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US5081349A Expired / Lapsed US ⏱️ 0.0 years remaining

Scanning microscope and scanning mechanism for the same

Assignee: Fujifilm Holdings Corp
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Filing: 1990-11-05
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Granted: 1992-01-14
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Expires: 2010-11-05
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Abstract

Abstract A scanning microscope comprises an objective lens for converging a laser beam, which serves as a light beam irradiated to a sample, to a small light spot on the sample, and a scanning mechanism for scanning the light spot on the sample in a main scanning direction and a sub-scanning direction. The light beam, which is radiated out of the sample during the scanning, is photoelectrically detected and converted into an image signal representing an enlarged image of the sample. The scanning mechanism is provided with a main scanning device comprising a beam splitter, which splits the laser beam into two laser beams such that their center points deviate from each other, a light modulating device, which regularly modulates the intensity of at least one of the two laser beams such that the modulation frequency varies for the two laser beams, and an optical device, which adjusts the beam profiles of the laser beams on the sample such that the beam profiles have a flat shape which is long in the direction along which the two laser beams are lined up.

Inventors

  • 👤 Osamu Iwasaki

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-28 15:38
CPC Classifications
G; G02; G02B; G02B21/00; G02B21/0004; G02B21/002

Claims Analysis

Total Claims: 8
Claim 1
Independent Claim 201 words
A scanning microscope comprising: i) an objective lens for converging a laser beam, which serves as a light beam irradiated to a sample, to a small light spot on said sample, ii) a scanning mechanism for scanning said light spot on said sample in a main scanning direction and a sub-scanning direction, and iii) a means for photoelectrically detecting the light beam, which is radiated out of said sample during the scanning, and thereby generating an image signal representing an enlarged image of said sample, wherein said scanning mechanism is provided a) a beam splitting means, which splits said laser beam into two laser beams such that center points of two said laser beams deviate from each other, two said laser beams being caused to impinge upon said objective lens, b) a light modulating means, which regularly modulates the intensity of at least one of two said laser beams such that the modulation frequency varies for two said laser beams, and c) an optical device, which adjusts the beam profiles of the laser beams on said sample such that the beam profiles have a flat shape which is long in the direction along which two said laser beams are lined up.
Claim 2
Dependent Claim 201 words
A scanning microscope comprising: i) an objective lens for converging a laser beam, which serves as a light beam irradiated to a sample, to a small light spot on said sample, ii) a scanning mechanism for scanning said light spot on said sample in a main scanning direction and a sub-scanning direction, and iii) a means for photoelectrically detecting the light beam, which is radiated out of said sample during the scanning, and thereby generating an image signal representing an enlarged image of said sample, wherein said scanning mechanism is provided a) a beam splitting means, which splits said laser beam into two laser beams such that center points of two said laser beams deviate from each other, two said laser beams being caused to impinge upon said objective lens, b) a light modulating means, which regularly modulates the intensity of at least one of two said laser beams such that the modulation frequency varies for two said laser beams, and c) an optical device, which adjusts the beam profiles of the laser beams on said sample such that the beam profiles have a flat shape which is long in the direction along which two said laser beams are lined up.
Claim 3
Dependent Claim 21 words
A scanning microscope as defined in claim 1 wherein said light modulating means is constituted of at least one acousto-optic modulator.
Claim 4
Dependent Claim 22 words
A scanning microscope as defined in claim 1 wherein said optical device is constituted of a cylindrical lens and said objective lens.
Claim 5
Dependent Claim 187 words
A scanning mechanism having an objective lens for converging a laser beam, which serves as a light beam irradiated to a material to be scanned, to a small light spot on said material to be scanned, said light spot being caused to scan said material, which is to be scanned, in a main scanning direction and a sub-scanning direction, wherein the improvement comprises the provision of a main scanning means which is composed of: a) a beam splitting means, which splits said laser beam into two laser beams such that center points of two said laser beams deviate from each other, two said laser beams being caused to impinge upon said objective lens, b) a light modulating means, which regularly modulates the intensity of at least one of two said laser beams such that the modulation frequency varies for two said laser beams, and c) an optical device, which adjusts the beam profiles of the laser beams on said material to be scanned such that the beam profiles have a flat shape which is long in the direction along which two said laser beams are lined up.
Claim 6
Dependent Claim 187 words
A scanning mechanism having an objective lens for converging a laser beam, which serves as a light beam irradiated to a material to be scanned, to a small light spot on said material to be scanned, said light spot being caused to scan said material, which is to be scanned, in a main scanning direction and a sub-scanning direction, wherein the improvement comprises the provision of a main scanning means which is composed of: a) a beam splitting means, which splits said laser beam into two laser beams such that center points of two said laser beams deviate from each other, two said laser beams being caused to impinge upon said objective lens, b) a light modulating means, which regularly modulates the intensity of at least one of two said laser beams such that the modulation frequency varies for two said laser beams, and c) an optical device, which adjusts the beam profiles of the laser beams on said material to be scanned such that the beam profiles have a flat shape which is long in the direction along which two said laser beams are lined up.
Claim 7
Dependent Claim 20 words
A scanning mechanism as defined in claim 4 wherein said light modulating means is constituted of at one acousto-optic modulator.
Claim 8
Dependent Claim 22 words
A scanning mechanism as defined in claim 4 wherein said optical device is constituted of a cylindrical lens and said objective lens.

References Cited (Backward Citations)

US4614410A Cited
US4584484A Cited
US4734578A Cited
JPS62209510A Cited
JPS63306414A Cited
US4893008A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1995-01-13 1995-07-15 1996-01-14 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1999-01-13 1999-07-15 2000-01-14 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2003-01-13 2003-07-15 2004-01-14 $7700.00 Window Closed / Lapsed

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