US5174876A
Expired / Lapsed
US
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Method of making an optical component by ion implantation
Assignee: Forschungszentrum Jülich
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Filing: 1990-12-14
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Granted: 1992-12-29
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Expires: 2010-12-14
Abstract
Abstract An optical electronic component, in which strip waveguides of limited depth and lateral width are formed in undoped dielectric substrate, e.g. an undoped crystal, by implantation of rare-earch ions or ions of transition metals, preferably laser-active ions with energies of 50 keV to 10 MeV.
Inventors
- 👤 Christoph Buchal
- 👤 Wolfgang Sohler
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 06:43
CPC Classifications
G; G02; G02B; G02B6/00; G02B6/10; G02B6/12; G02B6/13; G02B6/134; G02B6/1347
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
114 words
In a process for making an optical component, the improvement which comprises the steps of: (a) forming in a dielectric optical component substrate over a laterally limited region thereof and in a generally elongate pattern by doping said substrate a strip light waveguide from said limited region of said substrate; and (b) additionally implanting in said waveguide over a limited length of said string light waveguide rare-earth ions or ions of a transition metal which are laser-active in the presence of the material of the waveguide to form a laser from said limited length of the waveguide, the implanting of the laser-active ions being effected at an energy of 50 KeV to 10 MeV.
Claim 2
Dependent Claim
114 words
In a process for making an optical component, the improvement which comprises the steps of: (a) forming in a dielectric optical component substrate over a laterally limited region thereof and in a generally elongate pattern by doping said substrate a strip light waveguide from said limited region of said substrate; and (b) additionally implanting in said waveguide over a limited length of said string light waveguide rare-earth ions or ions of a transition metal which are laser-active in the presence of the material of the waveguide to form a laser from said limited length of the waveguide, the implanting of the laser-active ions being effected at an energy of 50 KeV to 10 MeV.
Claim 3
Dependent Claim
31 words
The improvement defined in claim 1, further comprising the step of masking said substrate with a mask impenetrable by said ions to define said region and said pattern on said substrate.
Claim 4
Dependent Claim
29 words
The improvement defined in claim 1 wherein the implantation of said substrate with said ions is carried out at a substrate temperature of substantially 300 K. to 800 K.
Claim 5
Dependent Claim
29 words
The improvement defined in claim 1 wherein the implantation of said substrate with said ions is carried out at a substrate temperature of substantially 77 K. to 300 K.
Claim 6
Dependent Claim
34 words
The improvement defined in claim 1, further comprising the step of subjecting said substrate to tempering at a heating temperature of 800 K. to 1800 K. following implantation of said ions in said substrate.
Claim 7
Dependent Claim
18 words
The improvement defined in claim 1, further comprising additionally implanting light ions in said region of said substrate.
Claim 8
Dependent Claim
22 words
The improvement defined in claim 6 wherein said light ions are selected from the group which consist of hydrogen, helium and oxygen.
Claim 9
Dependent Claim
36 words
The improvement defined in claim 1 wherein a plurality of spaced apart regions of said substrate are implanted with said ions at said energy to form spaced apart and separate strip light waveguides in said substrate.
Claim 10
Dependent Claim
19 words
The improvement defined in claim 8 wherein the spaced apart regions are implanted with different ones of said ions.
References Cited (Backward Citations)
DE2614859A1
Cited
US4521443A
Cited
US4886587A
Cited
US4787689A
Cited
US4840816A
Cited
US4938836A
Cited
EP0380138A2
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-12-29 | 1996-06-29 | 1996-12-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-12-29 | 2000-06-29 | 2000-12-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-12-29 | 2004-06-29 | 2004-12-29 | $7700.00 | Window Closed / Lapsed |