US5204144A
Expired / Lapsed
US
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Method for plasma deposition on apertured substrates
Assignee: California Institute of Technology
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Filing: 1991-05-10
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Granted: 1993-04-20
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Expires: 2011-05-10
Abstract
Abstract The substrate in a plasma jet deposition system is provided with structural attributes, such as apertures and/or grooves, that facilitate efficient deposition. Groups of substrates are arranged with respect to the plasma beam in a manner which also facilitates efficient deposition. In addition to increasing the portion of the plasma beam volume which contacts the substrate surface or surfaces, it is advantageous to provide for the efficient evacuation of spent fluids away from the substrate so that fresh plasma containing the operative species can easily and continuously contact the substrate surface.
Inventors
- 👤 Gordon L. Cann
- 👤 Cecil B. Shephard, Jr.
- 👤 Frank X. McKevitt
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:56
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/22; C23C16/26; C23C16/27; C23C16/44; C23C16/458; C23C16/4582; C23C16/4583; C23C16/4584; C23C16/50; C23C16/513
Claims Analysis
Total Claims: 40
Claim 1
Independent Claim
65 words
A method for depositing a substance comprising the steps of: producing a plasma beam containing the constituents of said substance; providing a substrate having a surface in the path of said beam, said substrate having at least one aperture through said surface, such that said beam deposits said substance on said surface and a portion of the beam passes through said at least one aperture.
Claim 2
Independent Claim
65 words
A method for depositing a substance comprising the steps of: producing a plasma beam containing the constituents of said substance; providing a substrate having a surface in the path of said beam, said substrate having at least one aperture through said surface, such that said beam deposits said substance on said surface and a portion of the beam passes through said at least one aperture.
Claim 3
Dependent Claim
18 words
The method as defined by claim 1, wherein said at least one aperture comprises a plurality of apertures.
Claim 4
Dependent Claim
17 words
The method as defined by claim 1, further comprising providing at least one groove in said substrate.
Claim 5
Dependent Claim
23 words
The method as defined by claim 3, wherein an end of said at least one groove terminates at said at least one aperture.
Claim 6
Dependent Claim
24 words
The method as defined by claim 3, wherein said at least one groove comprises a plurality of grooves having minimum depths of 2 mm.
Claim 7
Dependent Claim
26 words
The method as defined by claim 2, further comprising a plurality of grooves in said surface, at least some of said grooves terminating at said apertures.
Claim 8
Dependent Claim
21 words
The method as defined by claim 6, wherein at least some of said grooves terminate at the periphery of said surface.
Claim 9
Dependent Claim
24 words
The method as defined by claim 1, wherein said substance is synthetic diamond and said plasma beam contains a carbonaceous gas and hydrogen gas.
Claim 10
Dependent Claim
24 words
The method as defined by claim 2, wherein said substance is synthetic diamond and said plasma beam contains a carbonaceous gas and hydrogen gas.
Claim 11
Independent Claim
83 words
A method for depositing a substance, comprising the steps of: producing a plasma beam containing the constituents of said substance; providing a substrate having a surface in the path of said beam; and providing at least one groove having a minimum depth of 2 mm in said surface extending generally across said surface, such that said beam deposits said substance on said surface and a portion of said beam is directed by said at least one groove to the periphery of said surface.
Claim 12
Independent Claim
83 words
A method for depositing a substance, comprising the steps of: producing a plasma beam containing the constituents of said substance; providing a substrate having a surface in the path of said beam; and providing at least one groove having a minimum depth of 2 mm in said surface extending generally across said surface, such that said beam deposits said substance on said surface and a portion of said beam is directed by said at least one groove to the periphery of said surface.
Claim 13
Dependent Claim
18 words
The method as defined by claim 10, wherein said at least one groove comprises a plurality of grooves.
Claim 14
Dependent Claim
24 words
The method as defined by claim 11, wherein said substance is synthetic diamond and said plasma beam contains a carbonaceous gas and hydrogen gas.
Claim 15
Independent Claim
75 words
A method for depositing a substance, comprising the steps of: producing a plasma beam containing the constituents of said substance, said beam having an axis and an envelope; and providing a plurality of substrates having surfaces generally along the envelope of the beam and generally parallel to the axis of said beam, such that constituents in the peripheral region of said beam are applied to said surfaces and said substance is deposited on said surfaces.
Claim 16
Independent Claim
75 words
A method for depositing a substance, comprising the steps of: producing a plasma beam containing the constituents of said substance, said beam having an axis and an envelope; and providing a plurality of substrates having surfaces generally along the envelope of the beam and generally parallel to the axis of said beam, such that constituents in the peripheral region of said beam are applied to said surfaces and said substance is deposited on said surfaces.
Claim 17
Dependent Claim
16 words
The method as defined by claim 13, wherein said beam has a generally cylindrical elongated shape.
Claim 18
Dependent Claim
29 words
The method as defined by claim 13, wherein said substrates are spaced apart so that spent fluids of said plasma beam can pass through openings between said substrate surfaces.
Claim 19
Dependent Claim
29 words
The method as defined by claim 14, wherein said substrates are spaced apart so that spent fluids of said plasma beam can pass through openings between said substrate surfaces.
Claim 20
Dependent Claim
33 words
The method as defined by claim 15, wherein, at advancing positions in the beam propagation direction, said surfaces of the substrates are at successively smaller radial distances from the axis of said beam.
