Patent US306080A successfully refreshed from Google Patents.
Patent US5203798A successfully refreshed from Google Patents.
US5203798A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Cleaning apparatus for substrate
Assignee: Hitachi Ltd
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Filing: 1991-06-24
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Granted: 1993-04-20
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Expires: 2011-06-24
Abstract
Abstract A cleaning apparatus capable of substantially complete removal of contaminations generated during the manufacturing process of glass substrates, semiconductor wafers, magnetic disk substrates, magnetic head substrates or the like. The cleaning apparatus comprises a cleaning bath which is greater in cross section than the material to be cleaned and which has an opening portion for insertion of the material to be cleaned, and an ultrasonic transducer attached to the cleaning bath. The apparatus precludes various defects arising from contaminations, and enhances reliability and yield of the substrates manufactured.
Inventors
- 👤 Masahiro Watanabe
- 👤 Mitsuyoshi Otake
- 👤 Megumi Hamano
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 21:13
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0402; B; B08; B08B; B08B3/00; B08B3/04; B08B3/10; B08B3/12; Y; Y10; Y10S; Y10S134/00; Y10S134/902
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
91 words
A cleaning apparatus comprising a cleaning bath having a cross section greater than the cross section of a material to be cleaned, the cleaning bath provided with an opening portion for insertion of the material to be cleaned, means for feeding a cleaning liquid under pressure into the cleaning bath through a piping, and an ultrasonic transducer attached t the cleaning bath, wherein the piping has a cross section greater than the difference between the cross section of the cleaning bath and the cross section of the material to be cleaned.
Claim 2
Dependent Claim
91 words
A cleaning apparatus comprising a cleaning bath having a cross section greater than the cross section of a material to be cleaned, the cleaning bath provided with an opening portion for insertion of the material to be cleaned, means for feeding a cleaning liquid under pressure into the cleaning bath through a piping, and an ultrasonic transducer attached t the cleaning bath, wherein the piping has a cross section greater than the difference between the cross section of the cleaning bath and the cross section of the material to be cleaned.
Claim 3
Dependent Claim
24 words
The cleaning apparatus as set forth in claim 1, wherein the ultrasonic transducer is provided on each of two sides of the cleaning bath.
Claim 4
Dependent Claim
22 words
The cleaning apparatus as set forth in 1, further comprising means for feeding the material to be cleaned into the cleaning bath.
Claim 5
Dependent Claim
22 words
The cleaning apparatus as set forth in 1, further comprising means for feeding the material to be cleaned into the cleaning bath.
Claim 6
Dependent Claim
62 words
The cleaning apparatus as set forth in claim 3, wherein the means for feeding the material to be cleaned into the cleaning bath feeds the material through the opening portion for insertion of the material to be cleaned during operation of at least one of the means for feeding the cleaning liquid under pressure into the cleaning bath and the ultrasonic transducer.
Claim 7
Dependent Claim
48 words
The cleaning apparatus as set forth in claim 4, wherein the means for feeding the material to be cleaned into the cleaning bath feeds the material to be cleaned through the opening portion in a direction opposite to a flow of the cleaning liquid from the cleaning bath.
Claim 8
Dependent Claim
35 words
The cleaning apparatus according to claim 5, wherein the means for feeding the material to be cleaned into the cleaning bath further includes means for withdrawing the material to be cleaned from the cleaning bath.
Claim 9
Dependent Claim
62 words
The cleaning apparatus as set forth in claim 6, wherein the means for feeding the cleaning liquid under pressure into the cleaning bath is disposed so as to feed the cleaning liquid into the cleaning bath in a direction transverse to the direction of feeding of the material to be cleaned into the cleaning bath by the means for feeding the material.
Claim 10
Dependent Claim
33 words
The cleaning apparatus as set forth in claim 7, wherein the cleaning bath is provided with another opening portion for withdrawal of the material from the cleaning bath by the means for withdrawing.
Claim 11
Dependent Claim
143 words
A cleaning apparatus for cleaning a material, comprising a tank for containing a cleaning liquid and including an opening portion for insertion of the material to be cleaned, means including a pump for feeding the cleaning liquid under pressure through a piping and to the tank so as to apply the cleaning liquid under pressure to at least one surface of the material to be cleaned, and at least one ultrasonic transducer attached to the tank, wherein the tank has a cross-section greater than the cross-section of the material to be cleaned and the piping has a cross-section greater than the difference between the cross-section of the tank and the cross-section of the material to be cleaned so as to enable an increased flow velocity of the cleaning liquid in the proximity of the material to be cleaned and an improved cleaning thereof.
Claim 12
Dependent Claim
143 words
A cleaning apparatus for cleaning a material, comprising a tank for containing a cleaning liquid and including an opening portion for insertion of the material to be cleaned, means including a pump for feeding the cleaning liquid under pressure through a piping and to the tank so as to apply the cleaning liquid under pressure to at least one surface of the material to be cleaned, and at least one ultrasonic transducer attached to the tank, wherein the tank has a cross-section greater than the cross-section of the material to be cleaned and the piping has a cross-section greater than the difference between the cross-section of the tank and the cross-section of the material to be cleaned so as to enable an increased flow velocity of the cleaning liquid in the proximity of the material to be cleaned and an improved cleaning thereof.
Claim 13
Dependent Claim
40 words
The cleaning apparatus as set forth in claim 9, wherein the means for feeding the cleaning liquid under pressure through the piping enables application of the liquid under pressure to more than one surface of the material to be cleaned.
Claim 14
Dependent Claim
30 words
The cleaning apparatus as set forth in claim 9, wherein a plurality of ultrasonic transducers are provided, at least respective ultrasonic transducers being provided on opposing sides of the tank.
Claim 15
Dependent Claim
44 words
The cleaning apparatus as set forth in claim 9, wherein the at least one ultrasonic transducer is arranged on the tank so as to have a predetermined angular relation other than 90° and 180° with respect to the opening portion of the cleaning tank.
Claim 16
Dependent Claim
52 words
The cleaning apparatus as set forth in claim 9, further comprising material feeding means for feeding the material to be cleaned into the cleaning tank through the opening portion for insertion of the material to be cleaned in a direction opposite to a flow of the cleaning liquid from the cleaning tank.
Claim 17
Dependent Claim
40 words
The cleaning apparatus as set forth in claim 13, wherein the material feeding means for feeding the material to be cleaned into the tank further includes withdrawing means for withdrawing the material from the tank after cleaning of the material.
Claim 18
Dependent Claim
54 words
The cleaning apparatus as set forth in claim 14, wherein the means for feeding the material to be cleaned into the tank feeds the material to be cleaned during operation of at least one of the means for feeding the cleaning liquid under pressure to the tank and the at least one ultrasonic transducer.
Claim 19
Dependent Claim
28 words
The cleaning apparatus as set forth in claim 15, wherein the tank includes another opening portion for withdrawal of the material from the tank by the withdrawing means.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-04-19 | 1996-10-19 | 1997-04-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-04-19 | 2000-10-19 | 2001-04-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-04-19 | 2004-10-19 | 2005-04-20 | $7700.00 | Window Closed / Lapsed |