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US5168542A
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Low loss channel waveguide and method for making the same
Assignee: CLIFORNIA OFFICE OF TECHNOLOGY TRANSFER THE, University of, Regents of
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Filing: 1991-10-09
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Granted: 1992-12-01
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Expires: 2011-10-09
Abstract
Abstract Optical waveguides for use in planar structures, such as dielectric layers in multichip modules exhibit low optical loss. The optical waveguides are provided by methods that involve doping of the dielectric layers. The waveguides can be used to interconnect electronic elements and transmit signals at speeds that are compatible with high speed electronic elements.
Inventors
- 👤 Kishore K. Chakravorty
- 👤 Chung-Ping Chien
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 09:32
CPC Classifications
G; G02; G02B; G02B6/00; G02B6/10; G02B6/12; G02B6/13; G02B6/134; G02B6/1342; G02B2006/12035; G02B2006/12069; G02B2006/12076
Claims Analysis
Total Claims: 36
Claim 1
Independent Claim
87 words
A method for providing a channel for guiding electromagnetic waves in a substrate of a dielectric material, the method comprising the steps: selecting a dopant to alter the index of refraction of the dielectric material; selecting a solvent for introducing the dopant into the dielectric material by solvent diffusion; treating the dielectric material to render portions of the dielectric material resistant to diffusion by the solvent; and introducing the dopant into portions of the dielectric layer that have not been rendered resistant to diffusion by the solvent.
Claim 2
Independent Claim
87 words
A method for providing a channel for guiding electromagnetic waves in a substrate of a dielectric material, the method comprising the steps: selecting a dopant to alter the index of refraction of the dielectric material; selecting a solvent for introducing the dopant into the dielectric material by solvent diffusion; treating the dielectric material to render portions of the dielectric material resistant to diffusion by the solvent; and introducing the dopant into portions of the dielectric layer that have not been rendered resistant to diffusion by the solvent.
Claim 3
Independent Claim
60 words
A method for providing a channel for guiding electromagnetic waves in a substrate of a dielectric material, the method comprising the steps: exposing portions of the dielectric material to radiation through a mask; and introducing a dopant into portions of the dielectric material that were not exposed to radiation, the dopant altering the index of refraction of the dielectric material.
Claim 4
Independent Claim
60 words
A method for providing a channel for guiding electromagnetic waves in a substrate of a dielectric material, the method comprising the steps: exposing portions of the dielectric material to radiation through a mask; and introducing a dopant into portions of the dielectric material that were not exposed to radiation, the dopant altering the index of refraction of the dielectric material.
Claim 5
Dependent Claim
17 words
The method of claim 2, wherein the radiation has wavelengths in the ultraviolet region of the spectrum.
Claim 6
Dependent Claim
12 words
The method of claim 2, wherein the dielectric material is a polyimide.
Claim 7
Dependent Claim
17 words
The method of claim 2, wherein the dopant is introduced into the dielectric material by solvent diffusion.
Claim 8
Dependent Claim
27 words
The method of claim 5, wherein the diffusion of dopant into the dielectric material is restricted by the portions of the dielectric material exposed to the radiation.
Claim 9
Dependent Claim
49 words
A waveguide for electromagnetic waves comprising: a polyimide substrate; and a channel for guiding electromagnetic waves, the channel being defined in the polyimide and including a dopant that changes the index of refraction of the polyimide, portions of the polyimide around the channel being substantially free of the dopant.
Claim 10
Dependent Claim
49 words
A waveguide for electromagnetic waves comprising: a polyimide substrate; and a channel for guiding electromagnetic waves, the channel being defined in the polyimide and including a dopant that changes the index of refraction of the polyimide, portions of the polyimide around the channel being substantially free of the dopant.
Claim 11
Dependent Claim
19 words
The waveguide of claim 7, wherein the channel waveguide has a transverse cross-section in the shape of a rectangle.
Claim 12
Dependent Claim
20 words
The waveguide of claim 7, wherein loss of transmitted electromagnetic waves from the channel is less than about 0.5 dB/cm.
Claim 13
Dependent Claim
65 words
A waveguide for electromagnetic waves comprising: a substrate of a dielectric material; and a channel for guiding electromagnetic waves defined in the dielectric material and including a dopant that changes the index of refraction of the dielectric material, the channel having a transverse cross-section substantially in the shape of a rectangle, portions of the dielectric material around the channel being substantially free of the dopant.
Claim 14
Dependent Claim
65 words
A waveguide for electromagnetic waves comprising: a substrate of a dielectric material; and a channel for guiding electromagnetic waves defined in the dielectric material and including a dopant that changes the index of refraction of the dielectric material, the channel having a transverse cross-section substantially in the shape of a rectangle, portions of the dielectric material around the channel being substantially free of the dopant.
Claim 15
Dependent Claim
56 words
A waveguide for electromagnetic waves comprising: a substrate of a dielectric material; and a channel for guiding electromagnetic waves defined between doped portions of the dielectric material, the doped portions of the dielectric material having an index of refraction at least about 0.01 different from the index of refraction of the dielectric material in the channel.
Claim 16
Dependent Claim
56 words
A waveguide for electromagnetic waves comprising: a substrate of a dielectric material; and a channel for guiding electromagnetic waves defined between doped portions of the dielectric material, the doped portions of the dielectric material having an index of refraction at least about 0.01 different from the index of refraction of the dielectric material in the channel.
