Silicon etching process using polymeric mask, for example, to form V-groove for an optical fiber coupling

Claim 2

A process for etching a selected region of a silicon substrate, said substrate including an adjacent region about said selected region, said process comprising applying a coating formed of an alkaline-resistant polymer to the substrate to substantially cover said selected region and said adjacent region, selectively removing said polymer coating from the selected region to expose the underlying silicon, whereby the substrate is protected at said adjacent region by said polymer coating, and treating the substrate with an alkaline solution to etch the exposed silicon at the selected region.

Claim 3

A process in accordance with claim 1 wherein the polymer is composed of a resin selected from the group consisting of poly(benzocyclobutene) resin and polyphenylquinoxaline resin.

Claim 4

A process in accordance with claim 1 wherein the substrate is formed of single crystal silicon and wherein, following the selective removal of the polymer coating, the substrate is treated with an alkaline solution containing potassium hydroxide to anisotropically etch the silicon to form a groove.

Claim 5

A process for etching a selected region of a single crystal silicon substrate, said substrate comprising an adjacent region about the selected region, said process comprising forming a coating on the substrate such that the coating overlies the selected region and the adjacent regions, said coating being composed of an alkaline-resistant polymer derived from a multi-functional benzocyclobutene compound characterized by the formula ##STR4## wherein R is selected from the group consisting of hydrocarbon chains and siloxane chains, selectively removing said coating from the selected region to expose the underlying silicon, whereby the remaining coating protects the silicon at said adjacent region, and contacting the substrate with an alkaline solution to anisotropically etch the exposed silicon at the selected region to form a groove.

Claim 6

A process for etching a selected region of a single crystal silicon substrate, said substrate comprising an adjacent region about the selected region, said process comprising forming a coating on the substrate such that the coating overlies the selected region and the adjacent regions, said coating being composed of an alkaline-resistant polymer derived from a multi-functional benzocyclobutene compound characterized by the formula ##STR4## wherein R is selected from the group consisting of hydrocarbon chains and siloxane chains, selectively removing said coating from the selected region to expose the underlying silicon, whereby the remaining coating protects the silicon at said adjacent region, and contacting the substrate with an alkaline solution to anisotropically etch the exposed silicon at the selected region to form a groove.

Claim 7

A process in accordance with claim 4 wherein the coating is formed by applying a solution containing a prepolymer of the compound in partially cured condition, and thereafter heating to cure the prepolymer to form the coating.

Claim 8

A process in accordance with claim 4 wherein the substrate is contacted with the alkaline solution for a time and at a temperature sufficient to form a groove having a V cross-section.

Claim 9

A process for etching a selected region of a single crystal silicon substrate, said substrate comprising an adjacent region about the selected region, said process comprising applying a layer comprising a prepolymer predominantly derived from divinyl siloxane benzocyclobutene compound, heating the layer at a temperature not greater than about 250° C. to cure the prepolymer to form an alkaline-resistant polymer coating on the substrate, said coating overlying the selected region and the adjacent region, removing the coating from the selected region to expose the underlying silicon, while retaining the coating at said adjacent region to form a mask protecting the silicon substrate thereat, and contacting the masked substrate with an alkaline solution for a time and at a temperature effective to anisotropically etch the exposed silicon at the selected region to form a groove.

Claim 10

A process for etching a selected region of a single crystal silicon substrate, said substrate comprising an adjacent region about the selected region, said process comprising applying a layer comprising a prepolymer predominantly derived from divinyl siloxane benzocyclobutene compound, heating the layer at a temperature not greater than about 250° C. to cure the prepolymer to form an alkaline-resistant polymer coating on the substrate, said coating overlying the selected region and the adjacent region, removing the coating from the selected region to expose the underlying silicon, while retaining the coating at said adjacent region to form a mask protecting the silicon substrate thereat, and contacting the masked substrate with an alkaline solution for a time and at a temperature effective to anisotropically etch the exposed silicon at the selected region to form a groove.

