US5218225A
Expired / Lapsed
US
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Thin-film resistor layout
Assignee: Maxim Integrated Products Inc
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Filing: 1990-03-30
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Granted: 1993-06-08
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Expires: 2010-03-30
Abstract
Abstract A class of layout patterns for variable resistors and integrated circuits where the resistance is varied by varying a wiping point on a resistor line; contact is not made into the resistor line itself, but instead all contacts are made only to tabs which extend out from the resistor line. Preferred embodiments use a meander resistor line made of polysilicon within a silicon integrated circuit. Simple processing mask modifications can be used to change the geometry of the meander line to vary the resistance. The wiping point is digitally selected.
Inventors
- 👤 Gary V. Zanders
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 00:07
CPC Classifications
H; H03; H03M; H03M1/00; H03M1/004; H03M1/007; H10; H10D; H10D88/00; H03M1/66; H03M1/68; H03M1/682; H03M1/74; H03M1/76; H03M1/765; H03M1/80; H03M1/802; H03M1/804
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
81 words
An integrated circuit resistor, comprising: a resistor line, consisting essentially of a strip of a thin film of a resistive material; additional quantities of said thin film material being laterally extended from said resistor line, in multiple locations, to provide contact tabs; multiple switching devices, each connected to selectably make connection to a respective one of said contact tabs; wherein essentially all electrical contacts to said resistor line are physically located in said contact tabs, and not in said resistor line.
Claim 2
Dependent Claim
81 words
An integrated circuit resistor, comprising: a resistor line, consisting essentially of a strip of a thin film of a resistive material; additional quantities of said thin film material being laterally extended from said resistor line, in multiple locations, to provide contact tabs; multiple switching devices, each connected to selectably make connection to a respective one of said contact tabs; wherein essentially all electrical contacts to said resistor line are physically located in said contact tabs, and not in said resistor line.
Claim 3
Dependent Claim
17 words
The integrated circuit resistor of claim 1, wherein said thin-film resistive material consists essentially of doped polysilicon.
Claim 4
Dependent Claim
14 words
The integrated circuit resistor of claim 1, wherein said resistive material comprises titanium nitride.
Claim 5
Dependent Claim
21 words
The integrated circuit resistor of claim 1, wherein said tabs, but not said resistor line, are overlain by a metal silicide.
Claim 6
Dependent Claim
23 words
The integrated circuit resistor of claim 1, wherein said thin-film resistive material is polycrystalline and comprises more than 95 percent atomic of silicon.
Claim 7
Dependent Claim
39 words
The integrated circuit resistor of claim 1, wherein said thin-film resistive material is polycrystalline and comprises more than 95 percent atomic of silicon and is doped to provide a sheet resistance which is less than 100 ohms per square.
Claim 8
Dependent Claim
32 words
The integrated circuit resistor of claim 1, wherein said thin-film resistive material is polycrystalline and comprises more than 70 percent atomic of silicon, and comprises more than one percent atomic of oxygen.
Claim 9
Dependent Claim
118 words
An integrated circuit resistor, comprising: a resistor line, consisting essentially of a strip of a thin film resistive material; additional quantities of said thin film material being laterally extended from said resistor line, in multiple locations, to provide contact tabs; a thin film metal layer, patterned to provide wiring in a predetermined pattern, and to provide contacts in multiple locations to individual respective ones of said contact tabs; multiple switching devices, each respectively connected, through electrical paths which include wiring in said metal layer, to selectably make connection to a respective one of said contact tabs; wherein essentially all electrical contacts to said resistor line are physically located in said contact tabs, and not in said resistor line.
Claim 10
Dependent Claim
118 words
An integrated circuit resistor, comprising: a resistor line, consisting essentially of a strip of a thin film resistive material; additional quantities of said thin film material being laterally extended from said resistor line, in multiple locations, to provide contact tabs; a thin film metal layer, patterned to provide wiring in a predetermined pattern, and to provide contacts in multiple locations to individual respective ones of said contact tabs; multiple switching devices, each respectively connected, through electrical paths which include wiring in said metal layer, to selectably make connection to a respective one of said contact tabs; wherein essentially all electrical contacts to said resistor line are physically located in said contact tabs, and not in said resistor line.
Claim 11
Dependent Claim
16 words
The integrated circuit resistor of claim 8, wherein said metal layer consists of an aluminum alloy.
Claim 12
Dependent Claim
16 words
The integrated circuit resistor of claim 8, wherein said metal layer consists essentially of silicon-doped aluminum.
Claim 13
Dependent Claim
16 words
The integrated circuit resistor of claim 8, wherein said metal layer consists essentially of copper-doped aluminum.
Claim 14
Dependent Claim
31 words
The integrated circuit resistor of claim 8, wherein said metal layer consists of an aluminum alloy, and wherein said tabs, but not said resistor line, are overlain by a metal silicide.
Claim 15
Dependent Claim
33 words
The integrated circuit resistor of claim 8, wherein said metal layer consists of an aluminum alloy, and wherein said thin-film resistive material is polycrystalline and comprises more than 95 percent atomic of silicon.
Claim 16
Dependent Claim
39 words
The integrated circuit resistor of claim 8, wherein said thin-film resistive material is polycrystalline and comprises more than 95 percent atomic of silicon and is doped to provide a sheet resistance which is less than 100 ohms per square.
Claim 17
Dependent Claim
31 words
The integrated circuit resistor of claim 8, wherein thin-film resistive material is polycrystalline and comprises more than 70 percent atomic of silicon, and comprises more than one percent atomic of oxygen.
Claim 18
Dependent Claim
79 words
An integrated circuit potentiometer, comprising a resistor line, consisting essentially of a strip of a thin film of a resistive material located in a rectangular area; additional quantities of said thin film material being laterally extended from said resistor line and across a side of said rectangular area, in multiple locations, to provide contact tabs located outside of said rectangular area; and multiple switching devices, each connected to selectably make connection to a respective one of said contact tabs;
Claim 19
Dependent Claim
79 words
An integrated circuit potentiometer, comprising a resistor line, consisting essentially of a strip of a thin film of a resistive material located in a rectangular area; additional quantities of said thin film material being laterally extended from said resistor line and across a side of said rectangular area, in multiple locations, to provide contact tabs located outside of said rectangular area; and multiple switching devices, each connected to selectably make connection to a respective one of said contact tabs;
Claim 20
Dependent Claim
16 words
The integrated circuit potentiometer of claim 16, wherein said resistor line meanders within said rectangular area.
Claim 21
Dependent Claim
22 words
The integrated circuit potentiometer of claim 16, wherein said resistor line has a side coinciding with said side of said rectangular area.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-06-07 | 1996-12-07 | 1997-06-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-06-07 | 2000-12-07 | 2001-06-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-06-07 | 2004-12-07 | 2005-06-08 | $7700.00 | Window Closed / Lapsed |