US5210628A
Expired / Lapsed
US
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Liquid crystal light valve with photosensitive layer having irregular diode pattern
Assignee: Hughes JVC Technology Corp
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Filing: 1991-10-21
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Granted: 1993-05-11
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Expires: 2011-10-21
Abstract
Abstract A photosensitive layer of a liquid crystal light valve is made of a single crystal silicon wafer (14,70) bearing an irregular pattern of diodes (50a,50b, 60a,60b). The diodes are varied in size, shape and location so as to improve resolution, reduce interaction between the diode spatial pattern and the spatial pattern of input data, and, in one embodiment, to eliminate a difficult masking step. A masking step is eliminated by co-depositing a metal vapor and a silicon dioxide vapor to form random islands of cermets (50a,50b), each comprising an island of metal surrounded by a body of silicon dioxide. In other embodiments a pseudo-random mask is employed having an irregular pattern of holes (76) of varied sizes and locations. The mask is employed to photolithographically form an irregular pattern of holes in a silicon dioxide layer (72) laid down over the single crystal silicon (70) and a layer of metal (78) is deposited to provide areas of metal within the irregular pattern of holes in contact with the single crystal silicon layer. Alternatively, the mask with irregular holes may be employed to control areas in which an N-type ion dopant is implanted in a P-type silicon crystal.
Inventors
- 👤 Steven E. Shields
- 👤 Ogden J. Marsh
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 16:41
CPC Classifications
G; G02; G02F; G02F1/00; G02F1/01; G02F1/13; G02F1/133; G02F1/135; G02F1/1354; G02F1/1355; G02F2202/00; G02F2202/10; G02F2202/105
Claims Analysis
Total Claims: 51
Claim 1
Independent Claim
51 words
A liquid crystal light valve comprising: a layered assembly including: a pair of transparent conductive electrodes, a liquid crystal layer, a mirror layer, and a photosensitive layer having an irregular pattern of diodes formed thereon, said liquid crystal, mirror and photosensitive layers all being sandwiched together between said transparent conductive electrodes.
Claim 2
Dependent Claim
51 words
A liquid crystal light valve comprising: a layered assembly including: a pair of transparent conductive electrodes, a liquid crystal layer, a mirror layer, and a photosensitive layer having an irregular pattern of diodes formed thereon, said liquid crystal, mirror and photosensitive layers all being sandwiched together between said transparent conductive electrodes.
Claim 3
Dependent Claim
11 words
The device of claim 1 wherein said diodes have random sizes.
Claim 4
Dependent Claim
11 words
The device of claim 1 wherein said diodes have random shapes.
Claim 5
Dependent Claim
19 words
The device of claim 1 wherein said diodes comprise an array of cermets formed of a metal and an
Claim 6
Dependent Claim
31 words
The device of claim 1 wherein said photosensitive layer comprises a single crystal layer of silicon and wherein said diodes comprise a pattern of Schottky diodes of irregular size and location.
Claim 7
Dependent Claim
46 words
The device of claim 1 wherein said photosensitive layer comprises a single crystal layer of silicon having a silicon dioxide coating, said coating having a pseudo-random pattern of holes therein, said diodes comprising a metal in said holes and in contact with said single crystal silicon.
Claim 8
Dependent Claim
19 words
The device of claim 1 wherein said diodes comprise an array of cermets formed of platinum and silicon dioxide.
Claim 9
Dependent Claim
16 words
The device of claim 1 wherein said diodes comprise an array of diodes of pseudo-random size.
Claim 10
Independent Claim
17 words
The device of claim wherein said diodes comprise an array of diodes of varied shapes and spacing.
Claim 11
Independent Claim
21 words
The device of claim wherein said diodes comprise an array of diodes of generally rectangular configuration and of mutually different sizes.
Claim 12
Dependent Claim
23 words
The device of claim 1 wherein said photosensitive layer comprises a single crystal silicon and said diodes are implanted in a pseudo-random array.
Claim 13
Dependent Claim
48 words
A liquid crystal light valve comprising: successive layers of: a transparent conductive electrode, a photosensitive layer comprising an array of diodes of mutually different configuration, a light blocking layer, a dielectric mirror, a first alignment film, a liquid crystal layer, a second alignment film, and a counter electrode.
