US5210801A — Environmentally protected integrated optical comp…

Claim 1

Independent Claim 64 words

An environmentally protected integrated optical component having at least one sealed cavity isolated from the environment and formed in at least one layer by a light guide, said cavity being filled with a material having a refractive index which can be electrically and/or optically made different than the refractive index of said layer, and having means for modifying the refractive index of said material.

Claim 2

Dependent Claim 64 words

An environmentally protected integrated optical component having at least one sealed cavity isolated from the environment and formed in at least one layer by a light guide, said cavity being filled with a material having a refractive index which can be electrically and/or optically made different than the refractive index of said layer, and having means for modifying the refractive index of said material.

Claim 3

Dependent Claim 23 words

The optical component according to claim 1, wherein the material is chosen from the group consisting of gases, CS 2 and organic polymers.

Claim 4

Dependent Claim 22 words

The optical component according to claim 1, wherein the material has a refractive index lower than the refractive index of said layer.

Claim 5

Dependent Claim 16 words

The optical component according to claim 1, wherein the cavity has a height/width ratio of ≧0.1.

Claim 6

Dependent Claim 18 words

The optical component according to claim 1, wherein the cavity has a height/width ratio between 1 and 5.

Claim 7

Dependent Claim 65 words

The optical component according to claim 1, wherein the light guide comprises a lower layer, a guide layer, an upper layer and a convering layer stacked on a substrate, the guide layer having a refractive index higher than the refractive index of the lower, upper and covering layers, and wherein the cavity is located in at least one of the lower, guide and upper layers.

Claim 8

Dependent Claim 52 words

The optical component according to claim 1, wherein the light guide comprises an upper layer and a lower silica layer, positioned on either side of a guide layer of one of silicon nitride, silica doped with a doping agent increasing its refractive index or SiO x N y with 0<x<2 and 0<y<4/3.

Claim 9

Dependent Claim 33 words

An optical component of the diffraction grating type according to claim 1, comprising several cavities arranged parallel to one another and filled with said material, said cavities constituting the lines of the grating.

Claim 10

Dependent Claim 65 words

The optical component of the grating type according to claim 8, wherein the light guide comprises a lower layer, a guide layer, an upper layer and a covering layer stacked on a substrate, the guide layer having a refractive index higher than the refractive index of the lower, upper and covering layers, the cavities being located in the guide layer or in the upper layer.

Claim 11

Dependent Claim 69 words

An optical component of the mirror type according to claim 1, wherein the light guide comprises a lower layer, a guide layer, an upper layer and a covering layer stacked on a substrate, the guide layer having a refractive index higher than the refractive index of the lower, upper and covering layers and wherein the cavity extends from the upper layer to the lower layer of the light guide.

Claim 12

Dependent Claim 25 words

An optical component of the splitter type according to claim 6, wherein the cavity is essentially located in the upper layer of the light guide.

Claim 13

Dependent Claim 19 words

An optical component of the microguide type according to claim 1, comprising two parallel cavities filled with said material.

Claim 14

Dependent Claim 150 words

An environmentally protected integrated optical coupler for coupling first and second superimposed light guides with very different index variations, wherein the first guide consists of a first upper layer and a first lower layer on either side of a first guide layer with a refractive index higher than the refractive index of the first upper and lower layers and the second guide consists of a second upper layer and a second lower layer on either side of a second guide layer with a refractive index higher than the refractive index of the second lower and upper layers, the first upper layer and the second lower layer constituting one and the same coupling layer in which are provided several cavities carrying a material having a refractive index which is different or which can be made different than the refractive index of the coupling layer, said cavities being isolated from the environment.

