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US5200616A Expired / Lapsed US ⏱️ 0.0 years remaining

Environment controllable scanning probe microscope

Assignee: Shimadzu Corp
•
Filing: 1991-12-19
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Granted: 1993-04-06
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Expires: 2011-12-19
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Abstract

Abstract An environment controllable scanning probe microscope (SPM), such as a scanning tunneling microscope (STM), atomic force microscope (AFM), etc., in which the gaseous environment of the sample during the observation is controllable. That is, the gas surrounding the sample can be replaced to a desired one and the pressure can be set to a desired value. The SPM is suited for observing biological samples because biological samples may deteriorate under a reduced pressure and the surface topography at such high magnification is vulnerable to contamination from the environment.

Inventors

  • 👤 Ryohei Kokawa
  • 👤 Osamu Nishikawa
  • 👤 Masahiko Tomitori

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-28 20:58
CPC Classifications
B; B01; B01L; B01L1/00; B01L1/02; B82; B82Y; B82Y35/00; G; G01; G01Q; G01Q30/00; G01Q30/08; G01Q30/12; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/86; Y10S977/871

Claims Analysis

Total Claims: 14
Claim 1
Independent Claim 57 words
A scanning probe microscope comprising: a gas-tight main chamber; a base for mounting a sample in the main chamber; a probe provided in the main chamber for tracing the surface of sample; discharging means for discharging a first gas from the main chamber; and charging means for charging a second gas or gases into the main chamber.
Claim 2
Dependent Claim 57 words
A scanning probe microscope comprising: a gas-tight main chamber; a base for mounting a sample in the main chamber; a probe provided in the main chamber for tracing the surface of sample; discharging means for discharging a first gas from the main chamber; and charging means for charging a second gas or gases into the main chamber.
Claim 3
Dependent Claim 57 words
A scanning probe microscope, as claimed in claim 1, where a sample chamber is connected to the main chamber with a valve between the main chamber and the sample chamber and another valve between the sample chamber and the outside atmosphere, and both the discharging means and the charging means are also connected to the sample chamber.
Claim 4
Dependent Claim 42 words
A scanning probe microscope, as claimed in claim 2, where the main chamber has a transparent portion, and an operation aperture equipped with a gas-tight glove for treating the sample in the main chamber and a shutter for shutting the operation aperture.
Claim 5
Dependent Claim 34 words
A scanning probe microscope, as claimed in claim 3, where both the discharging means and the charging means are further connected to the space between the shutter and the glove of the operation aperture.
Claim 6
Dependent Claim 33 words
A scanning probe microscope, as claimed in claim 4, where a pressure sensor is provided to the main chamber to fill the main chamber with the second gas at a preset pressure value.
Claim 7
Dependent Claim 77 words
A scanning tunneling microscope comprising: a gas-tight main chamber; a base for mounting a sample in the main chamber; a tip provided in the main chamber for causing a tunneling current between itself and the sample; a driver for moving the apex of the tip three dimensionally in relation to the sample; discharging means for discharging a first gas from the main chamber; and charging means for charging a second gas or gases into the main chamber.
Claim 8
Dependent Claim 77 words
A scanning tunneling microscope comprising: a gas-tight main chamber; a base for mounting a sample in the main chamber; a tip provided in the main chamber for causing a tunneling current between itself and the sample; a driver for moving the apex of the tip three dimensionally in relation to the sample; discharging means for discharging a first gas from the main chamber; and charging means for charging a second gas or gases into the main chamber.
Claim 9
Dependent Claim 57 words
A scanning tunneling microscope, as claimed in claim 6, where a sample chamber is connected to the main chamber with a valve between the main chamber and the sample chamber and another valve between the sample chamber and the outside atmosphere, and both the discharging means and the charging means are also connected to the sample chamber.
Claim 10
Dependent Claim 42 words
A scanning tunneling microscope, as claimed in claim 7, where the main chamber has a transparent portion, and an operation aperture equipped with a gas-tight glove for treating the sample in the main chamber and a shutter for shutting the operation aperture.
Claim 11
Dependent Claim 34 words
A scanning tunneling microscope, as claimed in claim 8, where both the discharging means and the charging means are further connected to the space between the shutter and the glove of the operation aperture.
Claim 12
Dependent Claim 33 words
A scanning tunneling microscope, as claimed in claim 9, where a pressure sensor is provided to the main chamber to fill the main chamber with the second gas at a preset pressure value.
Claim 13
Dependent Claim 57 words
An atomic force microscope comprising: a gas-tight main chamber; a base for mounting a sample in the main chamber; a probe provided in the main chamber for tracing the surface of sample; discharging means for discharging a first gas from the main chamber; and charging means for charging a second gas or gases into the main chamber.
Claim 14
Dependent Claim 57 words
An atomic force microscope comprising: a gas-tight main chamber; a base for mounting a sample in the main chamber; a probe provided in the main chamber for tracing the surface of sample; discharging means for discharging a first gas from the main chamber; and charging means for charging a second gas or gases into the main chamber.

References Cited (Backward Citations)

US4362937A Cited
JPS61220620A Cited
US4618767A Cited
JPS6381941A Cited
JPH01213947A Cited
US5029249A Cited
JPH02134502A Cited
US4992660A Cited
US5061850A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1996-04-05 1996-10-05 1997-04-06 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2000-04-05 2000-10-05 2001-04-06 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2004-04-05 2004-10-05 2005-04-06 $7700.00 Window Closed / Lapsed

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