Claim 11

A process in accordance with claim 7 wherein the prepolymer is a stage b prepolymer formed by heating a solution containing the compound to a temperature of between about 180° C. and 195° C. for between about 2 and 8 hours, and is applied in a solution composed of between about 30 and 40 weight percent prepolymer in mesitylene.

Claim 12

A process for forming an optically coupled assembly comprising an optoelectronic module and an optical fiber coupled to the module, said fiber comprising a core adapted for conveying optical signals and having an end section that includes an end of the core for admitting or emitting light signals, said process comprising applying an optical waveguide coating to a single crystal silicon substrate, said coating comprising a cladding formed of an alkaline-resistant polymer and an optical waveguide embedded within the cladding and extending to a selected region of the substrate, selectively removing said coating from the selected region to expose the underlying silicon, while retaining the coating at an adjacent region about the selected region, said coating removal forming an end of said waveguide at said selected region, treating the substrate with an alkaline solution to etch the exposed silicon at the selected region to form a groove, and inserting the fiber end section into the groove such that the core end registers with the waveguide end to produce optical coupling therebetween.

Claim 13

A process for forming an optically coupled assembly comprising an optoelectronic module and an optical fiber coupled to the module, said fiber comprising a core adapted for conveying optical signals and having an end section that includes an end of the core for admitting or emitting light signals, said process comprising applying an optical waveguide coating to a single crystal silicon substrate, said coating comprising a cladding formed of an alkaline-resistant polymer and an optical waveguide embedded within the cladding and extending to a selected region of the substrate, selectively removing said coating from the selected region to expose the underlying silicon, while retaining the coating at an adjacent region about the selected region, said coating removal forming an end of said waveguide at said selected region, treating the substrate with an alkaline solution to etch the exposed silicon at the selected region to form a groove, and inserting the fiber end section into the groove such that the core end registers with the waveguide end to produce optical coupling therebetween.

Claim 14

A process in accordance with claim 9 wherein the coating is formed predominantly of poly(benzocyclobutene) resin.

Claim 15

A process for forming an optically coupled assembly comprising an optical fiber and a module comprising an optical waveguide carried on a substrate, said fiber comprising a core having a light transmitting end, said process comprising applying a optical waveguide coating to a single crystal silicon substrate, said coating comprising a cladding and an optical waveguide embedded within the cladding, said cladding being formed of an alkaline-resistant polymer derived from a multi-functional benzocyclobutene compound characterized by the formula ##STR5## wherein R is selected from the group consisting of hydrocarbon chains and siloxane chains, removing said coating from a selected region of the substrate to expose the underlying silicon, while retaining the coating at an adjacent region about the selected region to protect the substrate thereat, said coating removal forming an end of said waveguide adjacent said selected region, treating the substrate with an alkaline solution to etch the exposed silicon at the selected region to form a V-groove, and inserting the optical fiber into the groove such that the core end registers with the waveguide end to produce an optical coupling therebetween.

Claim 16

A process for forming an optically coupled assembly comprising an optical fiber and a module comprising an optical waveguide carried on a substrate, said fiber comprising a core having a light transmitting end, said process comprising applying a optical waveguide coating to a single crystal silicon substrate, said coating comprising a cladding and an optical waveguide embedded within the cladding, said cladding being formed of an alkaline-resistant polymer derived from a multi-functional benzocyclobutene compound characterized by the formula ##STR5## wherein R is selected from the group consisting of hydrocarbon chains and siloxane chains, removing said coating from a selected region of the substrate to expose the underlying silicon, while retaining the coating at an adjacent region about the selected region to protect the substrate thereat, said coating removal forming an end of said waveguide adjacent said selected region, treating the substrate with an alkaline solution to etch the exposed silicon at the selected region to form a V-groove, and inserting the optical fiber into the groove such that the core end registers with the waveguide end to produce an optical coupling therebetween.

Claim 17

A process in accordance with claim 11 wherein the cladding is derived predominantly of divinyl siloxane benzocyclobutene.