Claim 17
Dependent Claim
12 words
The waveguide of claim 11, wherein the dielectric material is a polyimide.
Claim 18
Dependent Claim
19 words
The waveguide of claim 11, wherein the waveguide has a transverse cross-section substantially in the shape of a rectangle.
Claim 19
Independent Claim
59 words
A method for providing a channel for guiding electromagnetic waves in a substrate of polyimide, the method comprising the steps: depositing a masking material on the polyimide; patterning the masking material to uncover a portion of the polyimide; and introducing a dopant into the uncovered portion of the polyimide, the dopant altering the index of refraction of the polyimide.
Claim 20
Independent Claim
59 words
A method for providing a channel for guiding electromagnetic waves in a substrate of polyimide, the method comprising the steps: depositing a masking material on the polyimide; patterning the masking material to uncover a portion of the polyimide; and introducing a dopant into the uncovered portion of the polyimide, the dopant altering the index of refraction of the polyimide.
Claim 21
Dependent Claim
22 words
The method of claim 14, wherein the dopant effectively alters the index of refraction of the polyimide by at least about 0.01.
Claim 22
Dependent Claim
16 words
The method of claim 14, wherein the dopant is introduced into the polyimide by solvent diffusion.
Claim 23
Dependent Claim
15 words
The method of claim 16, wherein the diffusion of dopant into the polyimide is isotropic.
Claim 24
Dependent Claim
45 words
A multi-chip module comprising: a layer of polyimide; and a channel for guiding electromagnetic waves defined within the polyimide and including a dopant that changes the index of refraction of the polyimide, portions of the polyimide around the channel being substantially free of the dopant.
Claim 25
Dependent Claim
45 words
A multi-chip module comprising: a layer of polyimide; and a channel for guiding electromagnetic waves defined within the polyimide and including a dopant that changes the index of refraction of the polyimide, portions of the polyimide around the channel being substantially free of the dopant.
Claim 26
Dependent Claim
28 words
The multi-chip module of claim 18, wherein the index of refraction of the channel differs from the index of refraction of the polyimide by at least about 0.01.
Claim 27
Dependent Claim
21 words
The multi-chip module of claim 18, wherein the channel waveguide has a transverse cross-section substantially in the shape of a rectangle.
Claim 28
Dependent Claim
53 words
A multi-chip module comprising: a layer of dielectric material; and a channel for guiding electromagnetic waves defined between doped portions of the dielectric material, the doped portions of the dielectric material having an index of refraction at least about 0.01 different from the index of refraction of the dielectric material in the channel.
Claim 29
Dependent Claim
53 words
A multi-chip module comprising: a layer of dielectric material; and a channel for guiding electromagnetic waves defined between doped portions of the dielectric material, the doped portions of the dielectric material having an index of refraction at least about 0.01 different from the index of refraction of the dielectric material in the channel.
Claim 30
Dependent Claim
19 words
The multi-chip module of claim 21, wherein the channel waveguide has a cross-section in the shape of a rectangle.
Claim 31
Dependent Claim
62 words
A multi-chip module comprising: a layer of dielectric material; and a channel for guiding electromagnetic waves defined in a dielectric material and including a dopant that changes the index of refraction of the dielectric material, the channel having a transverse cross-section substantially in the shape of a rectangle, portions of the dielectric material around the channel being substantially free of the dopant.
Claim 32
Dependent Claim
62 words
A multi-chip module comprising: a layer of dielectric material; and a channel for guiding electromagnetic waves defined in a dielectric material and including a dopant that changes the index of refraction of the dielectric material, the channel having a transverse cross-section substantially in the shape of a rectangle, portions of the dielectric material around the channel being substantially free of the dopant.
Claim 33
Dependent Claim
52 words
A waveguide for electromagnetic waves comprising: a polyimide substrate; and a channel for guiding electromagnetic waves, the channel being defined in the polyimide and including a dopant that changes the index of refraction of the polyimide, wherein the loss of transmitted electromagnetic waves from the channel is less than about 0.5 dB/cm.
Claim 34
Dependent Claim
52 words
A waveguide for electromagnetic waves comprising: a polyimide substrate; and a channel for guiding electromagnetic waves, the channel being defined in the polyimide and including a dopant that changes the index of refraction of the polyimide, wherein the loss of transmitted electromagnetic waves from the channel is less than about 0.5 dB/cm.
Claim 35
Dependent Claim
61 words
A multi-chip module comprising: a layer of polyimide; and a channel for guiding electromagnetic waves defined within the polyimide and including a dopant that changes the index of refraction of the polyimide, the index of refraction of the doped polyimide in the channel having an index of refraction at least about 0.01 different from the index of refraction of the polyimide.
Claim 36
Dependent Claim
61 words
A multi-chip module comprising: a layer of polyimide; and a channel for guiding electromagnetic waves defined within the polyimide and including a dopant that changes the index of refraction of the polyimide, the index of refraction of the doped polyimide in the channel having an index of refraction at least about 0.01 different from the index of refraction of the polyimide.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-12-01 | 1996-06-01 | 1996-12-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-12-01 | 2000-06-01 | 2000-12-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-12-01 | 2004-06-01 | 2004-12-01 | $7700.00 | Window Closed / Lapsed |