Patent US5208067A successfully refreshed from Google Patents.
US5208067A
Expired / Lapsed
US
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Surface modification of organic materials to improve adhesion
Assignee: International Business Machines Corp
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Filing: 1991-05-16
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Granted: 1993-05-04
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Expires: 2011-05-16
Abstract
Abstract A silicon modified organic surface is roughened by treatment with an oxygen containing plasma. If necessary the organic surface may be silicon-modified by treatment with a silicon containing material prior to plasma treatment. The roughened organic surface provides improved adhesion to other organic surfaces and to deposited metals. Improvements in methods for laminating organic surfaces and for depositing metals on organic surfaces which achieve improved adhesion are disclosed. Structures comprising laminated organic layers or metal deposited on organic surfaces which provide improved adhesion between the organic layers or between the metal and the organic-surface are also disclosed.
Inventors
- 👤 Carol R. Jones
- 👤 Robin A. Susko
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 22:09
CPC Classifications
C; C23; C23C; C23C18/00; C23C18/16; C23C18/18; C23C18/20; C23C18/22; H; H05; H05K; H05K3/00; H05K3/38; H05K3/381
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
59 words
In the method for coating a silicon-modified organic surface with metal comprising electrolessly depositing a layer of metal on said organic surface from a metal containing bath, the improvement comprising, prior to electroless deposition of the metal, subjecting the silicon-modified surface to an oxygen containing plasma, whereby adhesion between the silicon-modified surface and the electrolessly deposited metal is improved.
Claim 2
Dependent Claim
59 words
In the method for coating a silicon-modified organic surface with metal comprising electrolessly depositing a layer of metal on said organic surface from a metal containing bath, the improvement comprising, prior to electroless deposition of the metal, subjecting the silicon-modified surface to an oxygen containing plasma, whereby adhesion between the silicon-modified surface and the electrolessly deposited metal is improved.
Claim 3
Dependent Claim
50 words
The improvement of claim 1 wherein the plasma also contains a fluorine entity selected from the group consisting of CF 4 , C 2 F 6 , CF 3 Cl, SF 6 , CCl 2 F 2 and NF 3 amounts ranging from about 2 to about 70 mole %.
Claim 4
Dependent Claim
16 words
The improvement of claim 2 wherein the plasma contains about 30 mole % CF 4 .
Claim 5
Dependent Claim
34 words
The improvement of claim 1 including the subsequent additional step of subjecting the silicon-modified surface to a predominantly fluorine containing plasma for a time sufficient to substantially remove silicon containing molecules from said surface.
Claim 6
Dependent Claim
20 words
The improvement of claim 4 wherein the fluorine containing plasma comprises more than about 70 mole % CF 4 .
Claim 7
Dependent Claim
17 words
The improvement of claim 1 wherein said silicon-modified surface comprises an organic polymer having silicon containing moieties.
Claim 8
Dependent Claim
22 words
The improvement of claim 1 wherein said silicon-modified surface comprises an organic polymer which has been treated with a silicon containing material.
Claim 9
Dependent Claim
60 words
In a method for coating an organic surface with a metal comprising depositing a metal onto the organic surface, the improvement comprising, prior to metal deposition, a. treating said organic surface with a liquid silicone containing material, and b. subjecting the treated surface to an oxygen containing plasma, whereby adhesion between said organic surface and the deposited metal is improved.
Claim 10
Dependent Claim
60 words
In a method for coating an organic surface with a metal comprising depositing a metal onto the organic surface, the improvement comprising, prior to metal deposition, a. treating said organic surface with a liquid silicone containing material, and b. subjecting the treated surface to an oxygen containing plasma, whereby adhesion between said organic surface and the deposited metal is improved.
Claim 11
Dependent Claim
59 words
In a method for coating an organic surface with a metal comprising depositing a metal onto the organic surface, the improvement comprising, prior to metal deposition, a. treating said organic surface with a hexamethyl disilane liquid, and b. subjecting the treated surface to an oxygen containing plasma, whereby adhesion between said organic surface and the deposited metal is improved.
Claim 12
Dependent Claim
59 words
In a method for coating an organic surface with a metal comprising depositing a metal onto the organic surface, the improvement comprising, prior to metal deposition, a. treating said organic surface with a hexamethyl disilane liquid, and b. subjecting the treated surface to an oxygen containing plasma, whereby adhesion between said organic surface and the deposited metal is improved.
