US5156982A
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Pattern shift measuring method
Assignee: Shin-Etsu Handotai Co Ltd
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Filing: 1992-01-03
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Granted: 1992-10-20
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Expires: 2012-01-03
Abstract
Abstract A method capable of measuring pattern shift of a semiconductor wafer in a short period of time with utmost ease and in an inexpensive manner is disclosed, wherein a main scale pattern and a vernier scale pattern are formed in parallel spaced confrontation on the semiconductor wafer, then one of the main scale pattern and the vernier scale pattern is covered with an oxide film layer, subsequently an epitaxial growing process is performed to form an epitaxial layer over the semiconductor wafer, and after that the dispalcement between the main scale pattern and the vernier scale pattern is measured.
Inventors
- 👤 Takatoshi Nagoya
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 09:22
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70483; G03F7/70605; G03F7/70616; G03F7/70633
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
81 words
A method of measuring pattern shift of a semiconductor wafer, comprising the steps of: forming a main scale pattern and a vernier scale pattern in parallel spaced, confronting relation to one another on the semiconductor wafer; forming an oxide film layer covering either said main scale pattern or said vernier scale pattern; thereafter, performing epitaxial growing process to form an epitaxial layer over said semiconductor wafer; and measuring the displacement of said main scale pattern relative to said vernier scale pattern.
Claim 2
Independent Claim
81 words
A method of measuring pattern shift of a semiconductor wafer, comprising the steps of: forming a main scale pattern and a vernier scale pattern in parallel spaced, confronting relation to one another on the semiconductor wafer; forming an oxide film layer covering either said main scale pattern or said vernier scale pattern; thereafter, performing epitaxial growing process to form an epitaxial layer over said semiconductor wafer; and measuring the displacement of said main scale pattern relative to said vernier scale pattern.
Claim 3
Dependent Claim
23 words
A method according to claim 1, wherein said main scale pattern and said vernier scale pattern are spaced by at least 400 μm.
Claim 4
Dependent Claim
18 words
A method according to claim 1, wherein said main scale pattern is covered with said oxide film layer.
Claim 5
Dependent Claim
50 words
A method according to claim 1, wherein pattern shift PS of said semiconductor wafer is determined according to the following equation: PS=T/D where D is the measurement representing the displacement of said main scale pattern relative to said vernier scale pattern, and T is the thickness of said epitaxial layer.
Claim 6
Dependent Claim
81 words
A method according to claim 1, wherein simultaneously with the formation of said main scale pattern and said vernier scale pattern, a second main scale pattern and a second vernier scale pattern are formed in parallel spaced, confronting relation to one another on the semiconductor wafer, said main scale pattern and said vernier scale pattern extending in a first direction, said second main scale pattern and said second vernier scale pattern extending in a second direction perpendicular to said first direction.
Claim 7
Dependent Claim
35 words
A method according to claim 5, wherein said main scale pattern and said second main scale pattern are spaced, respectively, from said vernier scale pattern and said second vernier pattern by at least 400 μm.
Claim 8
Dependent Claim
24 words
A method according to claim 5, wherein said main scale pattern and said second main scale pattern are covered with said oxide film layer.
Claim 9
Dependent Claim
85 words
A method according to claim 5, wherein pattern shift PS of said semiconductor wafer in each of said first and second directions is determined according to the following equation: PS=T/D where D is the measurement representing the displacement in said first direction of said main scale pattern relative to said vernier scale pattern or the measurement representing the displacement in said second direction of said second main scale pattern relative to said second vernier scale pattern, and T is the thickness of said epitaxial layer.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-10-20 | 1996-04-20 | 1996-10-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-10-20 | 2000-04-20 | 2000-10-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-10-20 | 2004-04-20 | 2004-10-20 | $7700.00 | Window Closed / Lapsed |