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US5222014A
Expired / Lapsed
US
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Three-dimensional multi-chip pad array carrier
Assignee: NXP USA Inc
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Filing: 1992-03-02
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Granted: 1993-06-22
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Expires: 2012-03-02
Abstract
Abstract A stackable three-dimensional multi-chip module (MCM) is provided whereby each level of chip carrier is interconnected to another level of chip carrier through reflowing of solder balls pre-bumped onto each carrier. Each level of chip carrier, except for the top carrier, has solder balls on both top and bottom surfaces of the substrate. Optional lids can be used to seal each device, and the lid height would serve as a natural positive stand-off between each level of carriers, giving rise to hour glass shaped solder joints which maximizes the fatigue life of the joints. Heat sinks to further enhance heat dissipation of the MCM can be easily accommodated in this stacking approach. Furthermore, each substrate is capable of carrying multiple chips, so the module incorporates planar chip density growth concurrently with the three-dimensional growth giving rise to an ultradense MCM.
Inventors
- 👤 Paul T. Lin
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 12:55
CPC Classifications
H; H05; H05K; H05K1/00; H05K1/02; H05K1/14; H05K1/144; H10; H10W; H10W72/00; H10W72/071; H10W74/00; H10W74/10; H10W74/111; H10W74/114; H10W90/00; H10W70/00; H10W70/60; H10W70/62; H10W70/65; H10W70/654; H10W70/655; H10W72/50; H10W72/551; H10W72/552; H10W72/5522; H10W72/851; H10W72/874; H10W72/877; H10W72/884; H10W90/20; H10W90/22; H10W90/288; H10W90/701; H10W90/721; H10W90/722; H10W90/724; H10W90/731; H10W90/734; H10W90/751; H10W90/754; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49117; Y10T29/49124; Y10T29/4913; Y10T29/49144; Y10T29/53; Y10T29/5313; Y10T29/53174
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
153 words
A stacking semiconductor multiple chip module comprising: a lower chip carrier substrate of thermally conductive material having a plurality of solder bumps on both top and bottom surfaces of the lower chip carrier substrate; a first semiconductor die electrically and physically attached to the lower chip carrier substrate; an encapsulant which encapsulates the first semiconductor die to protect the first semiconductor die; an upper chip carrier substrate of thermally conductive material having a top and a bottom surface; a plurality of solder bumps on the bottom surface of the upper chip carrier substrate; and a second semiconductor die mounted and electrically coupled to the upper chip carrier substrate, wherein the lower chip carrier substrate and the upper chip carrier substrate are electrically connected to each other by a joining of the solder bumps; and wherein the encapsulant serves as a stand-off between the lower chip carrier substrate and the upper chip carrier substrate.
Claim 2
Dependent Claim
153 words
A stacking semiconductor multiple chip module comprising: a lower chip carrier substrate of thermally conductive material having a plurality of solder bumps on both top and bottom surfaces of the lower chip carrier substrate; a first semiconductor die electrically and physically attached to the lower chip carrier substrate; an encapsulant which encapsulates the first semiconductor die to protect the first semiconductor die; an upper chip carrier substrate of thermally conductive material having a top and a bottom surface; a plurality of solder bumps on the bottom surface of the upper chip carrier substrate; and a second semiconductor die mounted and electrically coupled to the upper chip carrier substrate, wherein the lower chip carrier substrate and the upper chip carrier substrate are electrically connected to each other by a joining of the solder bumps; and wherein the encapsulant serves as a stand-off between the lower chip carrier substrate and the upper chip carrier substrate.
Claim 3
Dependent Claim
44 words
The semiconductor multiple chip module according to claim 1 wherein the lower chip carrier substrate and upper chip carrier substrate are comprised of a material selected from the group consisting of: aluminum nitride ceramic, cofired ceramic, silicon wafer material, and epoxy glass cloth composite.
Claim 4
Dependent Claim
23 words
The semiconductor multiple chip module according to claim 1 wherein the lower chip carrier substrate further comprises dummy solder bumps for mechanical support.
Claim 5
Dependent Claim
42 words
The semiconductor multiple chip module according to claim 1 wherein the solder bumps on the top and bottom surfaces of the lower chip carrier substrate and the solder bumps on the bottom of the upper chip carrier substrate contain different solder compositions.
Claim 6
Dependent Claim
23 words
The semiconductor multiple chip module according to claim 1 wherein the lower chip carrier substrate and upper chip carrier substrate have through-hole vias.
Claim 7
Dependent Claim
22 words
The semiconductor multiple chip module according to claim 1 wherein the lower chip carrier substrate and upper chip carrier substrate are multi-layered.
Claim 8
Dependent Claim
140 words
A stacking semiconductor multiple chip module comprising: a lower chip carrier of thermally conductive material having a plurality of solder bumps on both top and bottom surfaces of the carrier; a first semiconductor die electrically and physically attached to the lower chip carrier; an upper chip carrier substrate of thermally conductive material having a top and a bottom surface; a plurality of solder bumps on the bottom surface of the upper chip carrier substrate; a second semiconductor die mounted and electrically coupled to the upper chip carrier substrate, wherein the lower chip carrier substrate and the upper chip carrier substrate are electrically connected to each other by solder joints; and a lid capping the first semiconductor die and serving as a positive stand-off to create hour-glass solder joints between the upper chip carrier substrate and the lower chip carrier substrate.
