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US5208475A Expired / Lapsed US ⏱️ 0.0 years remaining

Electrostatic discharge protection device and a method for simultaneously forming MOS devices with both lightly doped and non lightly doped source and drain regions

Assignee: National Semiconductor Corp
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Filing: 1991-01-30
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Granted: 1993-05-04
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Expires: 2011-01-30
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Abstract

Abstract An electrostatic discharge protection circuit having a non-lightly doped drain MOS device for protecting other lightly doped drain devices on an integrated circuit, and a method of concurrently fabricating both the non lightly doped and lightly doped devices on the substrate of the integrated circuit using substantially the same set of processing steps.

Inventors

  • 👤 Gordon L. Mortensen

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-02 22:29
CPC Classifications
H; H10; H10D; H10D89/00; H10D89/60; H10D89/601; H10D89/611

Claims Analysis

Total Claims: 6
Claim 1
Independent Claim 137 words
An integrated circuit having protection against electrostatic discharge, the integrated circuit comprising: a pin through which input signals to or output signals from said integrated circuit are conducted; at least one lightly doped drain (LDD) transistor coupled to said pin for receiving said input signals or producing said output signals; and a non-LDD metaloxide semiconductor (MOS) transistor coupled to said pin for providing said protection against electostatic discharge for said LDD transistor, said non-LDD MOS transistor having a highly-doped source region, a highly-doped drain region and a gate region, both of said highly-doped source and drain regions being separated from said gate region by an undoped region; wherein, in the event of an electrostatic discharge (ESD) event at the pin, a portion of the ESD is dissipated through the non-LDD MOS transistor thereby protecting said LDD transistor.
Claim 2
Dependent Claim 137 words
An integrated circuit having protection against electrostatic discharge, the integrated circuit comprising: a pin through which input signals to or output signals from said integrated circuit are conducted; at least one lightly doped drain (LDD) transistor coupled to said pin for receiving said input signals or producing said output signals; and a non-LDD metaloxide semiconductor (MOS) transistor coupled to said pin for providing said protection against electostatic discharge for said LDD transistor, said non-LDD MOS transistor having a highly-doped source region, a highly-doped drain region and a gate region, both of said highly-doped source and drain regions being separated from said gate region by an undoped region; wherein, in the event of an electrostatic discharge (ESD) event at the pin, a portion of the ESD is dissipated through the non-LDD MOS transistor thereby protecting said LDD transistor.
Claim 3
Dependent Claim 247 words
The integrated circuit of claim 1, wherein said non-LDD MOS transistor further comprises: a substrate of a first conductivity type; a selectively patterned gate oxide formed on said substrate; a gate formed on said gate oxide, said oxide and said gate defining sidewalls on said substrate; a channel region beneath said gate in said substrate; a first highly doped region comprising said source region, having a conductivity of a second type, and formed in said substrate a first predetermined lateral distance from said sidewalls of said gate and adjacent said channel region, said first highly doped region coupled between said channel region and a pin of the integrated circuit; a first undoped region in said substrate separating said first highly-doped region from a point on said substrate adjoined by one of said sidewalls; a second highly doped region comprising said drain region, having a conductivity of said second type, and formed in said substrate a second predetermined lateral distance from said sidewalls of said gate and adjacent said channel region, said second highly doped region coupled between said channel region and a ground line of the integrated circuit; and a second undoped region in said substrate separating said second highly-doped region from a point on said substrate adjoined by a second of said sidewalls; wherein, in the event of an ESD occurrence at the pin, said first highly doped region, said channel region and said second highly doped region form a conductive path to dissipate the ESD.
Claim 4
Dependent Claim 66 words
The integrated circuit of claim 2, wherein said non-LDD transistor further comprises: a parasitic bipolar transistor having an emitter formed in said first highly doped region, a base formed in said channel region, and a collector formed in said second highly doped region, wherein, in the event of an ESD occurrence at the pin, said parasitic bipolar transistor operates to dissipate a portion of the ESD.
Claim 5
Dependent Claim 19 words
The integrated circuit of claim 1, wherein the LDD transistor have a channel width of 1.0 micron or less.
Claim 6
Dependent Claim 44 words
The integrated circuit of claim 1, further comprising a ground line coupled to said non-LDD MOS transistor, wherein in the event of an ESD occurrence at the pin, a portion of the ESD is dissipated through the non-LDD MOS transistor to said ground line.

References Cited (Backward Citations)

EP0161446A2 Cited
US4692834A Cited
US4692834B1 Cited
US4811155A Cited
US4855620A Cited
US4829350A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1996-05-03 1996-11-02 1997-05-04 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2000-05-03 2000-11-02 2001-05-04 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2004-05-03 2004-11-02 2005-05-04 $7700.00 Window Closed / Lapsed

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