US5168001A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Perfluoropolymer coated pellicle
Assignee: DU PONT CHEMICAL AND ENERGY OPERATIONS Inc
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Filing: 1991-05-20
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Granted: 1992-12-01
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Expires: 2011-05-20
Abstract
Abstract Pellicles having films bearing at least one coating of perfluoropolymers as an antireflective surface, the perfluoropolymers comprising a low molecular weight perfluoropolymer having randomly copolymerized units of tetrafluoroethylene, perfluoro (alkyl vinyl) ether and a cure site monomer, the cure site monomer selected from the group consisting of vinylidene fluoride, perfluoro-(8-cyano-5-methyl-3,6-dioxa-1-octene), bromotetrafluorobutene or perfluoro (2-phenoxypropyl vinyl ether). Pellicles of this type are dust defocusing covers for photomasks and reticles used to project patterns onto light sensitive substrates such as photoresist-coated semiconductor wafers which are used in the manufacture of integrated circuits.
Inventors
- 👤 John M. Legare
- 👤 Anestis L. Logothetis
- 👤 Duck J. Yang
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 13:44
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/62; C; C08; C08F; C08F8/00; C08F8/50; C08J; C08J7/00; C08J7/04; C08J7/0427; C08J7/043; C08F2800/00; C08F2800/20; C08J2301/00; C08J2301/08; C08J2301/16; C08J2301/18; C08J2427/00; C08J2427/02; C08J2427/12; C08J2427/18; Y; Y10; Y10T; Y10T428/00; Y10T428/24; Y10T428/24777; Y10T428/24793; Y10T428/31504; Y10T428/31507; Y10T428/3154; Y10T428/31544; Y10T428/31678; Y10T428/31692; Y10T428/31699
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
99 words
A pellicle comprising a thin optical film which is tautly adhered to one edge of a closed support frame, said film comprising a core layer having an index of refraction of about from 1.32 to 1.80 and a thickness of about 0.3 to 20 microns, the improvement wherein the film further comprises at least one antireflective layer comprising a low molecular weight pyrolyzed perfluoropolymer comprising randomly copolymerized units of tetrafluoroethylene, perfluoro (alkyl vinyl) ether and a cure site monomer, the cure site monomer being selected from the group consisting of vinylidene fluoride, perfluoro-(8-cyano-5-methyl-3,6-dioxa-1-octene), bromotetrafluorobutene or perfluoro (2-phenoxypropyl vinyl ether).
Claim 2
Dependent Claim
99 words
A pellicle comprising a thin optical film which is tautly adhered to one edge of a closed support frame, said film comprising a core layer having an index of refraction of about from 1.32 to 1.80 and a thickness of about 0.3 to 20 microns, the improvement wherein the film further comprises at least one antireflective layer comprising a low molecular weight pyrolyzed perfluoropolymer comprising randomly copolymerized units of tetrafluoroethylene, perfluoro (alkyl vinyl) ether and a cure site monomer, the cure site monomer being selected from the group consisting of vinylidene fluoride, perfluoro-(8-cyano-5-methyl-3,6-dioxa-1-octene), bromotetrafluorobutene or perfluoro (2-phenoxypropyl vinyl ether).
Claim 3
Dependent Claim
26 words
A pellicle of claim 1 wherein the core layer comprises a polymer selected from the group consisting of polycarbonates, polyacrylates, polyvinylbutyrates, polyethersulfones, polysulfones and cellulose derivatives.
Claim 4
Dependent Claim
13 words
A pellicle of claim 2 wherein the core layer consists essentially of nitrocellulose.
Claim 5
Dependent Claim
24 words
A pellicle of claim 3 wherein the film transmits greater than 97% of incident light in the band of 350 nanometers to 450 nanometers.
Claim 6
Dependent Claim
23 words
A pellicle of claim 1 wherein the film comprises a core layer and an antireflective layer on one side of the core layer.
Claim 7
Dependent Claim
23 words
A pellicle of claim 1 wherein the film comprises a core layer and an antireflective layer on both sides of the core layer.
Claim 8
Dependent Claim
29 words
A pellicle of claim 1 wherein the perfluoropolymer comprises a low molecular weight perfluoropolymer comprising randomly copolymerized units of tetrafluoroethylene, perfluoro (methyl vinyl) ether and a perfluoro-(8-cyano-5-perfluoro-(8-cyano-5-methyl-3,6-dioxa-1-octene) cure site.
Claim 9
Dependent Claim
26 words
The pellicle of claim 7 wherein the low molecular weight perfluoropolymer comprising randomly copolymerized units of tetrafluoroethylene, perfluoro (methyl vinyl) ether and a perfluoro-(8-cyano-5-perfluoro-(8-cyano-5-methyl-3,6-dioxa-1-octene) cure site.
Claim 10
Dependent Claim
17 words
The pellicle of claim 8 wherein the inherent viscosity of the perfluorpolymer is 0.40 at 30° C.
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JPH0241329A
Cited
JPH02285348A
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-12-01 | 1996-06-01 | 1996-12-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-12-01 | 2000-06-01 | 2000-12-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-12-01 | 2004-06-01 | 2004-12-01 | $7700.00 | Window Closed / Lapsed |