Claim 15

Dependent Claim 150 words

An environmentally protected integrated optical coupler for coupling first and second superimposed light guides with very different index variations, wherein the first guide consists of a first upper layer and a first lower layer on either side of a first guide layer with a refractive index higher than the refractive index of the first upper and lower layers and the second guide consists of a second upper layer and a second lower layer on either side of a second guide layer with a refractive index higher than the refractive index of the second lower and upper layers, the first upper layer and the second lower layer constituting one and the same coupling layer in which are provided several cavities carrying a material having a refractive index which is different or which can be made different than the refractive index of the coupling layer, said cavities being isolated from the environment.

Claim 16

Dependent Claim 60 words

The coupler according to claim 13, wherein the first and second lower and upper layers are of silica, the first guide layer is of Si 3 N 4 or SiO x N y with 0<x<2 and 0<y<4/3, the second guide layer is of silica doped with a doping agent increasing its refractive index and the cavities are filled with air.

Claim 17

Dependent Claim 116 words

An environmentally protected integrated optical coupler for coupling first and second superimposed light guides with very different index variations, wherein the guides have a first, a second, a third and a fourth stacked layers, the second and third layers constituting the guide layers respectively of the first and second guides and having refractive indices higher than those of the first and fourth layers, the refractive index of the second layer also being different from that of the third layer, said third layer having cavities filled with a material having a refractive index which is different or which can be made different than the refractive index of the third layer, said cavities being isolated from the environment.

Claim 18

Dependent Claim 116 words

An environmentally protected integrated optical coupler for coupling first and second superimposed light guides with very different index variations, wherein the guides have a first, a second, a third and a fourth stacked layers, the second and third layers constituting the guide layers respectively of the first and second guides and having refractive indices higher than those of the first and fourth layers, the refractive index of the second layer also being different from that of the third layer, said third layer having cavities filled with a material having a refractive index which is different or which can be made different than the refractive index of the third layer, said cavities being isolated from the environment.

Claim 19

Dependent Claim 48 words

The coupler according to claim 15, wherein the first and fourth layers are of silica, the second layer is of Si 3 N 4 and the third layer is of silica doped with a doping agent increasing its refractive index and wherein the cavities are filled with air.

Claim 20

Dependent Claim 140 words

A process for producing an environmentally protected integrated optical component having at least one sealed cavity isolated from the environment and formed in at least one layer of a light guide, said cavity being filled with a material having a refractive index which is different or which can be made different than the refractive index of said layer, said process comprising the following stages: depositing at least one first layer on a support, producing at least one trench in said first layer by etching said first layer, said trench having a height and a width such that height/width ratio is ≦0.5, and chemical vapor phase depositing (CVD) a second layer on the thus etched first layer, forming an air-filled sealed cavity in the trench wherein said air in said sealed cavity in the gas present is the environment during manufacture.

Claim 21

Dependent Claim 140 words

A process for producing an environmentally protected integrated optical component having at least one sealed cavity isolated from the environment and formed in at least one layer of a light guide, said cavity being filled with a material having a refractive index which is different or which can be made different than the refractive index of said layer, said process comprising the following stages: depositing at least one first layer on a support, producing at least one trench in said first layer by etching said first layer, said trench having a height and a width such that height/width ratio is ≦0.5, and chemical vapor phase depositing (CVD) a second layer on the thus etched first layer, forming an air-filled sealed cavity in the trench wherein said air in said sealed cavity in the gas present is the environment during manufacture.

Claim 22

Dependent Claim 18 words

The process according to claim 17, wherein the second layer is deposited by plasma-assisted or low pressure CVD.

Claim 23

Dependent Claim 27 words

The process according to claim 17, wherein a heat treatment is performed on the first and/or second layers in order to yield said first and/or second layers.

Claim 24

Dependent Claim 152 words

A process for producing an environmentally protected integrated optical component having at least one sealed cavity isolated from the environment and formed in at least one layer of a light guide, said cavity being filled with a material having a refractive index which is different or which can be made different to the refractive index of said layer, said process comprising the following stages: (a) depositing at least one first layer on a support, (b) producing at least one trench in said first layer, (c) depositing an intercalated material in the trench and above said trench, which can be selectively eliminated with respect to the support, the first layer and a second layer, (d) depositing on the structure obtained in (c) the second layer, and (e) eliminating the intercalated material, thus forming a cavity filled with air in the trench wherein said air is the gas present in the environment during manufacture.

