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US5081350A Expired / Lapsed US ⏱️ 0.0 years remaining

Scanning microscope and scanning mechanism for the same

Assignee: Fujifilm Holdings Corp
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Filing: 1990-09-24
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Granted: 1992-01-14
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Expires: 2010-09-24
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Abstract

Abstract A confocal scanning microscope comprises a sample supporting member on which a sample is supported, and a light source which produces a light beam. A light projecting device forms an image of the light beam as a small light spot on the sample. A light receiving device condenses the light beam, which has been radiated out of the sample, and forms an image of the condensed light beam as a point image. A photodetector detects the point image. A movable member supports the light projecting device and the light receiving device. A main scanning device reciprocally moves the movable member such that the light spot scans the sample in main scanning directions. A sub-scanning device moves the sample supporting member with respect to the movable member in sub-scanning directions, which are normal to the main scanning directions, and at a speed lower than the speed at which the light spot scans the sample in the main scanning directions, whereby the sample is scanned with the light spot in the sub-scanning directions.

Inventors

  • 👤 Osamu Iwasaki
  • 👤 Koji Yoshida

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-29 03:52
CPC Classifications
G; G02; G02B; G02B21/00; G02B21/0004; G02B21/002; G02B21/0024; G02B21/0032; G02B21/0036

Claims Analysis

Total Claims: 26
Claim 1
Independent Claim 184 words
A confocal scanning microscope comprising: i) a sample supporting member on which a sample is supported, ii) a light source which produces a light beam, iii) a light projecting optical means with which an image of said light beam is formed as a small light spot on said sample, light beam radiated out of said sample is condensed, and an image of the condensed light beam is formed as a point image, v) a photodetector which detects said point image, vi) a movable member which supports said light projecting optical mean and said light receiving optical means together, vii) a main scanning means which reciprocally moves said movable member such that said light spot scans said sample in main scanning directions, and viii) a sub-scanning means which moves said sample supporting member with respect to said movable member in sub-scanning directions, which are approximately normal to said main scanning directions, and at a speed lower than the speed at which said light spot scans said sample in said main scanning directions, whereby said sample is scanned with said light spot in said sub-scanning directions.
Claim 2
Dependent Claim 184 words
A confocal scanning microscope comprising: i) a sample supporting member on which a sample is supported, ii) a light source which produces a light beam, iii) a light projecting optical means with which an image of said light beam is formed as a small light spot on said sample, light beam radiated out of said sample is condensed, and an image of the condensed light beam is formed as a point image, v) a photodetector which detects said point image, vi) a movable member which supports said light projecting optical mean and said light receiving optical means together, vii) a main scanning means which reciprocally moves said movable member such that said light spot scans said sample in main scanning directions, and viii) a sub-scanning means which moves said sample supporting member with respect to said movable member in sub-scanning directions, which are approximately normal to said main scanning directions, and at a speed lower than the speed at which said light spot scans said sample in said main scanning directions, whereby said sample is scanned with said light spot in said sub-scanning directions.
Claim 3
Dependent Claim 21 words
A confocal scanning microscope as defined in claim 1 wherein said movable member also supports said light source and said photodetector.
Claim 4
Dependent Claim 33 words
A confocal scanning microscope as defined in claim 1 wherein said confocal scanning microscope is of a reflection type, and said light projecting optical means also serves as said light receiving optical means.
Claim 5
Dependent Claim 35 words
A confocal scanning microscope as defined in claim 1 wherein a means is provided which reciprocally moves said sample supporting member in directions, which are normal to said main scanning directions and said sub-scanning directions.
Claim 6
Dependent Claim 16 words
A confocal scanning microscope as defined in claim 1 wherein said light source is a laser.
Claim 7
Dependent Claim 229 words
