US5074629A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Integrated variable focal length lens and its applications
Assignee: Leland Stanford Junior University
•
Filing: 1990-06-27
•
Granted: 1991-12-24
•
Expires: 2010-06-27
Abstract
Abstract A variable focal length lens integrated onto a silicon wafer. A light transmitting material such as gas or liquid is entrapped in a cavity in the wafer. The cavity has a flexible, light transmitting wall. The wall provides one surface of the lens. When the material inside the cavity is heated or cooled, the wall flexes and the focal length of the lens changes. The lens is suitable for use in temperature and pressure sensors, fiber optic communication networks, optical computers, and other applications.
Inventors
- 👤 Mark Zdeblick
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 14:46
CPC Classifications
F; F16; F16K; F16K99/00; F16K99/0001; F15; F15C; F15C3/00; F15C3/04; F15C5/00; F16K99/0003; F16K99/0015; F16K99/0034; F16K99/0036; F16K99/004; F16K99/0042; F16K99/0044; F16K99/0055; F16K99/0061; G; G02; G02B; G02B3/00; G02B3/12; G02B3/14; H; H10; H10P; H10P50/00; H10P50/60; H10P50/64; H10P50/642; H10P50/644; F16K2099/0073; F16K2099/0074; F16K2099/008; F16K2099/0082; F16K2099/0084; F16K2099/009; G02B3/0006; G02B3/0037; Y; Y10; Y10T; Y10T137/00; Y10T137/206; Y10T137/218; Y10T137/2202
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
59 words
A variable focal length lens comprising: a semiconductor substrate having a cavity therein, said cavity having a flexible, light transmitting wall; a light transmitting material having a vapor pressure which changes with changing temperature disposed in said cavity; and a light transmitting substrate coupled to said semiconductor substrate so as to entrap said light transmitting material in said cavity.
Claim 2
Dependent Claim
59 words
A variable focal length lens comprising: a semiconductor substrate having a cavity therein, said cavity having a flexible, light transmitting wall; a light transmitting material having a vapor pressure which changes with changing temperature disposed in said cavity; and a light transmitting substrate coupled to said semiconductor substrate so as to entrap said light transmitting material in said cavity.
Claim 3
Dependent Claim
23 words
The apparatus of claim 1 further comprising means for allowing a user to control the temperature of the material entrapped in said cavity.
Claim 4
Dependent Claim
53 words
The apparatus of claim 1 further comprising a fiber optic light guide affixed in the light transmission path of light emerging from said flexible wall at such a position that the amount of light that is captured by said fiber optic light guide depends upon the then current shape of the flexible wall.
Claim 5
Dependent Claim
70 words
A variable focal length lens comprising: a first semiconductor substrate having a cavity therein, said cavity having a flexible, light transmitting wall; a light transmitting material having a vapor pressure which changes with changing temperature disposed in said cavity; and a second substrate coupled to said semiconductor substrate so as to entrap said light transmitting material in said cavity, said second substrate having a light reflecting surface inside said cavity.
Claim 6
Dependent Claim
70 words
A variable focal length lens comprising: a first semiconductor substrate having a cavity therein, said cavity having a flexible, light transmitting wall; a light transmitting material having a vapor pressure which changes with changing temperature disposed in said cavity; and a second substrate coupled to said semiconductor substrate so as to entrap said light transmitting material in said cavity, said second substrate having a light reflecting surface inside said cavity.
Claim 7
Dependent Claim
40 words
A temperature sensor comprising: wherein the temperature of said light transmitting material is dependent on the temperature to be sensed by said sensor; and means for sensing said temperature to be sensed through sensing a focal length of said lens.
Claim 8
Dependent Claim
40 words
A temperature sensor comprising: wherein the temperature of said light transmitting material is dependent on the temperature to be sensed by said sensor; and means for sensing said temperature to be sensed through sensing a focal length of said lens.
Claim 9
Dependent Claim
75 words
A variable focus lens comprising: a semiconductor substrate having an opening therethrough, said opening having a first end and a second end; a flexible, light transmitting membrane closing said opening at said first end; a light transmitting substrate closing said opening at said second end; a light transmitting material entrapped in said opening between said semiconductor substrate and said flexible membrane; and means for varying the pressure of said light transmitting material on said membrane.
Claim 10
Dependent Claim
75 words
A variable focus lens comprising: a semiconductor substrate having an opening therethrough, said opening having a first end and a second end; a flexible, light transmitting membrane closing said opening at said first end; a light transmitting substrate closing said opening at said second end; a light transmitting material entrapped in said opening between said semiconductor substrate and said flexible membrane; and means for varying the pressure of said light transmitting material on said membrane.
Claim 11
Dependent Claim
19 words
The lens of claim 6 wherein said means for varying the pressure comprises a resistive heater inside said opening.
References Cited (Backward Citations)
US3641354A
Cited
US3621442A
Cited
JPS4842344A
Cited
US3941629A
Cited
US4028945A
Cited
DE2519879A1
Cited
US4079508A
Cited
US4203128A
Cited
US4347976A
Cited
US4432007A
Cited
FR2520470A1
Cited
US4516148A
Cited
US4478077A
Cited
JPS59177500A
Cited
US4872743A
Cited
US4512371A
Cited
US4542650A
Cited
US4585209A
Cited
US4637071A
Cited
GB2155152A
Cited
US4581624A
Cited
US4538642A
Cited
US4679585A
Cited
US4824073A
Cited
US4966646A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-12-23 | 1995-06-24 | 1995-12-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-12-23 | 1999-06-24 | 1999-12-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-12-23 | 2003-06-24 | 2003-12-24 | $7700.00 | Window Closed / Lapsed |