Claim 14
Dependent Claim
48 words
A liquid crystal light valve comprising: successive layers of: a transparent conductive electrode, a photosensitive layer comprising an array of diodes of mutually different configuration, a light blocking layer, a dielectric mirror, a first alignment film, a liquid crystal layer, a second alignment film, and a counter electrode.
Claim 15
Dependent Claim
14 words
The device of claim 12 wherein said array includes diodes of mutually different shapes.
Claim 16
Dependent Claim
16 words
The device of claim 12 wherein said array includes diodes of mutually different sizes and shapes.
Claim 17
Dependent Claim
13 words
The device of claim 12 wherein said array includes diodes of pseudo-random sizes.
Claim 18
Dependent Claim
18 words
The device of claim 12 wherein said array comprises a pattern of diodes of random size and shape.
Claim 19
Dependent Claim
16 words
The device of claim 12 wherein said array comprises diodes having a metal to dielectric interface.
Claim 20
Dependent Claim
34 words
The device of claim 12 wherein said photosensitive layer comprises a layer of single crystal silicon having an irregular pattern of discrete areas of metal in contact therewith and forming said array of diodes.
Claim 21
Dependent Claim
10 words
The device of claim 12 wherein the diodes are cermets.
Claim 22
Dependent Claim
10 words
The device of claim 17 wherein the metal is platinum.
Claim 23
Dependent Claim
16 words
The device of claim 12 wherein said diodes are cermets of co-deposited metal and silicon dioxide.
Claim 24
Dependent Claim
15 words
The device of claim 12 wherein said diodes comprise cermets of random size and shape.
Claim 25
Independent Claim
50 words
A method of making a liquid crystal light valve comprising the steps of: providing a dielectric substrate, forming on said substrate an array of diodes of mutually different sizes, and assembling said substrate with layers of electrode layers, a light blocking layer, a mirror layer and a liquid crystal layer.
Claim 26
Independent Claim
50 words
A method of making a liquid crystal light valve comprising the steps of: providing a dielectric substrate, forming on said substrate an array of diodes of mutually different sizes, and assembling said substrate with layers of electrode layers, a light blocking layer, a mirror layer and a liquid crystal layer.
Claim 27
Dependent Claim
20 words
The method of claim 23 wherein said step of forming comprises forming an array of diodes of mutually different shapes.
Claim 28
Dependent Claim
23 words
The method of claim 23 wherein said step of forming comprises forming a random pattern of diodes of different sizes, shapes and locations.
Claim 29
Dependent Claim
22 words
The method of claim 23 wherein said step of forming comprises forming a pseudo-random pattern of diodes of different sizes and locations.
Claim 30
Dependent Claim
16 words
The method of claim 23 wherein said step of forming comprises forming an array of cermets.
Claim 31
Dependent Claim
22 words
The method of claim 23 wherein said step of forming comprises forming a plurality of diodes having a metal to dielectric interface.
Claim 32
Dependent Claim
20 words
The method of claim 23 wherein said step of forming comprises co-depositing a metal and a dioxide on said substrate.
Claim 33
Dependent Claim
24 words
The method of claim 23 wherein said step of forming comprises exposing said substrate to a vapor containing both a metal and silicon dioxide.
Claim 34
Dependent Claim
29 words
The method of claim 23 wherein said substrate is an N- type silicon and wherein said step of forming comprises forming on said substrate an array of Schottky diodes.
Claim 35
Dependent Claim
30 words
The method of claim 23 wherein said step of forming comprises providing a mask having a pseudo-random pattern of apertures, and employing said pattern of apertures to form said diodes.
Claim 36
Dependent Claim
50 words
The method of claim 23 wherein said substrate comprises a single crystal silicon, and wherein said step of forming comprises coating said substrate with silicon dioxide, forming a pseudo-random pattern of holes in said silicon dioxide, and placing a metal in said holes in contact with said single crystal silicon.