Claim 25

Dependent Claim 152 words

A process for producing an environmentally protected integrated optical component having at least one sealed cavity isolated from the environment and formed in at least one layer of a light guide, said cavity being filled with a material having a refractive index which is different or which can be made different to the refractive index of said layer, said process comprising the following stages: (a) depositing at least one first layer on a support, (b) producing at least one trench in said first layer, (c) depositing an intercalated material in the trench and above said trench, which can be selectively eliminated with respect to the support, the first layer and a second layer, (d) depositing on the structure obtained in (c) the second layer, and (e) eliminating the intercalated material, thus forming a cavity filled with air in the trench wherein said air is the gas present in the environment during manufacture.

Claim 26

Dependent Claim 159 words

A process for producing an environmentally protected integrated optical component having at least one sealed cavity isolated from the environment and formed in at least one layer of a light guide, said cavity being filled with a material having a refractive index which is different or which can be made different to the refractive index of said layer, said process comprising the following stages: (a) depositing a first layer on a support, (b) depositing an intercalated material layer on the first layer, which can be selectively etched with respect to said first layer, a second layer and the support, (c) etching said intercalated layer so as to form at least one intercalated material stud, (d) depositing on the structure obtained in (c) the second layer, and (e) eliminating the intercalated material stud, thus forming an air-filled sealed cavity at the location of the stud wherein said air in the cavity is the gas present in the environment during manufacture.

Claim 27

Dependent Claim 159 words

A process for producing an environmentally protected integrated optical component having at least one sealed cavity isolated from the environment and formed in at least one layer of a light guide, said cavity being filled with a material having a refractive index which is different or which can be made different to the refractive index of said layer, said process comprising the following stages: (a) depositing a first layer on a support, (b) depositing an intercalated material layer on the first layer, which can be selectively etched with respect to said first layer, a second layer and the support, (c) etching said intercalated layer so as to form at least one intercalated material stud, (d) depositing on the structure obtained in (c) the second layer, and (e) eliminating the intercalated material stud, thus forming an air-filled sealed cavity at the location of the stud wherein said air in the cavity is the gas present in the environment during manufacture.

Claim 28

Dependent Claim 46 words

The process according to any one of claims 17, 20 or 21, wherein a fluid other than air having a refractive index which is different or which can be made different to the refractive index of the first and second layers is injected into said cavity.

Claim 29

Dependent Claim 28 words

The process according to any one of claims 17, 20 or 21, wherein a polymerizable, liquid organic monomer, said organic monomer being polymerized, is injected into said cavity.

Claim 30

Dependent Claim 107 words

An environmentally protected integrated optical component having at least one sealed cavity isolated from the environment and formed in at least one layer of a light guide, said cavity being filled with a gaseous material having a refractive index which is different from the refractive index of said layer, wherein said light guide comprises a lower layer, a guide layer, an upper layer and a covering layer stacked on a substrate, the guide layer having a refractive index higher than the refractive index of the lower, upper and covering layers, and wherein the cavity is located in at least one of the lower, guide and upper layers.

Claim 31

Dependent Claim 107 words

An environmentally protected integrated optical component having at least one sealed cavity isolated from the environment and formed in at least one layer of a light guide, said cavity being filled with a gaseous material having a refractive index which is different from the refractive index of said layer, wherein said light guide comprises a lower layer, a guide layer, an upper layer and a covering layer stacked on a substrate, the guide layer having a refractive index higher than the refractive index of the lower, upper and covering layers, and wherein the cavity is located in at least one of the lower, guide and upper layers.

Claim 32

Dependent Claim 23 words

The optical component according to claim 24, wherein said gaseous material is air which is the gas present in the environment during manufacture.

