O 5 ) dissolved therein, and subjecting the resultant gas to a hot filament CVD method; wherein the second diamond thin film has been formed by vaporizing a solution comprising a liquid organic compound as a diamond material with a doping source for a p-type semiconductor dissolved therein, and subjecting the resultant gas to a hot filament CVD method.
Claim 4
Dependent Claim
125 words
A diamond p-n junction diode, comprising a substrate, a first diamond thin film doped with a phosphorus element disposed on the substrate, and a second diamond thin film doped with an element deposited on the first diamond thin film, wherein the first diamond thin film has been formed by vaporizing a solution comprising a liquid organic compound as a diamond material and diphosphorus pentoxide (P 2 O 5 ) dissolved therein, and subjecting the resultant gas to a hot filament CVD method; wherein the second diamond thin film has been formed by vaporizing a solution comprising a liquid organic compound as a diamond material with a doping source for a p-type semiconductor dissolved therein, and subjecting the resultant gas to a hot filament CVD method.
Claim 5
Dependent Claim
25 words
A diamond p-n junction diode according to claim 2, wherein said doping source for the p-type semiconductor comprises boric acid (B 2 O 3 ).
References Cited (Backward Citations)
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JPS6468955A
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US5051785A
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1996-06-28 | 1996-12-28 | 1997-06-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-06-28 | 2000-12-28 | 2001-06-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-06-28 | 2004-12-28 | 2005-06-29 | $7700.00 | Window Closed / Lapsed |