A confocal scanning microscope comprising: i) a sample supporting member on which a sample is supported, ii) a light source which produces a light beam, iii) a light projecting optical means with which an image of said light beam is formed as a small light spot on said sample, iv) a light receiving optical means with which the light beam radiated out of said sample is condensed, and an image of the condensed light beam is formed as a point image, v) a photodetector which detects said point image, vi) a scanning means which moves said light projecting optical means and said light receiving optical means in synchronization with each other with respect to said sample supporting member such that said light spot scans said sample in main scanning directions and sub-scanning directions, and vii) an optical fiber having a first edge surface, on which an image of the light beam coming from said light receiving optical means is formed, and a second edge surface from which the light beam, which has entered said optical fiber from said first edge surface, is radiated to said photodetector, wherein a pinhole is formed in a core part at said first edge surface of said optical fiber, and the image of the light beam coming from said light receiving optical means is formed at the position at which said pinhole is formed.
Claim 8
Dependent Claim 229 words
A confocal scanning microscope comprising: i) a sample supporting member on which a sample is supported, ii) a light source which produces a light beam, iii) a light projecting optical means with which an image of said light beam is formed as a small light spot on said sample, iv) a light receiving optical means with which the light beam radiated out of said sample is condensed, and an image of the condensed light beam is formed as a point image, v) a photodetector which detects said point image, vi) a scanning means which moves said light projecting optical means and said light receiving optical means in synchronization with each other with respect to said sample supporting member such that said light spot scans said sample in main scanning directions and sub-scanning directions, and vii) an optical fiber having a first edge surface, on which an image of the light beam coming from said light receiving optical means is formed, and a second edge surface from which the light beam, which has entered said optical fiber from said first edge surface, is radiated to said photodetector, wherein a pinhole is formed in a core part at said first edge surface of said optical fiber, and the image of the light beam coming from said light receiving optical means is formed at the position at which said pinhole is formed.
Claim 9
Dependent Claim 35 words
A confocal scanning microscope as defined in claim 6 wherein a means is provided which reciprocally moves said sample supporting member in directions, which are normal to said main scanning directions and said sub-scanning directions.
Claim 10
Dependent Claim 16 words
A confocal scanning microscope as defined in claim 6 wherein said light source is a laser.
Claim 11
Dependent Claim 91 words
A scanning microscope comprising: i) a sample supporting member on which a sample is supported, ii) an optical means which irradiates a light beam to said sample, and iii) a scanning means which moves said optical means with respect to said sample supporting member such that said light beam scans said sample, wherein the improvement comprises the provision of a mechanism for keeping a member, which is moved during said scanning, and a guide member, which supports and guides said member, such that they are not in contact with each other.
Claim 12
Dependent Claim 91 words
A scanning microscope comprising: i) a sample supporting member on which a sample is supported, ii) an optical means which irradiates a light beam to said sample, and iii) a scanning means which moves said optical means with respect to said sample supporting member such that said light beam scans said sample, wherein the improvement comprises the provision of a mechanism for keeping a member, which is moved during said scanning, and a guide member, which supports and guides said member, such that they are not in contact with each other.
Claim 13
Dependent Claim 43 words
A scanning microscope as defined in claim 9 wherein said mechanism for keeping said member, which is moved during the scanning, and said guide member such that they are not in contact with each other jets a gas to the region between them.
Claim 14
Dependent Claim 44 words
A scanning microscope as defined in claim 9 wherein said mechanism for keeping said member, which is moved during the scanning, and said guide member such that they are not in contact with each other causes them to repulse each other by magnetic force.
Claim 15
Dependent Claim 16 words
A scanning microscope as defined in claim 9 wherein said light beam is a laser beam.
Claim 16
Dependent Claim 189 words