Claim 13
Dependent Claim
114 words
In a method for coating an organic surface with a metal comprising depositing a metal onto the organic surface, the improvement comprising, prior to metal deposition, a. treating said organic surface with a silicon containing material, and b. subjecting the treated surface to plasma containing a fluorine entity and oxygen, wherein said fluorine containing entity is chosen from the group consisting of CF 4 , C 2 F 6 , CF 3 CL, SF 6 , CCL 2 F 2 , and NF 3 , and said plasma contains from about 2 to about 70 mole percent of said fluorine containing entity, whereby adhesion between said organic surface and the deposited metal is improved.
Claim 14
Dependent Claim
114 words
In a method for coating an organic surface with a metal comprising depositing a metal onto the organic surface, the improvement comprising, prior to metal deposition, a. treating said organic surface with a silicon containing material, and b. subjecting the treated surface to plasma containing a fluorine entity and oxygen, wherein said fluorine containing entity is chosen from the group consisting of CF 4 , C 2 F 6 , CF 3 CL, SF 6 , CCL 2 F 2 , and NF 3 , and said plasma contains from about 2 to about 70 mole percent of said fluorine containing entity, whereby adhesion between said organic surface and the deposited metal is improved.
Claim 15
Dependent Claim
67 words
In a method for coating an organic surface with a metal comprising depositing a metal onto the organic surface, the improvement comprising, prior to metal deposition, a. treating said organic surface with a silicon containing material, and b. subjecting the treated surface to a plasma containing oxygen and about 30 mole percent CF 4 , whereby adhesion between said organic surface and the deposited metal is improved.
Claim 16
Dependent Claim
67 words
In a method for coating an organic surface with a metal comprising depositing a metal onto the organic surface, the improvement comprising, prior to metal deposition, a. treating said organic surface with a silicon containing material, and b. subjecting the treated surface to a plasma containing oxygen and about 30 mole percent CF 4 , whereby adhesion between said organic surface and the deposited metal is improved.
Claim 17
Dependent Claim
79 words
In a method for coating an organic surface with a metal comprising depositing a metal onto the organic surface, the improvement comprising, prior to metal deposition, a. treating said organic surface with a silicon containing material, b. subjecting the treated surface to an oxygen containing plasma, and c. thereafter subjecting said surface to a predominantly fluorine containing plasma to substantially remove silicon containing molecules from said surface, whereby adhesion between said organic surface and the deposited metal is improved.
Claim 18
Dependent Claim
79 words
In a method for coating an organic surface with a metal comprising depositing a metal onto the organic surface, the improvement comprising, prior to metal deposition, a. treating said organic surface with a silicon containing material, b. subjecting the treated surface to an oxygen containing plasma, and c. thereafter subjecting said surface to a predominantly fluorine containing plasma to substantially remove silicon containing molecules from said surface, whereby adhesion between said organic surface and the deposited metal is improved.
Claim 19
Dependent Claim
83 words
In a method for coating an organic surface with a metal comprising depositing a metal onto the organic surface, the improvement comprising, prior to metal deposition, a. treating said organic surface wit a silicon containing material, b. subjecting the treated surface to an oxygen containing plasma, and c. thereafter subjecting said surface to a plasma containing about 70 mole percent CF 4 to substantially remove silicon containing molecules from said surface, whereby adhesion between said organic surface and the deposited metal is improved.
Claim 20
Dependent Claim
83 words
In a method for coating an organic surface with a metal comprising depositing a metal onto the organic surface, the improvement comprising, prior to metal deposition, a. treating said organic surface wit a silicon containing material, b. subjecting the treated surface to an oxygen containing plasma, and c. thereafter subjecting said surface to a plasma containing about 70 mole percent CF 4 to substantially remove silicon containing molecules from said surface, whereby adhesion between said organic surface and the deposited metal is improved.
Claim 21
Dependent Claim
67 words
In a method for coating an organic surface with a metal comprising depositing a metal onto the organic surface, the improvement comprising, prior to metal deposition, a. treating said organic surface with a hexamethyl disilane liquid, and b. subjecting the treated surface to a plasma containing oxygen and about 30 mole percent CF 4 , whereby adhesion between said organic surface and the deposited metal is improved.
Claim 22
Dependent Claim
67 words
In a method for coating an organic surface with a metal comprising depositing a metal onto the organic surface, the improvement comprising, prior to metal deposition, a. treating said organic surface with a hexamethyl disilane liquid, and b. subjecting the treated surface to a plasma containing oxygen and about 30 mole percent CF 4 , whereby adhesion between said organic surface and the deposited metal is improved.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1996-05-03 | 1996-11-02 | 1997-05-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-05-03 | 2000-11-02 | 2001-05-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-05-03 | 2004-11-02 | 2005-05-04 | $7700.00 | Window Closed / Lapsed |