Claim 33

Dependent Claim 16 words

The optical component according to claim 24, wherein the cavity has a height/width ratio of ≧0.1.

Claim 34

Dependent Claim 18 words

The optical component according to claim 24, wherein the cavity has a height/width ratio between 1 and 5.

Claim 35

Dependent Claim 50 words

The optical component according to claim 24, wherein the light guide comprises an upper layer and a lower silica layer, positioned on either side of a guide layer of silicon nitride, silica doped with a doping agent increasing its refractive index or SiO x N y with 0<x<2 and 0<y<4/3.

Claim 36

Dependent Claim 33 words

An optical component of the diffraction grating type according to claim 24, comprising several cavities arranged parallel to one another and filled with said material, said cavities constituting the lines of the grating.

Claim 37

Dependent Claim 65 words

The optical component of the grating type according to claim 29, wherein the light guide comprises a lower layer, a guide layer, an upper layer and a covering layer stacked on a substrate, the guide layer having a refractive index higher than the refractive index of the lower, upper and covering layers, the cavities being located in the guide layer or in the upper layer.

Claim 38

Dependent Claim 69 words

An optical component of the mirror type according to claim 24, wherein the light guide comprises a lower layer, a guide layer, an upper layer and a covering layer stacked on a substrate, the guide layer having a refractive index higher than the refractive index of the lower, upper and covering layers and wherein the cavity extends from the upper layer to the lower layer of the light guide.

Claim 39

Dependent Claim 25 words

An optical component of the splitter type according to claim 24, wherein the cavity is essentially located in the upper layer of the light guide.

Claim 40

Dependent Claim 19 words

An optical component of the microguide type according to claim 24, comprising two parallel cavities filled with said material.

Claim 41

Dependent Claim 93 words

An environmentally protected integrated optical component having at least one sealed cavity isolated from the environment and formed in at least one layer of a light guide, said cavity being filled with a gaseous material having a refractive index which is different from the refractive index of said layer wherein said component includes a support, at least one first layer deposited on said support, a cavity filled with a gas, and a second layer deposited on said first layer in such a way that said cavity is sealed and isolated from the environment.

Claim 42

Dependent Claim 93 words

An environmentally protected integrated optical component having at least one sealed cavity isolated from the environment and formed in at least one layer of a light guide, said cavity being filled with a gaseous material having a refractive index which is different from the refractive index of said layer wherein said component includes a support, at least one first layer deposited on said support, a cavity filled with a gas, and a second layer deposited on said first layer in such a way that said cavity is sealed and isolated from the environment.

Claim 43

Dependent Claim 23 words

The optical component according to claim 34, wherein said gaseous material is air which is the gas present in the environment during manufacture.

Claim 44

Dependent Claim 21 words

The optical component according to claim 34, wherein the cavity has a height/width ratio of greater than or equal to 0.1.

Claim 45

Dependent Claim 18 words

The optical component according to claim 34, wherein the cavity has a height/width ratio between 1 and 5.

Claim 46

Dependent Claim 67 words

The optical component according to claim 34, wherein the light guide comprises an upper layer and a lower silica layer, positioned on either side of a guide layer of silicon nitride, silica doped with a doping agent increasing its refractive index or SiO x N y with x being greater than 0 and less than 2 and with y being greater than 0 and less than 4/3.

Claim 47

Dependent Claim 33 words

An optical component of the diffraction grating type according to claim 34, comprising several cavities arranged parallel to one another and filled with said material, said cavities constituting the lines of the grating.

Claim 48

Dependent Claim 66 words

The optical component of the diffraction grating type according to claim 39, wherein the light guide comprises a lower layer, a guide layer, an upper layer and a covering layer stacked on a substrate, the guide layer having a refractive index higher than the refractive index of the lower, upper and covering layers, the cavities being located in the guide layer or in the upper layer.

