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US5046809A Expired / Lapsed US ⏱️ 0.0 years remaining

Coupling arrangement for optically coupling a fiber to a planar optical waveguide integrated on a substrate

Assignee: Siemens AG
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Filing: 1990-09-18
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Granted: 1991-09-10
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Expires: 2010-09-18
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Abstract

Abstract In silicon micro mechanical units, a coupling arrangement for optically coupling a fiber to a planar optical waveguide integrated on a substrate. The coupling arrangement provides a fiber arranged in a V-shaped groove of the substrate, leading to the planar waveguide and terminating in a low-attenuation butt coupling between the fiber and the planar optical waveguide. The butt coupling achieves the low-attenuation without great outlay, and cost-beneficially. A further embodiment employs welding the fiber to the waveguide.

Inventors

  • 👤 Karl-Ulrich Stein

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-23 15:45
CPC Classifications
G; G02; G02B; G02B6/00; G02B6/24; G02B6/255; G02B6/2551; G02B6/26; G02B6/30

Claims Analysis

Total Claims: 12
Claim 1
Independent Claim 125 words
A coupling arrangement for optically coupling a fiber to a planar optical waveguide comprising: a fiber having a fiber end face; a planar optical waveguide having an end surface for communicating with said fiber; a substrate having said planar optical waveguide integrated thereon, and having a V-shaped groove formed into a surface of said substrate, said fiber arranged axially supported inside said groove along a length of said groove, said substrate having a projection portion projecting into said groove, and said end surface of said planar optical waveguide faces said fiber end face of said fiber, said end surface arranged at a free end of said projection portion into said groove, the end surface in close contact with said fiber end face of said fiber.
Claim 2
Dependent Claim 125 words
A coupling arrangement for optically coupling a fiber to a planar optical waveguide comprising: a fiber having a fiber end face; a planar optical waveguide having an end surface for communicating with said fiber; a substrate having said planar optical waveguide integrated thereon, and having a V-shaped groove formed into a surface of said substrate, said fiber arranged axially supported inside said groove along a length of said groove, said substrate having a projection portion projecting into said groove, and said end surface of said planar optical waveguide faces said fiber end face of said fiber, said end surface arranged at a free end of said projection portion into said groove, the end surface in close contact with said fiber end face of said fiber.
Claim 3
Dependent Claim 76 words
A coupling arrangement according to claim 1, wherein said substrate has a cavity formed into said surface of said substrate at a longitudinal end of said groove, and said cavity open to said groove, said cavity undercutting said surface of said substrate at the longitudinal end of said groove forming said projection portion of said substrate, allowing said fiber to reside at least partially inside said cavity, with said fiber end face abutting said end surface.
Claim 4
Dependent Claim 25 words
A coupling arrangement according to claim 2, wherein said arrangement further comprises an emersion agent arranged between said fiber end face and said end surface.
Claim 5
Dependent Claim 25 words
A coupling arrangement according to claim 2, wherein said fiber end face and said end surface are connected to one another by a fused connection.
Claim 6
Dependent Claim 27 words
A coupling arrangement according to claim 4, wherein said arrangement further comprises a plastic support and said fiber is supported in the groove by said plastic support.
Claim 7
Independent Claim 132 words
A method for manufacturing a coupling element to optically couple a fiber to a planar optical waveguide comprising the steps: provide a fiber having a fiber end face to communicate with said waveguide; provide a substrate with said planar optical waveguide integrated on a substrate surface of said substrate thereon; anisotropically etch a groove having an oblique groove end face arranged aligned at said substrate surface with a waveguide end surface of the planar optical waveguide; isotopically etch a cavity at the groove end face, undercutting the planar optical waveguide and causing said waveguide end surface to project into said cavity; insert said fiber longitudinally in said groove, said groove sized to accept said fiber with said fiber end face aligned with said waveguide end surface, and abutting said waveguide end surface.
Claim 8
Independent Claim 132 words
A method for manufacturing a coupling element to optically couple a fiber to a planar optical waveguide comprising the steps: provide a fiber having a fiber end face to communicate with said waveguide; provide a substrate with said planar optical waveguide integrated on a substrate surface of said substrate thereon; anisotropically etch a groove having an oblique groove end face arranged aligned at said substrate surface with a waveguide end surface of the planar optical waveguide; isotopically etch a cavity at the groove end face, undercutting the planar optical waveguide and causing said waveguide end surface to project into said cavity; insert said fiber longitudinally in said groove, said groove sized to accept said fiber with said fiber end face aligned with said waveguide end surface, and abutting said waveguide end surface.
Claim 9
Dependent Claim 30 words
A method according to claim 6, comprising the further step that said fiber end surface and said waveguide end face are welded to one another with a thermic welding technique.
Claim 10
Dependent Claim 22 words
A method according to claim 7, comprising the further step that said fiber is supported in said groove by a plastic envelope.
Claim 11
Dependent Claim 13 words
A method according to claim 6, wherein said substrate is composed of silicon.
Claim 12
Dependent Claim 26 words
A method according to claim 6, comprising the further step that an emersion agent is arranged between the waveguide end surface and the fiber end face.

References Cited (Backward Citations)

US4210923A Cited
US4601535A Cited
US4892377A Cited
US4890895A Cited
US4973133A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1994-09-09 1995-03-11 1995-09-10 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1998-09-09 1999-03-11 1999-09-10 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2002-09-09 2003-03-11 2003-09-10 $7700.00 Window Closed / Lapsed

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