US5161085A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Moisture sensitive element and method of manufacturing the same
Assignee: Azbil Corp
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Filing: 1992-02-18
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Granted: 1992-11-03
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Expires: 2012-02-18
Abstract
Abstract A moisture sensitive element includes a moisture sensitive film consisting of a polymer obtained by polymerizing and crosslinking a fluorine-containing polyimide oligomer or a polyisoimide oligomer having acetylene as a terminal group and its isomer. The moisture sensitive element also includes electrodes formed on upper and lower surfaces of the moisture sensitive film.
Inventors
- 👤 Yoshirou Sakai
- 👤 Yoshihiko Sadaoka
- 👤 Masanobu Matsuguchi
- 👤 Takaaki Kuroiwa
- 👤 Tooru Abe
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 09:27
CPC Classifications
G; G01; G01N; G01N27/00; G01N27/02; G01N27/22; G01N27/223; G01N27/225
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
35 words
A moisture sensitive element comprising: a moisture sensitive film consisting of a polymer obtained by polymerizing and crosslinking a fluorine-containing polyimide oligomer; and electrodes formed on upper and lower surfaces of said moisture sensitive film.
Claim 2
Dependent Claim
35 words
A moisture sensitive element comprising: a moisture sensitive film consisting of a polymer obtained by polymerizing and crosslinking a fluorine-containing polyimide oligomer; and electrodes formed on upper and lower surfaces of said moisture sensitive film.
Claim 3
Dependent Claim
25 words
An element according to claim 1, wherein said electrode formed on said lower surface of said moisture sensitive film is formed on an insulating substrate.
Claim 4
Independent Claim
62 words
A method of manufacturing a moisture sensitive element having electrodes on upper and lower surfaces of a moisture sensitive film, comprising the steps of: using a fluorine-containing polyimide oligomer as a starting material to form a thin film; and heat-treating said thin film in a nitrogen atmosphere at a temperature of not less than 200° C. to form said moisture sensitive film.
Claim 5
Independent Claim
62 words
A method of manufacturing a moisture sensitive element having electrodes on upper and lower surfaces of a moisture sensitive film, comprising the steps of: using a fluorine-containing polyimide oligomer as a starting material to form a thin film; and heat-treating said thin film in a nitrogen atmosphere at a temperature of not less than 200° C. to form said moisture sensitive film.
Claim 6
Dependent Claim
41 words
A method according to claim 3, wherein the starting material comprises an oligomer consisting of at least one mixer of oligomers having average degrees n of polymerization of the fluorine-containing polyimide oligomer to fall within a range of n=1 to n=30.
Claim 7
Dependent Claim
42 words
A moisture sensitive element comprising: a moisture sensitive film consisting of a polymer obtained by polymerizing a polyisoimide oligomer having acetylene as a terminal group and an isomer thereof; and electrodes formed on upper and lower surfaces of said moisture sensitive film.
Claim 8
Dependent Claim
42 words
A moisture sensitive element comprising: a moisture sensitive film consisting of a polymer obtained by polymerizing a polyisoimide oligomer having acetylene as a terminal group and an isomer thereof; and electrodes formed on upper and lower surfaces of said moisture sensitive film.
Claim 9
Dependent Claim
25 words
An element according to claim 5, wherein said electrode formed on said lower surface of said moisture sensitive film is formed on an insulating substrate.
Claim 10
Independent Claim
70 words
A method of manufacturing a moisture sensitive element having electrodes on upper and lower surfaces of a moisture sensitive film, comprising the steps of: using a polyimide oligomer having acetylene as a terminal group and an isomer thereof as starting materials to form a thin film, and heat-treating said thin film in a nitrogen atmosphere at a temperature of not less than 200° C. to form said moisture sensitive film.
Claim 11
Independent Claim
70 words
A method of manufacturing a moisture sensitive element having electrodes on upper and lower surfaces of a moisture sensitive film, comprising the steps of: using a polyimide oligomer having acetylene as a terminal group and an isomer thereof as starting materials to form a thin film, and heat-treating said thin film in a nitrogen atmosphere at a temperature of not less than 200° C. to form said moisture sensitive film.
Claim 12
Dependent Claim
49 words
A method according to claim 7, wherein the starting materials comprise oligomers consisting of at least one mixture of oligomers having average degrees n of polymerization of the polyimide oligomer having acetylene as a terminal group and the isomer thereof to fall within a range of n=1 to n=30.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-11-03 | 1996-05-04 | 1996-11-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-11-03 | 2000-05-04 | 2000-11-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-11-03 | 2004-05-04 | 2004-11-03 | $7700.00 | Window Closed / Lapsed |