US4606643A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Fine alignment system
Assignee: ASML Holding NV
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Filing: 1983-06-20
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Granted: 1986-08-19
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Expires: 2003-06-20
Abstract
Abstract The present invention is directed to method and apparatus for determining the resolution and range of the mask and wafer stages and the overall accuracy in a lithographic projection system, the system including first indicia disposed on a first member, second indicia disposed on a second member, the spacing between the indicia when the indicia of the first member is projected onto the indicia of the other member coarsely indicating the degree of misalignment between the members when making a fine motion alignment measurement, a first scale disposed on the first member, a second scale disposed on the second member, each of the scales having a plurality of spaced fingers, all of the fingers being of substantially the same width, the pitch of the fingers of one scale being different than the pitch of the fingers on the other scale so that when the scale of one member is projected onto the scale of the other member the pair of fingers which coincide indicates a fine degree of fine motion alignment measurement from an alignment axis, one of the members being a test mask and the other of the members being a wafter-tool. In one form of the invention, the first member and the second member are in substantially exact alignment when a central finger of the first scale coincides with a central finger of the second scale along the alignment axis.
Inventors
- 👤 Wai-Ming Tam
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 23:54
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70; G03F9/7003; G03F9/7023; G03F9/7073; G03F9/7076
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
185 words
An alignment system for use with lithographic projection systems comprising, in combination: first indicia disposed on first and second members; second indicia disposed on first and second members; the space between said indicia when the first indicia of one member is projected onto the second indicia of the other member coarsely indicating the degree of misalignment between said members when making a fine motion alignment measurement; a first scale disposed on said first and said second members, a said second scale disposed on said first and said second members; each of said scales including a plurality of spaced fingers, all of said fingers being of substantially the same width; the pitch of the fingers of one scale being different than the pitch of the fingers on the other scale so that when the first scale of one member is projected onto the second scale of the other member, the pair of fingers which coincide indicates a fine degree of fine motion alignment measurement from an alignment axis; and one of said members being a test mask and the other of said members being a wafer-tool.
Claim 2
Dependent Claim
185 words
An alignment system for use with lithographic projection systems comprising, in combination: first indicia disposed on first and second members; second indicia disposed on first and second members; the space between said indicia when the first indicia of one member is projected onto the second indicia of the other member coarsely indicating the degree of misalignment between said members when making a fine motion alignment measurement; a first scale disposed on said first and said second members, a said second scale disposed on said first and said second members; each of said scales including a plurality of spaced fingers, all of said fingers being of substantially the same width; the pitch of the fingers of one scale being different than the pitch of the fingers on the other scale so that when the first scale of one member is projected onto the second scale of the other member, the pair of fingers which coincide indicates a fine degree of fine motion alignment measurement from an alignment axis; and one of said members being a test mask and the other of said members being a wafer-tool.
Claim 3
Dependent Claim
41 words
An alignment system according to claim 1 wherein said first member and said second member are in substantially exact alignment when a central finger of said first scale coincides with a central finger of the second scale along said aligment axis.
Claim 4
Dependent Claim
56 words
An alignment system according to claim 1 wherein said first member and said second member are in substantially exact alignment when said first indicia is in alignment with said second indicia along said alignment axis and a central finger of the first scale coincides with a central finger of the second scale along said alignment axis.
Claim 5
Dependent Claim
361 words
An alignment system for use with lithographic projection systems comprising, in combination: first indicia disposed on a first and second members; second indicia disposed on said first and said second members; third indicia disposed on said first and said second members; fourth indicia disposed on said first and said second members; the space between the first and second indicia when the first indicia of one member is projected onto the second indicia of the other member coarsely indicating the degree of horizontal misalignment between said members when making a fine motion alignment measurement, and the spacing between said third and fourth indicia when the third indicia of one member is projected onto the fourth indicia of the other member coarsely indicating the degree of vertical misalignment between said members when making a fine motion alignment measurement; a first scale disposed on said first and said second members; a second scale disposed on said first and said second members; a third scale disposed on said first and said second members; a fourth scale disposed on said first and said second members; each of said scales including a plurality of spaced fingers, all of the fingers on the first and second scales being of substantially the same width, all the fingers on said third and fourth scales being of substantially the same width; the pitch of the fingers of the first scale being different than the pitch of the fingers on the second scale so that when the first scale on one member is projected onto the second scale on the other member, the pair of fingers which coincide indicates a fine degree of fine motion horizontal alignment measurement from a first alignment axis, and the pitch of the fingers of the third scale being different than the pitch of the fingers on the fourth scale so that when the third scale on one member is projected onto the fourth scale of the other member the pair of fingers which coincide indicates a fine degree of fine motion vertical alignment measurement from a second alignment axis; one of said members being a test mask and the other of said members being a wafer-tool.