Claim 9
Dependent Claim
140 words
A stacking semiconductor multiple chip module comprising: a lower chip carrier of thermally conductive material having a plurality of solder bumps on both top and bottom surfaces of the carrier; a first semiconductor die electrically and physically attached to the lower chip carrier; an upper chip carrier substrate of thermally conductive material having a top and a bottom surface; a plurality of solder bumps on the bottom surface of the upper chip carrier substrate; a second semiconductor die mounted and electrically coupled to the upper chip carrier substrate, wherein the lower chip carrier substrate and the upper chip carrier substrate are electrically connected to each other by solder joints; and a lid capping the first semiconductor die and serving as a positive stand-off to create hour-glass solder joints between the upper chip carrier substrate and the lower chip carrier substrate.
Claim 10
Dependent Claim
43 words
The semiconductor multiple chip module according to claim 7 wherein the lower chip carrier substrate and upper chip carrier substrate are comprised of a material selected from the group consisting of: aluminum nitride, cofired ceramic, silicon wafer material, and epoxy glass cloth composite.
Claim 11
Dependent Claim
23 words
The semiconductor multiple chip module according to claim 7 wherein the lower chip carrier substrate further comprises dummy solder bumps for mechanical support.
Claim 12
Dependent Claim
42 words
The semiconductor multiple chip module according to claim 7 wherein the solder bumps on the top and bottom surfaces of the lower chip carrier substrate and the solder bumps on the bottom of the upper chip carrier substrate comprise different solder compositions.
Claim 13
Dependent Claim
23 words
The semiconductor multiple chip module according to claim 7 wherein the lower chip carrier substrate and upper chip carrier substrate have through-hole vias.
Claim 14
Dependent Claim
22 words
The semiconductor multiple chip module according to claim 7 wherein the lower chip carrier substrate and upper chip carrier substrate are multi-layered.
Claim 15
Independent Claim
163 words
A method for making a stackable semiconductor multiple chip module comprising the steps of: providing a lower chip carrier substrate of thermally conductive material; depositing a plurality of solder bumps on both top and bottom surfaces of the lower chip carrier substrate; mounting a first semiconductor die onto the lower chip carrier substrate and electrically coupling it to said lower chip carrier substrate; placing a lid over the first semiconductor die to serve as a positive stand-off; providing an upper chip carrier substrate of thermally conductive material, the upper chip carrier substrate having a top and a bottom surface; depositing a plurality of solder bumps on the bottom surface of the upper chip carrier substrate; mounting a second semiconductor die to the upper chip carrier substrate and electrically coupling it to the same; aligning the upper chip carrier substrate to the lower chip carrier substrate by position of the solder bumps; and reflowing the solder bumps together to achieve physical and electrical connections.
Claim 16
Independent Claim
163 words
A method for making a stackable semiconductor multiple chip module comprising the steps of: providing a lower chip carrier substrate of thermally conductive material; depositing a plurality of solder bumps on both top and bottom surfaces of the lower chip carrier substrate; mounting a first semiconductor die onto the lower chip carrier substrate and electrically coupling it to said lower chip carrier substrate; placing a lid over the first semiconductor die to serve as a positive stand-off; providing an upper chip carrier substrate of thermally conductive material, the upper chip carrier substrate having a top and a bottom surface; depositing a plurality of solder bumps on the bottom surface of the upper chip carrier substrate; mounting a second semiconductor die to the upper chip carrier substrate and electrically coupling it to the same; aligning the upper chip carrier substrate to the lower chip carrier substrate by position of the solder bumps; and reflowing the solder bumps together to achieve physical and electrical connections.
Claim 17
Dependent Claim
44 words
The method of claim 13 wherein the steps of depositing solder bumps on the top and bottom surfaces of the lower chip carrier substrate and solder bumps on the bottom surface of the upper chip carrier substrate further comprises depositing solder of different compositions.
Claim 18
Dependent Claim
27 words
The method of claim 13 wherein the step of depositing solder bumps further comprises depositing dummy solder bumps on the lower chip carrier substrate for mechanical support.
Claim 19
Dependent Claim
52 words
The method of claim 13 wherein the step of providing the lower chip carrier substrate and the upper chip carrier substrate comprises providing a lower substrate and an upper substrate comprising of a material selected from the group consisting of: aluminum nitride, cofired ceramic, silicon wafer material, and epoxy glass cloth composite.
Claim 20
Dependent Claim
19 words
The method of claim 13 further comprising the step of: attaching a heat sink to one of the surfaces.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-06-21 | 1996-12-21 | 1997-06-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-06-21 | 2000-12-21 | 2001-06-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-06-21 | 2004-12-21 | 2005-06-22 | $7700.00 | Window Closed / Lapsed |