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US5206523A Expired / Lapsed US ⏱️ 0.0 years remaining

Microporous crystalline silicon of increased band-gap for semiconductor applications

Assignee: UK Secretary of State for Defence
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Filing: 1991-08-29
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Granted: 1993-04-27
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Expires: 2011-08-29
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Abstract

Abstract A process is disclosed for producing microporous crystalline silicon which has a band-gap substantially increased relative to that of normal crystalline silicon. This process involves the preparation of quantum wires of silicon by means of a chemical attack method carried out on silicon that has been doped such that it conducts electricity substantially via the effective transport of electric charge by means of so-called holes. The microporous crystalline silicon thus produced is in the form of a discrete mass having a bulk-like, interconnected crystalline silicon structure of quantum wires whose band-gap is greater than normal crystalline silicon. Because of this increased band-gap this microporous crystalline silicon may be used as an active element in applications such as tandem solar cells.

Inventors

  • 👤 Ulrich M. Goesele
  • 👤 Volker E. Lehmann

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-27 23:42
CPC Classifications
H; H10; H10P; H10P50/00; H10P50/60; H10P50/61; H10P50/613; B; B82; B82Y; B82Y10/00; H10D; H10D62/00; H10D62/80; H10D62/81; H10D62/812; H10D62/813; H10D62/83; H10F; H10F10/00; H10F10/10; H10F10/19; H10F77/00; H10F77/10; H10F77/12; H10F77/122; H10F77/14; Y; Y02; Y02E; Y02E10/00; Y02E10/50; Y02E10/547

Claims Analysis

Total Claims: 7
Claim 1
Independent Claim 233 words
Microporous crystalline silicon for use in active semiconductor applications, wherein said microporous crystalline silicon is produced on a surface of normal semiconducting non-degenerated p-type crystalline silicon, said microporous crystalline silicon consisting essentially of an interconnected bulk-like quantum wire structure, said bulk-like quantum wire having a side length, and said interconnected bulk-like quantum wire structure having an increased band-gap being produced through a process of chemical attack, said chemical attack being carried out on a non-degenerated p-type silicon substrate, said non-degenerated p-type silicon substrate having a resistivity between 0.1 and 30,000 ohm-centimeters and said chemical attack being carried out under an anodic bias such that said chemical attack is limited by charge supply from the semiconducting non-degenerated p-type crystalline silicon, wherein said chemical attack becomes self-limiting as said attack proceeds due to an increase in the band-gap of said interconnected bulk-like quantum wire structure which occurs as said side length decreases to less than 100 Angstroms wherein said chemical attack which is carried out under an anodic bias is carried out in an electrolyte that contains a concentration of hydrofluoric acid wherein said anodic bias is produced by an applied current density whose numerical value, when measured in milliamperes per square centimeter is such that this current density is less than three times the numerical value of said concentration of hydrofluoric acid present in said electrolyte when said concentration is measured in weight percent.
Claim 2
Dependent Claim 233 words
Microporous crystalline silicon for use in active semiconductor applications, wherein said microporous crystalline silicon is produced on a surface of normal semiconducting non-degenerated p-type crystalline silicon, said microporous crystalline silicon consisting essentially of an interconnected bulk-like quantum wire structure, said bulk-like quantum wire having a side length, and said interconnected bulk-like quantum wire structure having an increased band-gap being produced through a process of chemical attack, said chemical attack being carried out on a non-degenerated p-type silicon substrate, said non-degenerated p-type silicon substrate having a resistivity between 0.1 and 30,000 ohm-centimeters and said chemical attack being carried out under an anodic bias such that said chemical attack is limited by charge supply from the semiconducting non-degenerated p-type crystalline silicon, wherein said chemical attack becomes self-limiting as said attack proceeds due to an increase in the band-gap of said interconnected bulk-like quantum wire structure which occurs as said side length decreases to less than 100 Angstroms wherein said chemical attack which is carried out under an anodic bias is carried out in an electrolyte that contains a concentration of hydrofluoric acid wherein said anodic bias is produced by an applied current density whose numerical value, when measured in milliamperes per square centimeter is such that this current density is less than three times the numerical value of said concentration of hydrofluoric acid present in said electrolyte when said concentration is measured in weight percent.
Claim 3
Dependent Claim 34 words
Microporous crystalline silicon for use in active semiconductor applications as described in claim 1 wherein said microporous crystalline silicon of increased band-gap has a band-gap at least 30 millielectron-volts greater than 1.01 electron volts.
Claim 4
Dependent Claim 24 words
Microporous crystalline silicon for use in active semiconductor applications as described in claim 2, wherein said active semiconductor applications further comprise a solar cell.
Claim 5
Dependent Claim 23 words
Microporous crystalline silicon for use in active semiconductor applications as described in claim 3, wherein said solar cell is a tandem solar cell.
Claim 6
Dependent Claim 112 words
Microporous crystalline silicon for use in active semiconductor applications as described in claim 4 wherein said tandem solar cell consists essentially of a top layer, said top layer consisting essentially of said interconnected bulk-like quantum structure of crystalline silicon of increased band-gap upon which a front, conductive, semitransparent thin film coating has been applied, said interconnected bulk-like quantum structure of microporous crystalline silicon of increased band-gap itself adhering to and being electrically connected with a thin, transparent, electrically conducting film, said thin, transparent, electrically conducting film itself being attached to and electrically connected with a back layer which consists essentially of a substrate that consists essentially of a p/n junction solar cell.
Claim 7
Dependent Claim 25 words
Microporous crystalline silicon for use in active semiconductor applications as described in claim 5 wherein said p/n junction solar cell is a silicon solar cell.

References Cited (Backward Citations)

US4155781A Cited
US4392011A Cited
JPS571265A Cited
US4954182A Cited
JPS57153478A Cited
US4642414A Cited
US4775425A Cited
US4914044A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1996-04-26 1996-10-26 1997-04-27 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2000-04-26 2000-10-26 2001-04-27 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2004-04-26 2004-10-26 2005-04-27 $7700.00 Window Closed / Lapsed

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