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US4970099A Expired / Lapsed US ⏱️ 0.0 years remaining

Perfluoropolymer coated pellicles

Assignee: EIDP Inc
•
Filing: 1989-05-19
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Granted: 1990-11-13
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Expires: 2009-05-19
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Abstract

Abstract Pellicles having films bearing at least one coating of perfluoropolymers as an anti-reflective surface, the perfluoropolymers being copolymerized units of tetrafluoroethylene and perfluro (alkyl vinyl) ether, and further comprising iodo moieties.

Inventors

  • 👤 Jerome T. Adams
  • 👤 Anestis L. Logothetis

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-28 18:59
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/62; H; H10; H10P; H10P76/00; H10P76/20; H10P76/204; H10P76/2041; H10P76/2043; Y; Y10; Y10T; Y10T428/00; Y10T428/23; Y10T428/239; Y10T428/31504; Y10T428/31507; Y10T428/3154; Y10T428/31544; Y10T428/31855; Y10T428/3188; Y10T428/31884; Y10T428/31891

Claims Analysis

Total Claims: 13
Claim 1
Independent Claim 86 words
A pellicle comprising a thin optical film which is tautly adhered to one edge of a closed support frame, said film comprising a core layer having an index of refraction of about from 1.35 to 1.80 and a thickness of about from 0.3 to about 20 microns, the improvement wherein the film further comprises at least one anti-reflective layer comprising a perfluoropolymer having randomly copolymerized units of tetrafluoroethylene, perfluoro (alkyl vinyl) ether and at least about 0.05 percent, by weight of the perfluoropolymer, of iodo moieties.
Claim 2
Dependent Claim 86 words
A pellicle comprising a thin optical film which is tautly adhered to one edge of a closed support frame, said film comprising a core layer having an index of refraction of about from 1.35 to 1.80 and a thickness of about from 0.3 to about 20 microns, the improvement wherein the film further comprises at least one anti-reflective layer comprising a perfluoropolymer having randomly copolymerized units of tetrafluoroethylene, perfluoro (alkyl vinyl) ether and at least about 0.05 percent, by weight of the perfluoropolymer, of iodo moieties.
Claim 3
Dependent Claim 23 words
A pellicle of claim 1 wherein the film comprises a core layer and an anti-reflective layer on one side of the core layer.
Claim 4
Dependent Claim 23 words
A pellicle of claim 1 wherein the film comprises a core layer and an anti-reflective layer on both sides of the core layer.
Claim 5
Dependent Claim 20 words
A pellicle of claim 1 wherein the iodo moieties are substantially all positioned on the ends of the perfluoropolymer chains.
Claim 6
Dependent Claim 26 words
A pellicle of claim 1 wherein the core layer comprises a polymer selected from the group consisting of polycarbonates, polyacrylates, polyvinylbutyrates, polyethersulfones, polysulfones and cellulose derivatives.
Claim 7
Dependent Claim 13 words
A pellicle of claim 5 wherein the core layer consists essentially of nitrocellulose.
Claim 8
Dependent Claim 24 words
A pellicle of claim 6 wherein the film transmits greater than 96% of incident light in the band of 350 nanometers to 460 nanometers.
Claim 9
Dependent Claim 30 words
A pellicle of claim 1 wherein the perfluoropolymer further comprises at least about 0.3%, by weight of the perfluoropolymer, of bromine moieties randomly distributed along the backbone of the perfluoropolymer.
Claim 10
Dependent Claim 20 words
A pellicle of claim 8 wherein the bromine moieties comprise about from 0.1 to 0.5% by weight of the perfluoropolymer.
Claim 11
Dependent Claim 30 words
A pellicle of claim 1 wherein the perfluoropolymer further comprises at least about 0.1%, by weight of the perfluoropolymer, of cyano moieties randomly distributed along the backbone of the perfluoropolymer.
Claim 12
Dependent Claim 20 words
A pellicle of claim 10 wherein the cyano moieties comprise about from 0.1 to 2% by weight of the perfluoropolymer.
Claim 13
Dependent Claim 53 words
A pellicle of claim 10 wherein each anti-reflective layer comprises an amorphous terpolymer of the interpolymerized units of about from 40 to 60 weight % TFE, about from 35 to 55 weight % PMVE and up to about 5 weight % 8-CNVE, modified with about from 0.1 to 0.5 weight % iodo moieties.

References Cited (Backward Citations)

US3351619A Cited
US4035565A Cited
US4243770A Cited
US4281092A Cited
US4487903A Cited
US4413094A Cited
US4529784A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1993-11-12 1994-05-14 1994-11-13 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1997-11-12 1998-05-14 1998-11-13 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2001-11-12 2002-05-14 2002-11-13 $7700.00 Window Closed / Lapsed

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