Confocal scanning interference microscope using reference beam

Claim 1

A confocal scanning type of interference microscope comprising: i) a sample supporting member on which a sample is supported, ii) a light source which produces a light beam, iii) a light projecting optical means with which an image of said light beam is formed as a small light spot on said sample, iv) a light receiving optical means with which the light beam radiated out of said sample is condensed, and an image of the condensed light beam is formed as a point image, v) a photodetector which detects said point image, vi) a beam splitting means for splitting said light beam, which has been produced by said light source, into a light beam, which is to be irradiated to said sample, and a reference light beam, which is not to be irradiated to said sample, before said light beam having been produced by said light source impinges upon said sample, vii) a beam combining means for combining said light beam, which has been radiated out of said sample, and said reference light beam with each other, viii) a reference light beam optical means which is constituted equivalently to said light projecting optical means and said light receiving optical means and which is located in the optical path of said reference light beam, ix) an optical means supporting member which supports said light projecting optical means, said light receiving optical means, and said reference light beam optical means together, and x) a scanning means which moves said sample supporting member with respect to said optical means supporting member, whereby said sample is scanned two-dimensionally with said light spot.