Patent US5177351A successfully refreshed from Google Patents.
US5177351A
Expired / Lapsed
US
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Method and apparatus for determining the minority carrier diffusion length from linear constant photon flux photovoltage measurements
Assignee: Individual
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Filing: 1990-11-21
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Granted: 1993-01-05
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Expires: 2010-11-21
Abstract
Abstract A device for measuring photoinduced electrical properties at a semiconductor sample surface. The device includes an analysis probe having a means for directing a light beam to a defined portion of a semiconductor substrate surface. A probe electrode is provided for detecting a photo-induced electrical signal from the defined portion of the semiconductor substrate, and a light blocking means is carried by the probe for substantially blocking stray light from the defined portion of the substrate surface. A positioning means for positioning the semiconductor and device with respect to each other for measurement of the photo-induced electrical property at a desired defined portion of the semiconductor substrate surface. The positioning means may be adapted to position respectively the wafer and probe without contact between the wafer and probe and to position the wafer with respect to a chuck without contacting the chuck.
Inventors
- 👤 Jacek J. Lagowski
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 05:21
CPC Classifications
G; G01; G01R; G01R31/00; G01R31/26; G01R31/265; G01R31/2656
Claims Analysis
Total Claims: 31
Claim 1
Independent Claim
106 words
A device for measuring electrical properties of a semiconductor sample, comprising: an analysis probe for directing a light beam to a defined portion of a semiconductor substrate surface, said probe including: a probe electrode for detecting a photo-induced electrical signal from said defined portion of said semiconductor substrate, and a light blocking means, carried by said probe for substantially blocking stray light from said defined portion of said substrate surface during said detecting, and said device further including a positioning means of relative positioning of said semiconductor substrate and probe for measurement of said electrical property at a desired defined portion of said semiconductor substrate surface.
Claim 2
Independent Claim
106 words
A device for measuring electrical properties of a semiconductor sample, comprising: an analysis probe for directing a light beam to a defined portion of a semiconductor substrate surface, said probe including: a probe electrode for detecting a photo-induced electrical signal from said defined portion of said semiconductor substrate, and a light blocking means, carried by said probe for substantially blocking stray light from said defined portion of said substrate surface during said detecting, and said device further including a positioning means of relative positioning of said semiconductor substrate and probe for measurement of said electrical property at a desired defined portion of said semiconductor substrate surface.
Claim 3
Dependent Claim
28 words
The device of claim 1 wherein said positioning means is adapted to position respectively said semiconductor substrate and probe for measurement without contact between said wafer and probe.
Claim 4
Dependent Claim
36 words
The device of claim 1 or 2 further including a supporting chuck for said semiconductor substrate and a nonconductive chuck positioner adapted to position said semiconductor substrate with respect to said chuck without contacting said chuck.
Claim 5
Dependent Claim
31 words
The device of claim 3 wherein the capacitance between the probe and semiconductor substrate, D pw is much less than the capacitance between the semiconductor substrate and chuck, C wc .
Claim 6
Dependent Claim
17 words
The apparatus of claim 4 wherein Cpw is at least one order of magnitude smaller than Cwc.
Claim 7
Dependent Claim
22 words
The device of claim 2 wherein said probe includes a ground electrode adapted to face and capacitively couple to said substrate surface.
Claim 8
Dependent Claim
28 words
The device of claim 6 wherein the surface area of said ground electrode is about 10 times or more greater than the surface area of said probe electrode.
Claim 9
Dependent Claim
12 words
The device of claim 6 including a supporting member that is nonconducting.
Claim 10
Dependent Claim
19 words
The device of claim 3 wherein said semiconductor substrate is positioned above a chuck having a light absorbing surface.
Claim 11
Dependent Claim
31 words
The device of claim 1 wherein said light blocking means comprises a light blocking surface adjacent said semiconductor substrate surface and said light blocking surface is substantially smaller than said substrate.
Claim 12
Dependent Claim
25 words
The device of claim 10 wherein the light blocking surface adjacent said semiconductor substrate disposed with respect to said light beam produced by said probe.
Claim 13
Dependent Claim
32 words
The device of claim 11 wherein the width of said light blocking surface is at least about three times the width of said light beam impinged upon the surface of said substrate.
