Patent US5167984A successfully refreshed from Google Patents.
US5167984A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Vacuum deposition process
Assignee: Xerox Corp
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Filing: 1990-12-06
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Granted: 1992-12-01
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Expires: 2010-12-06
Abstract
Abstract A vacuum evaporation container including a resistively heatable cylindrical crucible having at least one open end and having an axially aligned slot and a hollow cylindrical insert concentrically located within the cylindrical crucible, the insert having a slot aligned with the slot of the crucible, closed ends and an electrical conductivity less than the electrical conductivity of the electrically conductive cylindrical crucible. This vacuum evaporation container is employed in a vacuum deposition process.
Inventors
- 👤 Andrew R. Melnyk
- 👤 Michael G. Swales
- 👤 Donald Teney
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:32
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/246; C23C14/243; C23C14/26
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
366 words
A vacuum deposition process comprising providing a vacuum evaporation container comprising at least one resistively heatable conductive cylindrical crucible having at least one open end and having an axially aligned narrow slot, providing at least one hollow first cylindrical insert having an outside diameter smaller than the inside diameter of said cylindrical crucible, said first cylindrical insert having an axially aligned wide slot that is wider than the width of said narrow slot of said cylindrical crucible, closed ends and an electrical conductivity less than the electrical conductivity of said resistively heatable cylindrical crucible, loading particles of a first solid vaporizable material into said first cylindrical insert, sliding said first cylindrical insert into said open end of said evaporation container to concentrically position said first cylindrical insert within said cylindrical crucible and to align said wide slot of said first cylindrical insert with said narrow slot of said crucible, placing a first substrate to be coated adjacent to said vacuum evaporation container, said first substrate having an area to be coated that has a width substantially the same as the length of said narrow slot of said first cylindrical insert, heating said cylindrical crucible in a partial vacuum to vaporize said first vaporizable material, depositing said first vaporizable material as a coating on said first substrate as a solid coating, removing said first substrate, removing said first cylindrical insert from said crucible, sliding a second cylindrical insert containing a second solid vaporizable material into said crucible, said second cylindrical insert having a slot length different from the slot length of said first hollow cylindrical insert and a width wider than the width of said narrow slot of said cylindrical crucible, aligning said slot of said second hollow cylindrical insert with said narrow slot of said crucible, placing a second substrate to be coated adjacent to said vacuum evaporation container, said second substrate having an area to be coated that has a width substantially the same as the length of said slot of said second hollow cylindrical insert, heating said cylindrical crucible in a partial vacuum to vaporize said second vaporizable material, and depositing said material from said vapors onto said second substrate as a solid coating.
Claim 2
Dependent Claim
366 words
A vacuum deposition process comprising providing a vacuum evaporation container comprising at least one resistively heatable conductive cylindrical crucible having at least one open end and having an axially aligned narrow slot, providing at least one hollow first cylindrical insert having an outside diameter smaller than the inside diameter of said cylindrical crucible, said first cylindrical insert having an axially aligned wide slot that is wider than the width of said narrow slot of said cylindrical crucible, closed ends and an electrical conductivity less than the electrical conductivity of said resistively heatable cylindrical crucible, loading particles of a first solid vaporizable material into said first cylindrical insert, sliding said first cylindrical insert into said open end of said evaporation container to concentrically position said first cylindrical insert within said cylindrical crucible and to align said wide slot of said first cylindrical insert with said narrow slot of said crucible, placing a first substrate to be coated adjacent to said vacuum evaporation container, said first substrate having an area to be coated that has a width substantially the same as the length of said narrow slot of said first cylindrical insert, heating said cylindrical crucible in a partial vacuum to vaporize said first vaporizable material, depositing said first vaporizable material as a coating on said first substrate as a solid coating, removing said first substrate, removing said first cylindrical insert from said crucible, sliding a second cylindrical insert containing a second solid vaporizable material into said crucible, said second cylindrical insert having a slot length different from the slot length of said first hollow cylindrical insert and a width wider than the width of said narrow slot of said cylindrical crucible, aligning said slot of said second hollow cylindrical insert with said narrow slot of said crucible, placing a second substrate to be coated adjacent to said vacuum evaporation container, said second substrate having an area to be coated that has a width substantially the same as the length of said slot of said second hollow cylindrical insert, heating said cylindrical crucible in a partial vacuum to vaporize said second vaporizable material, and depositing said material from said vapors onto said second substrate as a solid coating.
