Arrangement for coupling an optical fiber to a coupling window of a planarly integrated optical component and the method of manufacturing the arrangement

Claim 1

A method for manufacturing an arrangement comprising a substrate having a V-shaped groove which is terminated at least at one end by a closed substrate surface containing a coupling window of an optical component, said groove containing an end section of an optical fiber with the end surface of the optical fiber being positioned opposite the coupling window, said method comprising the steps of providing a substrate having an optical waveguide disposed beneath a surface of the substrate, providing an etching mask on said surface having two slots extending parallel to the waveguide on opposite sides of said waveguide, said slots exposing a portion of said surface and terminating inward of one end of said substrate, obliquely etching the substrate through said slots to form two slot-shaped channels proceeding obliquely from the substrate surface towards one another to a depth of the substrate until they intersect one another under the waveguide to form a bridge separated from the rest of the substrate by said channels, removing said bridge up to the approximate length of the position where the coupling window is to be provided to form a V-shaped groove being terminated at least at one end by a substantially vertical substrate surface containing said window, and then securing an end section of a fiber in said V-shaped profile groove with an end surface of said fiber being positioned adjacent said window.

Claim 2

A method for manufacturing an arrangement comprising a substrate having a V-shaped groove which is terminated at least at one end by a closed substrate surface containing a coupling window of an optical component, said groove containing an end section of an optical fiber with the end surface of the optical fiber being positioned opposite the coupling window, said method comprising the steps of providing a substrate having an optical waveguide disposed beneath a surface of the substrate, providing an etching mask on said surface having two slots extending parallel to the waveguide on opposite sides of said waveguide, said slots exposing a portion of said surface and terminating inward of one end of said substrate, obliquely etching the substrate through said slots to form two slot-shaped channels proceeding obliquely from the substrate surface towards one another to a depth of the substrate until they intersect one another under the waveguide to form a bridge separated from the rest of the substrate by said channels, removing said bridge up to the approximate length of the position where the coupling window is to be provided to form a V-shaped groove being terminated at least at one end by a substantially vertical substrate surface containing said window, and then securing an end section of a fiber in said V-shaped profile groove with an end surface of said fiber being positioned adjacent said window.