Claim 14
Dependent Claim
54 words
The device of claim 12 wherein said positioning means is adapted to position respectively said semiconductor substrate and probe without contact between said wafer and probe and the position of said probe above said wafer is less than about 2 times or less than the width of said light beam impinged upon the surface.
Claim 15
Dependent Claim
39 words
The device of claim 2 or 11 wherein said beam directed by said probe passes through said probe electrode which is semi-transparent to said beam and comprises a rigid dielectric member having a conductive coating facing said semiconductor substrate.
Claim 16
Dependent Claim
11 words
The device of claim 14 wherein said dielectric member is quartz.
Claim 17
Dependent Claim
21 words
The device of claim 1 further comprising a biased housing for soft contact of said probe to said semiconductor substrate surface.
Claim 18
Dependent Claim
31 words
The device of claim 6 wherein the following condition is satisfied: S.sub.p <<S.sub.G where S p is the probe electrode surface area and S G is the ground electrode surface area.
Claim 19
Dependent Claim
28 words
The device of claim 17 wherein the surface area of said ground electrode is about 10 times or more greater than the surface area of said probe electrode.
Claim 20
Dependent Claim
15 words
The device of claim 18 including a supporting member for said substrate that is nonconducting.
Claim 21
Dependent Claim
30 words
The device of claim 19 wherein said light blocking means comprises a light blocking surface adjacent said semiconductor substrate and said light blocking surface is substantially smaller than said substrate.
Claim 22
Dependent Claim
27 words
The device of claim 20 wherein the light blocking surface adjacent said semiconductor substrate is symmetrically disposed with respect to said light beam produced by said probe.
Claim 23
Dependent Claim
31 words
The device of claim 21 wherein the width of said light blocking surface is at least three times the width of said light beam impinged upon the surface of said substrate.
Claim 24
Dependent Claim
52 words
The device of claim 22 wherein said positioning means is adapted to position respectively said semiconductor substrate and probe without contact between said wafer and probe and the position of said probe above said wafer is about 2 times or less than the width of said light beam impinged upon the surface.
Claim 25
Independent Claim
39 words
The device of any one of claims 1, 2, 6, 11, 17 or 23 wherein said probe electrode is semi-transparent to said beam directed by said probe and said beam directed by said probe passes through said probe electrode.
Claim 26
Independent Claim
99 words
A method for measurement of electrical properties of a semiconductor sample, comprising: providing an analysis probe for directing a light beam to a defined portion of a semiconductor substrate surface, said probe including a probe electrode for detecting a photo-induced electrical signal from said defined portion of said semiconductor substrate surface, and a light blocking means, carried by said probe for substantially blocking stray light from said defined portion of said substrate surface during said detecting, and relatively positioning said semiconductor and probe for measurement of said electrical property at a desired defined portion of said semiconductor substrate surface.
Claim 27
Independent Claim
99 words
A method for measurement of electrical properties of a semiconductor sample, comprising: providing an analysis probe for directing a light beam to a defined portion of a semiconductor substrate surface, said probe including a probe electrode for detecting a photo-induced electrical signal from said defined portion of said semiconductor substrate surface, and a light blocking means, carried by said probe for substantially blocking stray light from said defined portion of said substrate surface during said detecting, and relatively positioning said semiconductor and probe for measurement of said electrical property at a desired defined portion of said semiconductor substrate surface.
Claim 28
Dependent Claim
23 words
The method of claim 25 wherein said positioning comprising positioning respectively said semiconductor substrate and probe without contact between said wafer and probe.
Claim 29
Dependent Claim
22 words
The method of claim 26 wherein said positioning comprises positioning said semiconductor substrate with respect to a chuck without contacting said chuck.
Claim 30
Dependent Claim
44 words
The method of claim 27 comprising constructing said probe and positioning said probe and semiconductor substrate such that the capacitance between the probe and semiconductor substrate, C pw , is much less than the capacitance between the semiconductor substrate and chuck, C wc .
Claim 31
Dependent Claim
28 words
The method of claim 25 including constructing said probe to include a ground electrode adapted to face said substrate surface, and using a nonconducting support for said substrate.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-01-05 | 1996-07-06 | 1997-01-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-01-05 | 2000-07-06 | 2001-01-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-01-05 | 2004-07-06 | 2005-01-05 | $7700.00 | Window Closed / Lapsed |