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Indium alloy cold weld bumps

Assignee: OL Security LLC
•
Filing: 1992-06-25
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Granted: 1993-02-16
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Expires: 2012-06-25
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Abstract

Abstract An improved method for indium bonding of surfaces comprising forming indium bumps on a first surface, such as a semiconductor chip. An alloying metal which forms a primary-intermetallic-free alloy with indium is provided on a second surface, such as a substrate to be connected to the pad of the semiconductor chip. The pad and substrate are cold welded at 2000 to 6000 pounds per square inch (1.0×10 5 to 3.1×10 5 mm Hg) to form indium alloy bonds having improved strength, reliability, and toughness.

Inventors

  • 👤 Carlyle L. Helber, Jr.

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-10 02:21
CPC Classifications
H; H10; H10W; H10W72/00; H10W72/20; H10W72/251; H10W72/252

Claims Analysis

Total Claims: 16
Claim 1
Independent Claim 157 words
A method for indium bonding of surfaces comprising the steps of: (a) providing an indium bump on a first surface; (b) providing a second surface having an alloying metal located thereon wherein said alloying metal is capable of forming an alloy with indium when cold welded wherein said alloy is substantially free of a primary intermetallic phase; and (c) pressing said indium bump located on said first surface against said alloying metal located on said second surface at a pressure within the range of about 2000 to 6000 psi (1.0×10 5 to 3.1×10 5 mm Hg) at a temperature within the range of about 20° C. to 150° C. for a sufficient period of time to form said alloy of said indium and said alloying metal to thereby bond said indium bump to said second surface to provide a substantially durable cold weld electrical connection having a bond interface which is substantially free of primary intermetallic phase.
Claim 2
Independent Claim 157 words
A method for indium bonding of surfaces comprising the steps of: (a) providing an indium bump on a first surface; (b) providing a second surface having an alloying metal located thereon wherein said alloying metal is capable of forming an alloy with indium when cold welded wherein said alloy is substantially free of a primary intermetallic phase; and (c) pressing said indium bump located on said first surface against said alloying metal located on said second surface at a pressure within the range of about 2000 to 6000 psi (1.0×10 5 to 3.1×10 5 mm Hg) at a temperature within the range of about 20° C. to 150° C. for a sufficient period of time to form said alloy of said indium and said alloying metal to thereby bond said indium bump to said second surface to provide a substantially durable cold weld electrical connection having a bond interface which is substantially free of primary intermetallic phase.
Claim 3
Dependent Claim 23 words
The method of Claim 1 wherein said alloying metal is selected from the group consisting of elemental metals, metal alloys, and metal mixtures.
Claim 4
Dependent Claim 23 words
The method of Claim 2 wherein said elemental metal is selected from the group consisting of aluminum, cadmium, gallium, germanium, silicon, and zinc.
Claim 5
Dependent Claim 24 words
The method of Claim 2 wherein said alloying metal comprises indium bonded to a metal selected from the group consisting of said elemental metals.
Claim 6
Dependent Claim 21 words
The method of Claim 2 wherein said alloying metal comprises one or more metals bonded to a metal other than indium.
Claim 7
Dependent Claim 26 words
The method of Claim 1 wherein said alloying metal forms a secondary intermetallic phase with said indium which is substantially free of said primary intermetallic phase.
Claim 8
Dependent Claim 65 words
The method of Claim 1 wherein said alloying metal has the property of forming an unwanted surface oxide layer and said method further comprises, prior to said pressing, providing said alloying metal with a thin adherent coating of a chosen metal to control the formation of said surface oxide and to thereby enable the formation of said alloy of said indium and said alloying metal.
Claim 9
Dependent Claim 21 words
The method of Claim 7 wherein said chosen metal is selected from the group consisting of zinc, lead, cadmium, and tin.
Claim 10
Dependent Claim 44 words
The method of Claim 1 further comprising, after said pressing, heating to a temperature within the range of about 25° C. to 150° C. for about 1 to 120 hours to enhance the formation of said alloy of said indium and said alloying metal.
Claim 11
Dependent Claim 16 words
The method of Claim 1 wherein said first surface comprises a pad on a semiconductor chip.
Claim 12
Dependent Claim 19 words
The method of Claim 1 wherein said second surface is a substrate wherein said substrate has a bonding pad.
Claim 13
Dependent Claim 24 words
The method of Claim 1 wherein said alloying metal on said second surface is in the form of a bump on said second surface.
Claim 14
Dependent Claim 52 words
The method of Claim 1 wherein said alloying metal on said second surface is in the form of a smooth plane on said second surface, said smooth plane being parallel to a plane formed by said deposited indium on said first surface when said second surface is juxtaposed to said first surface.
Claim 15
Dependent Claim 13 words
The method of Claim 1 wherein said second surface comprises said alloying metal.
Claim 16
Dependent Claim 17 words
A device formed by the method of Claim 1 comprising a semiconductor chip connected to a substrate.

References Cited (Backward Citations)

US4067104A Cited
US4159075A Cited
US4431711A Cited
US4740700A Cited
US4865245A Cited
US4817850A Cited
US4930001A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1996-02-16 1996-08-17 1997-02-16 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2000-02-16 2000-08-17 2001-02-16 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2004-02-16 2004-08-17 2005-02-16 $7700.00 Window Closed / Lapsed

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