US5182452A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for determining the presence of thin insulating films
Assignee: Panasonic Holdings Corp
•
Filing: 1991-10-15
•
Granted: 1993-01-26
•
Expires: 2011-10-15
Abstract
Abstract There is provided a method for determining the presence of an insulating film on the surface of an electrically conductive material. In this method, an electrically conductive probe is brought into contact with the surface of a specimen, and a voltage is applied between the probe and the surface of the specimen. A tunneling current which flows through the probe is detected and amplified, while controlling the distance between the probe and the surface of the specimen to ensure a substantially constant tunneling current.
Inventors
- 👤 Masaaki Niwa
- 👤 Shozo Okada
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 14:06
CPC Classifications
G; G01; G01Q; G01Q60/00; G01Q60/10; G01Q60/16; B; B82; B82Y; B82Y35/00; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/852; Y10S977/854
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
125 words
A method for determining the presence of an insulating film on the surface of an electrically conductive material as a specimen, comprising the steps of: bringing an electrically conductive probe and said electrically conductive material sufficiently close to that electron clouds smearing out around surface atoms included in said electrically conductive probe and electron clouds smearing out around surface atoms included in said electrically conductive material are connected together; applying a voltage between the probe and the surface of said electrically conductive material sufficient to establish a tunneling current; and detecting and amplifying said tunneling current which flows through said probe, while controlling the distance between the probe and the surface of the electrically conductive material to ensure that said tunneling current is substantially constant.
Claim 2
Independent Claim
125 words
A method for determining the presence of an insulating film on the surface of an electrically conductive material as a specimen, comprising the steps of: bringing an electrically conductive probe and said electrically conductive material sufficiently close to that electron clouds smearing out around surface atoms included in said electrically conductive probe and electron clouds smearing out around surface atoms included in said electrically conductive material are connected together; applying a voltage between the probe and the surface of said electrically conductive material sufficient to establish a tunneling current; and detecting and amplifying said tunneling current which flows through said probe, while controlling the distance between the probe and the surface of the electrically conductive material to ensure that said tunneling current is substantially constant.
Claim 3
Independent Claim
82 words
A method for determining the presence of an insulating film on the surface of an electrically conductive material as a specimen, comprising the steps of: bringing an electrically conductive probe into contact with the surface of said specimen; applying a voltage between the probe and the surface of said specimen; and detecting and amplifying a tunneling current which flows through said probe, while controlling the distance between the probe and the surface of the specimen to ensure a substantially constant tunneling current.
Claim 4
Independent Claim
82 words
A method for determining the presence of an insulating film on the surface of an electrically conductive material as a specimen, comprising the steps of: bringing an electrically conductive probe into contact with the surface of said specimen; applying a voltage between the probe and the surface of said specimen; and detecting and amplifying a tunneling current which flows through said probe, while controlling the distance between the probe and the surface of the specimen to ensure a substantially constant tunneling current.
Claim 5
Dependent Claim
49 words
A method according to claim 2, wherein the presence of an insulating film on the bottom surface of a contact hole which is formed on a dry-etched substrate of semiconductor devices is determined, thereby obtaining any specific factor which causes an increase in the current through said contact hole.
References Cited (Backward Citations)
US4616340A
Cited
US4902892A
Cited
US4906840A
Cited
US4988635A
Cited
US5015850A
Cited
US4965865A
Cited
US4954704A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-01-26 | 1996-07-27 | 1997-01-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-01-26 | 2000-07-27 | 2001-01-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-01-26 | 2004-07-27 | 2005-01-26 | $7700.00 | Window Closed / Lapsed |