US5173754A
Expired / Lapsed
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Integrated circuit device with gate in sidewall
Assignee: Micron Technology Inc
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Filing: 1992-02-03
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Granted: 1992-12-22
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Expires: 2012-02-03
Abstract
Abstract An SRAM wafer is conventionally fabricated through the definition of the gate poly. The PMOS oxide is then applied in a layer that uniformly covers the surface and sidewalls of the gate poly, then the interpoly contacts are patterned and etched and the NMOS S/D's are implanted. The PMOS load poly is deposited, again in a layer that uniformly covers the PMOS oxide over the surface and sidewalls of the gate poly. Oxide spacers are formed on the PMOS poly along the gate poly sidewalls, and a P+ implantation forms the PMOS sources and drains. The oxide spacers protect an L-shaped region along the poly gate sidewall from the P+ implant, thus defining PMOS load channels on either side of the gate poly that are gated by the gate poly sidewalls. The foot of the L on one side and the extension of the L above the gate poly on the other create gate/drain offsets that reduce I(off). Optionally, a gate poly/oxide stack may be used to enlarge one of the gate/drain offsets.
Inventors
- 👤 Monte Manning
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 01:23
CPC Classifications
H; H10; H10B; H10B10/00; H10B10/12; Y; Y10; Y10S; Y10S257/00; Y10S257/90; Y10S257/903
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
141 words
An integrated circuit comprising: a semiconducting substrate defining a plane; transistor gate means for providing a gating function, said gate means having a first surface essentially parallel to the plane of said substrate and a sidewall essentially perpendicular to said first surface; an insulating layer extending over at least a portion of said first surface and said sidewall; a transistor semiconducting layer extending over at least a portion of said insulating layer, said transistor semiconducting layer having transistor source, drain and channel regions, said transistor channel region being essentially parallel to said sidewall and gated by said sidewall of said transistor gate means; and offset means for providing an offset between said gate means and one of said drain region and said source region, said offset means comprising another insulating layer formed on said first surface of said transistor gate means.
Claim 2
Dependent Claim
141 words
An integrated circuit comprising: a semiconducting substrate defining a plane; transistor gate means for providing a gating function, said gate means having a first surface essentially parallel to the plane of said substrate and a sidewall essentially perpendicular to said first surface; an insulating layer extending over at least a portion of said first surface and said sidewall; a transistor semiconducting layer extending over at least a portion of said insulating layer, said transistor semiconducting layer having transistor source, drain and channel regions, said transistor channel region being essentially parallel to said sidewall and gated by said sidewall of said transistor gate means; and offset means for providing an offset between said gate means and one of said drain region and said source region, said offset means comprising another insulating layer formed on said first surface of said transistor gate means.
Claim 3
Dependent Claim
48 words
An integrated circuit as in claim 1 wherein said transistor gate means has first and second sidewalls, said semiconducting layer has first and second channel regions, and said first channel region is gated by said first sidewall while said second channel region is gated by said second sidewall.
Claim 4
Dependent Claim
40 words
An integrated circuit as in claim 1 wherein said offset means further comprises a portion of said semiconducting layer that has the same doping as and is continuous with said channel region but is not gated by said gate means.
Claim 5
Dependent Claim
173 words
An integrated circuit comprising a first transistor and a second transistor, said circuit comprising: a semiconducting substrate containing first transistor source, drain, and channel regions; a first insulating layer extending over at least a portion of said first transistor channel region; first transistor gate means for gating said first transistor channel region, said gate means having a first surface and a sidewall essentially perpendicular to said first surface; a second insulating layer extending over at least a portion of said first surface and said sidewall; a second transistor semiconducting layer extending over at least a portion of said second insulating layer, said second transistor semiconducting layer having second transistor course, drain and channel regions, said second transistor channel region being essentially parallel to said sidewall and gated by said sidewall of said first transistor gate means; and offset means for offsetting one of said second transistor drain region and said second transistor source region from said gate means, said offset means comprising a third insulating layer formed on said first transistor gate means.
Claim 6
Dependent Claim
173 words
An integrated circuit comprising a first transistor and a second transistor, said circuit comprising: a semiconducting substrate containing first transistor source, drain, and channel regions; a first insulating layer extending over at least a portion of said first transistor channel region; first transistor gate means for gating said first transistor channel region, said gate means having a first surface and a sidewall essentially perpendicular to said first surface; a second insulating layer extending over at least a portion of said first surface and said sidewall; a second transistor semiconducting layer extending over at least a portion of said second insulating layer, said second transistor semiconducting layer having second transistor course, drain and channel regions, said second transistor channel region being essentially parallel to said sidewall and gated by said sidewall of said first transistor gate means; and offset means for offsetting one of said second transistor drain region and said second transistor source region from said gate means, said offset means comprising a third insulating layer formed on said first transistor gate means.