Claim 49

Dependent Claim 69 words

An optical component of the mirror type according to claim 34, wherein the light guide comprises a lower layer, a guide layer, an upper layer and a covering layer stacked on a substrate, the guide layer having a refractive index higher than the refractive index of the lower, upper and covering layers and wherein the cavity extends from the upper layer to the lower layer of the light guide.

Claim 50

Dependent Claim 25 words

An optical component of the splitter type according to claim 34, wherein the cavity is essentially located in the upper layer of the light guide.

Claim 51

Dependent Claim 19 words

An optical component of the microguide type according to claim 34, comprising two parallel cavities filled with said material.

Claim 52

Dependent Claim 111 words

An environmentally protected integrated optical component having at least one sealed cavity isolated from the environment and formed in at least one layer of a light guide, said cavity being filled with a gaseous material having a refractive index which is different from the refractive index of said layer wherein said light guide comprises a lower layer, a guide layer and an upper layer which are stacked, said guide layer having a refractive index higher than the refractive index of the lower and upper layers and being disposed between said upper and lower layers and wherein the cavity is formed in at least one of said lower, guide and upper layers.

Claim 53

Dependent Claim 111 words

An environmentally protected integrated optical component having at least one sealed cavity isolated from the environment and formed in at least one layer of a light guide, said cavity being filled with a gaseous material having a refractive index which is different from the refractive index of said layer wherein said light guide comprises a lower layer, a guide layer and an upper layer which are stacked, said guide layer having a refractive index higher than the refractive index of the lower and upper layers and being disposed between said upper and lower layers and wherein the cavity is formed in at least one of said lower, guide and upper layers.

Claim 54

Dependent Claim 23 words

The optical component according to claim 44, wherein said gaseous material is air which is the gas present in the environment during manufacture.

Claim 55

Dependent Claim 21 words

The optical component according to claim 44, wherein the cavity has a height/width ratio of greater than or equal to 0.1.

Claim 56

Dependent Claim 18 words

The optical component according to claim 44, wherein the cavity has a height/width ratio between 1 and 5.

Claim 57

Dependent Claim 67 words

The optical component according to claim 44, wherein the light guide comprises an upper layer and a lower silica layer, positioned on either side of a guide layer of silicon nitride, silica doped with a doping agent increasing its refractive index or SiO x N y with x being greater than zero and less than 2 and with y being greater than 0 and less than 4/3.

Claim 58

Dependent Claim 33 words

An optical component of the diffraction grating type according to claim 44, comprising several cavities arranged parallel to one another and filled with said material, said cavities constituting the lines of the grating.

Claim 59

Dependent Claim 66 words

The optical component of the diffraction grating type according to claim 49, wherein the light guide comprises a lower layer, a guide layer, an upper layer and a covering layer stacked on a substrate, the guide layer having a refractive index higher than the refractive index of the lower, upper and covering layers, the cavities being located in the guide layer or in the upper layer.

Claim 60

Dependent Claim 69 words

An optical component of the mirror type according to claim 44, wherein the light guide comprises a lower layer, a guide layer, an upper layer and a covering layer stacked on a substrate, the guide layer having a refractive index higher than the refractive index of the lower, upper and covering layers and wherein the cavity extends from the upper layer to the lower layer of the light guide.

Claim 61

Dependent Claim 25 words

An optical component of the splitter type according to claim 44, wherein the cavity is essentially located in the upper layer of the light guide.

Claim 62

Dependent Claim 19 words

An optical component of the microguide type according to claim 44, comprising two parallel cavities filled with said material.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	1996-05-10	1996-11-09	1997-05-11	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	2000-05-10	2000-11-09	2001-05-11	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2004-05-10	2004-11-09	2005-05-11	$7700.00	Window Closed / Lapsed

Environmentally protected integrated optical component and its production process

Abstract

Inventors

Bibliographic Details

Claims Analysis

References Cited (Backward Citations)

USPTO Annuity & Maintenance Windows

Assigned Categories & Tags

Assign Category Tag