Production of thin film for pellicle

Abstract

Abstract PURPOSE:To produce a thin film for pellicle effective in preventing the adhesion of foreign material to a transparent substrate such as a reticle by applying a nitrocellulose solution to a continuous sheet substrate and removing the solvent from the coating layer. CONSTITUTION:A nitrocellulose solution is applied to a continuous sheet substrate having releasability to nitrocellulose and the solvent is removed to form a thin film of nitrocellulose on the surface of said continuous substrate. The formed thin film is peeled off from the substrate and wound.

Inventors

• 👤 Hisao Asai
• 👤 尚雄 浅井
• 👤 Takeki Matsui
• 👤 雄毅 松居
• 👤 Masataka Wada
• 👤 正孝 和田
• 👤 Kenji Aoki
• 👤 青木　堅治

Bibliographic Details