Claim 6
Dependent Claim
361 words
An alignment system for use with lithographic projection systems comprising, in combination: first indicia disposed on a first and second members; second indicia disposed on said first and said second members; third indicia disposed on said first and said second members; fourth indicia disposed on said first and said second members; the space between the first and second indicia when the first indicia of one member is projected onto the second indicia of the other member coarsely indicating the degree of horizontal misalignment between said members when making a fine motion alignment measurement, and the spacing between said third and fourth indicia when the third indicia of one member is projected onto the fourth indicia of the other member coarsely indicating the degree of vertical misalignment between said members when making a fine motion alignment measurement; a first scale disposed on said first and said second members; a second scale disposed on said first and said second members; a third scale disposed on said first and said second members; a fourth scale disposed on said first and said second members; each of said scales including a plurality of spaced fingers, all of the fingers on the first and second scales being of substantially the same width, all the fingers on said third and fourth scales being of substantially the same width; the pitch of the fingers of the first scale being different than the pitch of the fingers on the second scale so that when the first scale on one member is projected onto the second scale on the other member, the pair of fingers which coincide indicates a fine degree of fine motion horizontal alignment measurement from a first alignment axis, and the pitch of the fingers of the third scale being different than the pitch of the fingers on the fourth scale so that when the third scale on one member is projected onto the fourth scale of the other member the pair of fingers which coincide indicates a fine degree of fine motion vertical alignment measurement from a second alignment axis; one of said members being a test mask and the other of said members being a wafer-tool.
Claim 7
Dependent Claim
85 words
An alignment system according to claim 4 wherein said first member and said second member are in substantially exact alignment in the horizontal direction when a central finger of said first scale coicides with a central finger of the second scale along said first alignment axis, and wherein said first member and said second are in substantially exact alignment in the vertical direction when a central finger of said third scale coincides with a central finger of the fourth scale along said second alignment axis.
Claim 8
Dependent Claim
118 words
An alignment system according to claim 4 wherein said first member and said second member are in substantially exact alignment in the horizontal direction when said first indicia is in alignment with said second indicia along said first alignment axis and a central finger of the first scale coincides with a central finger of the second scale along said first alignment axis, and wherein said first member and said second member are in substantially exact alignment in the vertical direction when said third indicia is in alignment with said fourth indicia along said second alignment axis and a central finger of the third scale coincides with a central finger of the fourth scale along said second alignment axis.
Claim 9
Independent Claim
174 words
A method of aligning a first member with respect to a second spaced member, one of said members being a test mask and the other of said members being a wafer-tool mounted in a lithographic projection system, said method comprising the steps of: observing first indicia on said first and said second member; observing second indicia on said first and said second member; measuring the spacing between said first indicia and said second indicia to coarsely indicate the degree of misalignment between said members; observing a first scale disposed on said first member and said second member; observing a second scale disposed on said first member and said second member; each of said first and said second scales including a plurality of spaced fingers, all of said fingers being of substantially the same width, the pitch of the fingers of said first scale being different than the pitch of the fingers on said second scale; observing the pair of fingers which coincide to thereby determine a fine degree of misalignment from an alignment axis.
Claim 10
Independent Claim
174 words
A method of aligning a first member with respect to a second spaced member, one of said members being a test mask and the other of said members being a wafer-tool mounted in a lithographic projection system, said method comprising the steps of: observing first indicia on said first and said second member; observing second indicia on said first and said second member; measuring the spacing between said first indicia and said second indicia to coarsely indicate the degree of misalignment between said members; observing a first scale disposed on said first member and said second member; observing a second scale disposed on said first member and said second member; each of said first and said second scales including a plurality of spaced fingers, all of said fingers being of substantially the same width, the pitch of the fingers of said first scale being different than the pitch of the fingers on said second scale; observing the pair of fingers which coincide to thereby determine a fine degree of misalignment from an alignment axis.
References Cited (Backward Citations)
US4386849A
Cited
US4388386A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-08-18 | 1990-02-17 | 1990-08-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-08-18 | 1994-02-17 | 1994-08-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-08-18 | 1998-02-17 | 1998-08-19 | $7700.00 | Window Closed / Lapsed |