Claim 37
Dependent Claim
43 words
The method of claim 23 wherein said step of forming comprises placing on said substrate a mask having a pseudo-random pattern of apertures of mutually different sizes, and forming on said substrate said array of diodes having the pseudo-random pattern of said mask.
Claim 38
Independent Claim
51 words
A method of making a photosensitive layer of a liquid crystal light valve comprising the steps of: providing a doped silicon substate, and simultaneously depositing metallic and insulator material on said substrate to form a pattern of cermets wherein deposited metal is isolated into discrete islands separated by the insulator material.
Claim 39
Independent Claim
51 words
A method of making a photosensitive layer of a liquid crystal light valve comprising the steps of: providing a doped silicon substate, and simultaneously depositing metallic and insulator material on said substrate to form a pattern of cermets wherein deposited metal is isolated into discrete islands separated by the insulator material.
Claim 40
Dependent Claim
22 words
The method of claim 35 wherein said step of depositing comprises exposing said substrate to a vapor of metal and insulator material.
Claim 41
Independent Claim
57 words
A method of making a photosensitive layer of a liquid crystal light valve comprising the steps of: providing a wafer formed of single crystal silicon, forming a layer of silicon dioxide on said wafer, and photolithographically forming in said layer of silicon dioxide a pseudo-random pattern of diodes having varying sizes and an irregular pattern of locations.
Claim 42
Independent Claim
57 words
A method of making a photosensitive layer of a liquid crystal light valve comprising the steps of: providing a wafer formed of single crystal silicon, forming a layer of silicon dioxide on said wafer, and photolithographically forming in said layer of silicon dioxide a pseudo-random pattern of diodes having varying sizes and an irregular pattern of locations.
Claim 43
Independent Claim
59 words
A method of making a photosensitive layer of a liquid crystal light valve comprising the steps of: providing a wafer formed of a single crystal silicon, providing a mask having an irregular pattern of apertures of varying sizes and locations, and employing said mask to form on said wafer an irregular array of diodes of varying sizes and locations.
Claim 44
Independent Claim
59 words
A method of making a photosensitive layer of a liquid crystal light valve comprising the steps of: providing a wafer formed of a single crystal silicon, providing a mask having an irregular pattern of apertures of varying sizes and locations, and employing said mask to form on said wafer an irregular array of diodes of varying sizes and locations.
Claim 45
Dependent Claim
33 words
The method of claim 38 wherein said step of employing said mask comprises positioning the mask upon said wafer and forming said diodes by implantation of ions through the apertures of said mask.
Claim 46
Dependent Claim
56 words
The method of claim 38 wherein said step of employing said mask comprises forming a layer of silicon dioxide on said wafer, employing said mask to form a pattern of holes extending through said layer of silicon dioxide, and depositing metal over said mask and into said holes in contact with said wafer in said holes.
Claim 47
Dependent Claim
44 words
A photosensitive layer for a liquid crystal light valve comprising: a single crystal silicon wafer, a dielectric coating on said wafer, said coating having an irregular pattern of holes extending therethrough to said wafer, said holes containing a metal in contact with said wafer.
Claim 48
Dependent Claim
44 words
A photosensitive layer for a liquid crystal light valve comprising: a single crystal silicon wafer, a dielectric coating on said wafer, said coating having an irregular pattern of holes extending therethrough to said wafer, said holes containing a metal in contact with said wafer.
Claim 49
Dependent Claim
30 words
The photosensitive layer of claim 41 wherein said coating is silicon dioxide and including a metallic platinum coating covering said silicon dioxide and forming the metal contained in said holes.
Claim 50
Dependent Claim
50 words
A photosensitive layer for a liquid crystal light valve comprising: a single crystal silicon wafer, and a plurality of cermets on said wafer formed in an irregular pattern, said cermets comprising small discrete bodies of metal having random size and shape, each said body being surrounded by an insulator material.
Claim 51
Dependent Claim
50 words
A photosensitive layer for a liquid crystal light valve comprising: a single crystal silicon wafer, and a plurality of cermets on said wafer formed in an irregular pattern, said cermets comprising small discrete bodies of metal having random size and shape, each said body being surrounded by an insulator material.
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