Claim 18

A process in accordance with claim 11 wherein the optical waveguide is formed of a poly(benzocyclobutene) resin that is compositionally distinct from the cladding and has an index of refraction significantly greater than the cladding and effective to produce internal reflection of light at interfaces therebetween.

Claim 19

A process for forming an assembly comprising an optoelectronic module coupled to an optical fiber, said module comprising an optical waveguide carried on a substrate, said fiber comprising a core for transmitting an optical signal and having an end for admitting and emitting said signal, said process comprising providing a single crystal silicon substrate including a selected surface region and an adjacent surface region about the selected region, applying a first polymer layer on the substrate such that the layer covers the selected region and the adjacent region, said layer being composed of a polymer derived substantially from divinyl siloxane benzocyclobutene compound and being formed by applying a solution comprising a prepolymer of said compound and curing the prepolymer by heating at a temperature not greater than 250° C., forming an optical waveguide on said first layer such that the waveguide extends onto the selected region and the adjacent region, said waveguide being formed of a copolymer of divinyl siloxane benzocyclobutene compound and ethylene benzocyclobutene compound, said copolymer having an index of refraction significantly greater than said first layer and effective to produce internal reflection at interfaces therebetween, applying a second polymer layer to said substrate to overlie the first layer and embed the waveguide, said second layer being formed of a polymer substantially derived from said divinyl siloxane benzocyclobutene compound similar to the first layer, whereby a coating is produced that comprises said optical waveguide embedded within a cladding formed by said first layer and said second layer, removing the coating from the selected region to expose the underlying silicon, while retaining the coating at the adjacent region to protect the silicon substrate thereat, said coating being removed to form an end in the waveguide at the selected region, contacting the substrate with an alkaline solution comprising potassium hydroxide for a time and at a temperature effective to anisotropically etch the exposed silicon at the selected region to form a V-groove, and inserting the optical fiber into the groove such that the core end registers with the waveguide end to produce optical coupling therebetween.

Claim 20

A process for forming an assembly comprising an optoelectronic module coupled to an optical fiber, said module comprising an optical waveguide carried on a substrate, said fiber comprising a core for transmitting an optical signal and having an end for admitting and emitting said signal, said process comprising providing a single crystal silicon substrate including a selected surface region and an adjacent surface region about the selected region, applying a first polymer layer on the substrate such that the layer covers the selected region and the adjacent region, said layer being composed of a polymer derived substantially from divinyl siloxane benzocyclobutene compound and being formed by applying a solution comprising a prepolymer of said compound and curing the prepolymer by heating at a temperature not greater than 250° C., forming an optical waveguide on said first layer such that the waveguide extends onto the selected region and the adjacent region, said waveguide being formed of a copolymer of divinyl siloxane benzocyclobutene compound and ethylene benzocyclobutene compound, said copolymer having an index of refraction significantly greater than said first layer and effective to produce internal reflection at interfaces therebetween, applying a second polymer layer to said substrate to overlie the first layer and embed the waveguide, said second layer being formed of a polymer substantially derived from said divinyl siloxane benzocyclobutene compound similar to the first layer, whereby a coating is produced that comprises said optical waveguide embedded within a cladding formed by said first layer and said second layer, removing the coating from the selected region to expose the underlying silicon, while retaining the coating at the adjacent region to protect the silicon substrate thereat, said coating being removed to form an end in the waveguide at the selected region, contacting the substrate with an alkaline solution comprising potassium hydroxide for a time and at a temperature effective to anisotropically etch the exposed silicon at the selected region to form a V-groove, and inserting the optical fiber into the groove such that the core end registers with the waveguide end to produce optical coupling therebetween.

Claim 21

A process in accordance with claim 14 wherein the divinyl siloxane benzocyclobutene prepolymer is a stage b prepolymer formed by heating a solution containing the compound to a temperature of between about 180° C. and 195° C. for between about 2 and 8 hours, and is applied in a solution composed of between about 30 and 40 weight percent prepolymer in mesitylene.