Patent US5164565A successfully refreshed from Google Patents.
US5164565A
Expired / Lapsed
US
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Laser-based system for material deposition and removal
Assignee: Photon Dynamics Inc
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Filing: 1991-04-18
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Granted: 1992-11-17
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Expires: 2011-04-18
Abstract
Abstract A laser-based repair system provides for material removal and deposition using a repair tool having a first laser operating at a high power for cutting signal lines and operating at a lower power for ablating a target repair area in conjunction with a liquid dispensing apparatus for application of the liquid solution in a target area, and a second laser for decomposing the liquid solution in an applied layer prior to the ablation of material in the target repair area. Various repair processes can be undertaken. The invention allows high-speed material deposition and removal on a surface. In a specific embodiment of the invention, the liquid solution used is a palladium acetate and a solvent or other metallo-organic solution which is capable of pyrolytic reaction and decomposition to an electrically conductive residue. A liquid applicator or dispensing apparatus is provided which is suited to applying fine traces of liquid without clogging. An optical head is provided which project beams from a plurality of lasers and surface illumination along a common axis with an optical viewing system for lighting a target workpiece for observing the repair in progress. The invention is particularly useful in the repair of large matrices, such as liquid crystal display panels.
Inventors
- 👤 Ginetto Addiego
- 👤 Francois J. Henley
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 13:03
CPC Classifications
B; B23; B23K; B23K26/00; B23K26/02; B23K26/03; B23K26/032; H; H05; H05K; H05K3/00; H05K3/22; H05K3/225; G; G02; G02F; G02F1/00; G02F1/01; G02F1/13; G02F1/133; G02F1/136; G02F1/1362; G02F1/136259; H05K2203/00; H05K2203/07; H05K2203/0756; H05K2203/0769; H05K2203/10; H05K2203/107; H05K2203/108; H05K2203/12; H05K2203/121; H05K3/0011; H05K3/0017; H05K3/46; H05K3/4685
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
87 words
A laser repair system for microcircuit repair by material deposition and removal comprising: a) a first laser for cutting and ablating target areas in a workpiece; b) a dispensing means for applying a metallo-organic liquid solution to said target areas; c) a second laser for decomposing said liquid solution to a conductive metal including in said target areas; d) an optical means for combining beams of said first laser and said second laser along a common axis; and e) a workpiece placement means for moving said workpiece.
Claim 2
Dependent Claim
87 words
A laser repair system for microcircuit repair by material deposition and removal comprising: a) a first laser for cutting and ablating target areas in a workpiece; b) a dispensing means for applying a metallo-organic liquid solution to said target areas; c) a second laser for decomposing said liquid solution to a conductive metal including in said target areas; d) an optical means for combining beams of said first laser and said second laser along a common axis; and e) a workpiece placement means for moving said workpiece.
Claim 3
Dependent Claim
17 words
The laser repair system as recited in claim 1 wherein said first laser is an excimer laser.
Claim 4
Dependent Claim
17 words
The laser repair system as recited in claim 1 wherein said second laser is an argon-ion laser.
Claim 5
Dependent Claim
42 words
The laser repair system as recited in claim 1 wherein said dispensing means includes means for establishing an air bearing for maintaining a controlled distance between said dispensing means and said workpiece so that said dispensing means avoids contact with said workpiece.
Claim 6
Dependent Claim
31 words
The laser repair system as recited in claim 4 wherein said dispensing means has a bearing face and includes an air outlet and a liquid solution outlet in said bearing face.
Claim 7
Dependent Claim
22 words
The laser repair system as recited in claim 5 wherein the bearing face forms a doctor blade for shearing said liquid solution.
Claim 8
Dependent Claim
22 words
The laser repair system as recited in claim 1 further comprising a viewing system in said optical means for observing said workpiece.
Claim 9
Dependent Claim
32 words
The laser repair system as recited in claim 7 wherein said optical means includes means for illuminating said workpiece and for observing said workpiece along said common axis with said laser beams.
Claim 10
Dependent Claim
26 words
The laser repair system as recited in claim 1 further including heating elements placed in said workpiece placement means for accelerating drying time of said workpiece.
Claim 11
Dependent Claim
33 words
The laser repair system as recited in claim 1 further including means for shaping the beam of said first laser and the beam of said second laser into top hat-shaped intensity cross sections.
Claim 12
Independent Claim
156 words
A method for opening a via in a passivation layer having an interface upon a metal layer of a circuit structure constructed upon a substrate in order to expose said metal layer to allow contact of a signal conduction overlay with said metal layer, said method comprising the steps of: a) generating a beam in pulses from an excimer laser with sufficient energy such that upon injection of at least one pulse of said beam into said passivation layer said interface upon said metal layer will break down; b) shaping said beam to define a cross-sectional area with substantially constant intensity and sharp boundaries in the form of a top hat; c) injecting said top hat-shaped beam into said passivation layer at a target area for a sufficient duration and a sufficient number of times to cause said interface to break down; and d) removing said passivation layer in the target area to define said via.
Claim 13
Independent Claim
156 words
A method for opening a via in a passivation layer having an interface upon a metal layer of a circuit structure constructed upon a substrate in order to expose said metal layer to allow contact of a signal conduction overlay with said metal layer, said method comprising the steps of: a) generating a beam in pulses from an excimer laser with sufficient energy such that upon injection of at least one pulse of said beam into said passivation layer said interface upon said metal layer will break down; b) shaping said beam to define a cross-sectional area with substantially constant intensity and sharp boundaries in the form of a top hat; c) injecting said top hat-shaped beam into said passivation layer at a target area for a sufficient duration and a sufficient number of times to cause said interface to break down; and d) removing said passivation layer in the target area to define said via.
Claim 14
Dependent Claim
24 words
The method according to claim 11 wherein said removing step comprises: vaporizing said passivation layer in said target area with said top hat-shaped beam.
Claim 15
Dependent Claim
44 words
The method according to claim 11 wherein said removing step comprises: exploding said interface between said conduction layer and said passivation layer in said target area to leaving an unconnected residue of said passivation layer; and extricating said unconnected residue from said passivation layer.
Claim 16
Dependent Claim
19 words
The method according to claim 13 wherein said extricating step comprises: vacuuming said unconnected residue from said passivation layer.
Claim 17
Dependent Claim
20 words
The method according to claim 13 wherein said extricating step comprises: blowing away said unconnected residue from said passivation layer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-11-17 | 1996-05-18 | 1996-11-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-11-17 | 2000-05-18 | 2000-11-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-11-17 | 2004-05-18 | 2004-11-17 | $7700.00 | Window Closed / Lapsed |