Claim 21
Dependent Claim
41 words
The method as defined by claim 17, further comprising providing a further plurality of substrates within said first-mentioned plurality of substrates to obtain an annular column of said beam between said first-mentioned plurality of substrates and said further plurality of substrates.
Claim 22
Dependent Claim
24 words
The method as defined by claim 13, wherein said substance is synthetic diamond and said plasma beam contains a carbonaceous gas and hydrogen gas.
Claim 23
Dependent Claim
24 words
The method as defined by claim 14, wherein said substance is synthetic diamond and said plasma beam contains a carbonaceous gas and hydrogen gas.
Claim 24
Dependent Claim
24 words
The method as defined by claim 15, wherein said substance is synthetic diamond and said plasma beam contains a carbonaceous gas and hydrogen gas.
Claim 25
Dependent Claim
70 words
In a method for depositing a substance, comprising the steps of producing a plasma beam containing the constituents of said substance, and providing a substrate having a surface in the path of said beam; the improvement comprising: a substrate having at least one aperture through said surface, such that said beam deposits said substance on said surface and a portion of said beam passes through said at least one aperture.
Claim 26
Dependent Claim
70 words
In a method for depositing a substance, comprising the steps of producing a plasma beam containing the constituents of said substance, and providing a substrate having a surface in the path of said beam; the improvement comprising: a substrate having at least one aperture through said surface, such that said beam deposits said substance on said surface and a portion of said beam passes through said at least one aperture.
Claim 27
Dependent Claim
18 words
The improvement as defined by claim 22, wherein said at least one aperture comprises a plurality of apertures.
Claim 28
Dependent Claim
24 words
The improvement as defined by claim 22, wherein said substance is synthetic diamond and said plasma beam contains a carbonaceous gas and hydrogen gas.
Claim 29
Dependent Claim
89 words
In a method for depositing a substance, comprising the steps of producing a plasma beam containing the constituents of said substance, and providing a substrate having a surface in the path of said beam; the improvement comprising: a substrate having at least one groove having a minimum depth of 2 mm in said surface extending generally across said surface, such that said beam deposits said substance on said surface and a portion of said beam is directed by said at least one groove to the periphery of said surface.
Claim 30
Dependent Claim
89 words
In a method for depositing a substance, comprising the steps of producing a plasma beam containing the constituents of said substance, and providing a substrate having a surface in the path of said beam; the improvement comprising: a substrate having at least one groove having a minimum depth of 2 mm in said surface extending generally across said surface, such that said beam deposits said substance on said surface and a portion of said beam is directed by said at least one groove to the periphery of said surface.
Claim 31
Dependent Claim
24 words
The improvement as defined by claim 25, wherein said at least one groove comprises a plurality of grooves having minimum depths of 2 mm.
Claim 32
Dependent Claim
24 words
The improvement as defined by claim 25, wherein said substance is synthetic diamond and said plasma beam contains a carbonaceous gas and hydrogen gas.
Claim 33
Independent Claim
80 words
A method for depositing a substance, comprising the steps of: producing a plasma beam having an axis and containing the constituents of said substance; providing a plurality of substrates which cause said beam to propagate radially with respect to said axis, said substrates having surfaces generally along the envelope of said radially propagating beam, such that the constituents in the peripheral region of said radially propagating beam are applied to said surfaces and said substance is deposited on said surfaces.
Claim 34
Independent Claim
80 words
A method for depositing a substance, comprising the steps of: producing a plasma beam having an axis and containing the constituents of said substance; providing a plurality of substrates which cause said beam to propagate radially with respect to said axis, said substrates having surfaces generally along the envelope of said radially propagating beam, such that the constituents in the peripheral region of said radially propagating beam are applied to said surfaces and said substance is deposited on said surfaces.
Claim 35
Dependent Claim
13 words
The method as defined by claim 28, wherein said substrates comprise annular rings.
Claim 36
Dependent Claim
29 words
The method as defined by claim 28, wherein said substrates are spaced apart so that spent fluids of said plasma beam can pass through openings between said substrate surfaces.
Claim 37
Dependent Claim
29 words
The method as defined by claim 29, wherein said substrates are spaced apart so that spent fluids of said plasma beam can pass through openings between said substrate surfaces.
Claim 38
Dependent Claim
24 words
The method as defined by claim 28, wherein said substance is synthetic diamond and said plasma beam contains a carbonaceous gas and hydrogen gas.
Claim 39
Dependent Claim
24 words
The method as defined by claim 29, wherein said substance is synthetic diamond and said plasma beam contains a carbonaceous gas and hydrogen gas.
Claim 40
Dependent Claim
24 words
The method as defined by claim 30, wherein said substance is synthetic diamond and said plasma beam contains a carbonaceous gas and hydrogen gas.
References Cited (Backward Citations)
US4487162A
Cited
US4471003A
Cited
US4691661A
Cited
US4505947A
Cited
JPS5921026A
Cited
JPS5943861A
Cited
US4507588A
Cited
US4585668A
Cited
US4630566A
Cited
JPS63289926A
Cited
US4913090A
Cited
JPH01242141A
Cited
US4987002A
Cited
JPH01312008A
Cited
US5094878A
Cited
US5068871A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-04-19 | 1996-10-19 | 1997-04-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-04-19 | 2000-10-19 | 2001-04-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-04-19 | 2004-10-19 | 2005-04-20 | $7700.00 | Window Closed / Lapsed |