Claim 7
Dependent Claim
23 words
An integrated circuit as in claim 4 wherein said first transistor is an N-channel transistor and said second transistor is a P-channel transistor.
Claim 8
Dependent Claim
42 words
An integrated circuit as in claim 4 wherein said offset means further comprises a portion of said second transistor semiconducting layer that has the same doping as and is continuous with said channel region but is not gated by said gate means.
Claim 9
Dependent Claim
24 words
An integrated circuit as in claim 4 wherein said first transistor gate means comprises doped polysilicon and said third insulating layer comprises silicon dioxide.
Claim 10
Dependent Claim
179 words
A high-density SRAM integrated circuit having a first transistor and a second transistor, said integrated circuit comprising: a semiconductor substrate having first transistor source, drain, and channel regions formed in it; a first insulating layer extending over at least said first transistor channel region; a first transistor gate means for gating said first transistor channel region, said gate means having a first surface and a sidewall essentially perpendicular to said first surface; a second insulating layer ext ending over at least a portion of said first surface and said sidewall; a second transistor semiconducting layer extending over at least a portion of said second insulating layer, said second transistor semiconducting layer having second transistor source, drain and channel regions, said second transistor channel region being essentially parallel to said sidewall and gated by said sidewall of said first transistor gate means; and offset means for offsetting one of said second transistor drain region and said second transistor source region from said gate means, said offset means comprising a third insulating layer formed on the said first transistor gate means.
Claim 11
Dependent Claim
179 words
A high-density SRAM integrated circuit having a first transistor and a second transistor, said integrated circuit comprising: a semiconductor substrate having first transistor source, drain, and channel regions formed in it; a first insulating layer extending over at least said first transistor channel region; a first transistor gate means for gating said first transistor channel region, said gate means having a first surface and a sidewall essentially perpendicular to said first surface; a second insulating layer ext ending over at least a portion of said first surface and said sidewall; a second transistor semiconducting layer extending over at least a portion of said second insulating layer, said second transistor semiconducting layer having second transistor source, drain and channel regions, said second transistor channel region being essentially parallel to said sidewall and gated by said sidewall of said first transistor gate means; and offset means for offsetting one of said second transistor drain region and said second transistor source region from said gate means, said offset means comprising a third insulating layer formed on the said first transistor gate means.
Claim 12
Dependent Claim
33 words
A high density SRAM integrated circuit as in claim 8 wherein there are two of said sidewalls and two of said second transistor channel regions, each channel region gated by a different sidewall.
Claim 13
Dependent Claim
25 words
A high density SRAM integrated circuit as in claim 9 wherein said second transistor source, drain, and channel regions are self-aligned with said gate means.
Claim 14
Dependent Claim
43 words
A high-density SRAM integrated circuit as in claim 8 wherein said offset means further comprises a portion of said second semiconducting layer that has the same doping as and is continuous with said channel region but is not gated by said gate means.
Claim 15
Dependent Claim
35 words
A high density SRAM as in claim 8 wherein said second transistor drain region contacts said first transistor drain region forming an N-P junction diode, and wherein the junction resides with the second transistor polysilicon.
Claim 16
Dependent Claim
21 words
An integrated circuit as in claim 1 wherein said offset means provides and offset between said gate and said drain region.
Claim 17
Dependent Claim
22 words
An integrated circuit as in claim 1 wherein said offset means provides and offset between said gate means and said source region.
Claim 18
Dependent Claim
24 words
An integrated circuit as in claim 4 wherein said offset means provides an offset between said gate means and said second transistor drain region.
Claim 19
Dependent Claim
24 words
An integrated circuit as in claim 4 wherein said offset means provides and offset between said gate means and said second transistor source region.
Claim 20
Dependent Claim
26 words
A high-density SRAM integrated circuit as in claim 8 wherein said offset means provides and offset between said gate means and said second transistor drain region.
Claim 21
Dependent Claim
26 words
A high-density SRAM integrated circuit as in claim 8 wherein said offset means provides and offset between said gate means and said second transistor source region.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1995-12-22 | 1996-06-22 | 1996-12-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-12-22 | 2000-06-22 | 2000-12-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-12-22 | 2004-06-22 | 2004-12-22 | $7700.00 | Window Closed / Lapsed |