Claim 3
Dependent Claim
188 words
A vacuum deposition process comprising providing a vacuum evaporation container comprising at least one resistively heatable cylindrical crucible having at least one open end and having an axially aligned narrow slot, providing at least one hollow cylindrical insert having an outside diameter smaller than the inside diameter of said cylindrical crucible, said cylindrical insert having an axially aligned wide slot that is wider than the width of said narrow slot of said cylindrical crucible, closed ends and an electrical conductivity less than the electrical conductivity of said resistively heatable cylindrical crucible, loading particles of solid vaporizable material into said hollow cylindrical insert, sliding said cylindrical insert into said open end of said evaporation container to concentrically position said cylindrical insert within said cylindrical crucible and to align said wide slot of said cylindrical insert with said narrow slot of said crucible, placing a substrate to be coated adjacent to said vacuum evaporation container, and heating said cylindrical crucible in a partial vacuum to vaporize said vaporizable material to form vapors in said cylindrical insert and depositing said material from said vapors onto said substrate as a solid coating.
Claim 4
Dependent Claim
188 words
A vacuum deposition process comprising providing a vacuum evaporation container comprising at least one resistively heatable cylindrical crucible having at least one open end and having an axially aligned narrow slot, providing at least one hollow cylindrical insert having an outside diameter smaller than the inside diameter of said cylindrical crucible, said cylindrical insert having an axially aligned wide slot that is wider than the width of said narrow slot of said cylindrical crucible, closed ends and an electrical conductivity less than the electrical conductivity of said resistively heatable cylindrical crucible, loading particles of solid vaporizable material into said hollow cylindrical insert, sliding said cylindrical insert into said open end of said evaporation container to concentrically position said cylindrical insert within said cylindrical crucible and to align said wide slot of said cylindrical insert with said narrow slot of said crucible, placing a substrate to be coated adjacent to said vacuum evaporation container, and heating said cylindrical crucible in a partial vacuum to vaporize said vaporizable material to form vapors in said cylindrical insert and depositing said material from said vapors onto said substrate as a solid coating.
Claim 5
Dependent Claim
40 words
A vacuum deposition process according to claim 2 including loading a plurality of cylindrical inserts with said solid vaporizable material and sliding said cylindrical inserts end to end into said open end of said cylindrical crucible prior to said heating.
Claim 6
Dependent Claim
28 words
A vacuum deposition process according to claim 2 wherein the external cross-sectional shape of said insert has the same general shape as the cross-sectional shape of said crucible.
Claim 7
Dependent Claim
55 words
A vacuum deposition process according to claim 2 including removing said insert from said open end, inserting solid particles of vaporizable material into said hollow cylindrical insert, and sliding said insert containing said solid vaporizable material into said open end prior to heating said cylindrical crucible in a partial vacuum to vaporize said vaporizable material.
Claim 8
Dependent Claim
42 words
A vacuum deposition process according to claim 5 including inserting fresh solid particles of vaporizable material into a second hollow cylindrical insert while said first insert containing said solid vaporizable material is heated in said partial vacuum to vaporize said vaporizable material.
Claim 9
Dependent Claim
27 words
A vacuum deposition process according to claim 2 including heating said cylindrical crucible by passing an electric current through said crucible from one end to the other.
Claim 10
Dependent Claim
69 words
A vacuum deposition process according to claim 7 wherein the bulk resistivity of said electrically conductive cylindrical crucible is between about 10 -2 ohms and about 10 3 ohms and said insert is sufficiently electrically insulating whereby less than about 1 percent of said electrical current flowing from one end of said crucible to the other passes through said insert during passage of said electric current through said crucible.
Claim 11
Dependent Claim
56 words
A vacuum deposition process according to claim 2 wherein the width of said narrow slot of said crucible is smaller than the largest particle size of said solid particles of vaporizable material and the width of said wide slot of said insert is larger than the largest particle size of said solid particles of vaporizable material.
Claim 12
Dependent Claim
34 words
A vacuum deposition process according to claim 2 including directing said vapors in an indirect path from said solid particles of vaporizable material through said wide slot of said cylindrical insert to said substrate.
Claim 13
Dependent Claim
16 words
A vacuum deposition process according to claim 2 wherein said vaporizable material is an inorganic material.
Claim 14
Dependent Claim
19 words
A vacuum deposition process according to claim 11 wherein said vaporizable material inorganic material is an alloy of selenium.
Claim 15
Dependent Claim
17 words
A vacuum deposition process according to claim 2 wherein said vaporizable material material is an organic material.
Claim 16
Dependent Claim
37 words
A vacuum deposition process according to claim 2 wherein said wide slot has a width of between about 2.5 centimeters and about 25 centimeters and said narrow slot has a width of less than about 10 millimeters.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-12-01 | 1996-06-01 | 1996-12-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-12-01 | 2000-06-01 | 2000-12-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-12-01 | 2004-06-01 | 2004-12-01 | $7700.00 | Window Closed / Lapsed |