A confocal scanning mechanism comprising: i) a material supporting member on which a material to be scanned is supported, ii) a light source which produces a light beam, iii) a light projecting optical means with which an image of said light beam is formed as a small light spot on said material to be scanned, iv) a light receiving optical means with which the light beam radiated out of said material to be scanned is condensed, and an image of the condensed light beam is formed as a point image, v) a photodetector which detects said point image, vi) a movable member which supports said light projecting optical means and said light receiving optical means together, vii) a main scanning means which reciprocally moves said movable member such that said light spot scans said material, which is to be scanned, in main scanning directions, and viii) a sub-scanning means which moves said material supporting member with respect to said movable member in sub-scanning directions, which are approximately normal to said main scanning directions, whereby said material to be scanned is scanned with said light spot in said sub-scanning directions.
Claim 17
Dependent Claim 189 words
A confocal scanning mechanism comprising: i) a material supporting member on which a material to be scanned is supported, ii) a light source which produces a light beam, iii) a light projecting optical means with which an image of said light beam is formed as a small light spot on said material to be scanned, iv) a light receiving optical means with which the light beam radiated out of said material to be scanned is condensed, and an image of the condensed light beam is formed as a point image, v) a photodetector which detects said point image, vi) a movable member which supports said light projecting optical means and said light receiving optical means together, vii) a main scanning means which reciprocally moves said movable member such that said light spot scans said material, which is to be scanned, in main scanning directions, and viii) a sub-scanning means which moves said material supporting member with respect to said movable member in sub-scanning directions, which are approximately normal to said main scanning directions, whereby said material to be scanned is scanned with said light spot in said sub-scanning directions.
Claim 18
Dependent Claim 21 words
A confocal scanning mechanism as defined in claim 13 wherein said movable member also supports said light source and said photodetector.
Claim 19
Dependent Claim 23 words
A confocal scanning mechanism as defined in claim 13 wherein said light projecting optical means also serves as said light receiving optical means.
Claim 20
Dependent Claim 37 words
A confocal scanning mechanism as defined in claim 13 wherein in a means is provided which reciprocally moves said material supporting member in directions, which are normal to said main scanning directions and said sub scanning directions.
Claim 21
Dependent Claim 16 words
A confocal scanning mechanism as defined in claim 13 wherein said light source is a laser.
Claim 22
Dependent Claim 100 words
A scanning mechanism comprising: i) a material supporting member on which a material to be scanned is supported, ii) an optical means which irradiates a light beam to said material to be scanned, and iii) a scanning means which moves said optical means with respect to said material supporting member such that said light beam scans said material to be scanned, wherein the improvement comprises the provision of a mechanism for keeping a member, which is moved during said scanning, and a guide member, which supports and guides said member, such that they are not in contact with each other.
Claim 23
Dependent Claim 100 words
A scanning mechanism comprising: i) a material supporting member on which a material to be scanned is supported, ii) an optical means which irradiates a light beam to said material to be scanned, and iii) a scanning means which moves said optical means with respect to said material supporting member such that said light beam scans said material to be scanned, wherein the improvement comprises the provision of a mechanism for keeping a member, which is moved during said scanning, and a guide member, which supports and guides said member, such that they are not in contact with each other.
Claim 24
Dependent Claim 43 words
A scanning mechanism as defined in claim 18 wherein said mechanism for keeping said member, which is moved during the scanning, and said guide member such that they are not in contact with each other jets a gas to the region between them.
Claim 25
Dependent Claim 44 words
A scanning mechanism as defined in claim 18 wherein said mechanism for keeping said member, which is moved during the scanning, and said guide member such that they are not in contact with each other causes them to repulse each other by magnetic force.
Claim 26
Dependent Claim 16 words
A scanning mechanism as defined in claim 18 wherein said light beam is a laser beam.

References Cited (Backward Citations)

JPS62217218A Cited
US4863226A Cited
US4897537A Cited
US4893008A Cited
US5032720A Cited
US5035476A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1995-01-13 1995-07-15 1996-01-14 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1999-01-13 1999-07-15 2000-01-14 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2003-01-13 2003-07-15 2004-01-14 $7700.00 Window Closed / Lapsed

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