US5153859A — Laminated piezoelectric structure and process of …

Claim 1

Independent Claim 68 words

A process of forming a laminated piezoelectric structure, comprising the steps of: (a) providing a plurality of polarized piezoelectric films comprising a copolymer of vinylidene fluoride and trifluoroethylene; (b) interposing between and in surface contact with said films a solution comprising a copolymer of vinylidene fluoride and trifluoroethylene and a suitable solvent; and (c) evaporating substantially all of the solvent of said solution thereby laminating said piezoelectric films.

Claim 2

Dependent Claim 68 words

A process of forming a laminated piezoelectric structure, comprising the steps of: (a) providing a plurality of polarized piezoelectric films comprising a copolymer of vinylidene fluoride and trifluoroethylene; (b) interposing between and in surface contact with said films a solution comprising a copolymer of vinylidene fluoride and trifluoroethylene and a suitable solvent; and (c) evaporating substantially all of the solvent of said solution thereby laminating said piezoelectric films.

Claim 3

Dependent Claim 46 words

A process according to claim 1, further comprising the steps of: applying an electroconductive layer over the exposed major surface of one of the outermost piezoelectric films; and applying an additional electroconductive layer over the exposed major surface of the other of the outermost piezoelectric films.

Claim 4

Dependent Claim 17 words

A process according to claim 2 wherein said piezoelectric films are polarized in substantially the same direction.

Claim 5

Dependent Claim 16 words

A process according to claim 2 wherein said piezoelectric films are polarized in substantially opposed directions.

Claim 6

Dependent Claim 24 words

A process according to claim 3 wherein said solution applied between at least two of said piezoelectric films further comprises finely divided electroconductive particles.

Claim 7

Dependent Claim 12 words

A process according to claim 5 wherein said electroconductive particles are silver.

Claim 8

Dependent Claim 18 words

A process according to claim 1 wherein step (c) is carried out at an elevated temperature and pressure.

Claim 9

Dependent Claim 22 words

A process according to claim 7 wherein step (c) is carried out in a press with platens heated to about 50°-60° C.

Claim 10

Dependent Claim 16 words

A process according to claim 1 wherein step (a) includes at least three polarized piezoelectric films.

Claim 11

Dependent Claim 84 words

A process according to claim 1, further comprising the steps of: providing an additional polarized piezoelectric film comprising a copolymer of vinylidene fluoride and trifluoroethylene; interposing between and in surface contact with the exposed surface of one of the previously laminated piezoelectric films and said additional piezoelectric film a solution comprising a copolymer of vinylidene fluoride and trifluoroethylene and a suitable solvent; and evaporating substantially all of the solvent of said solution thereby laminating said additional piezoelectric film with said previously laminated piezoelectric films.

Claim 12

Dependent Claim 9 words

A product produced by the process of claim 1.

Claim 13

Dependent Claim 9 words

A product produced by the process of claim 2.

Claim 14

Dependent Claim 9 words

A product produced by the process of claim 5.

Claim 15

Dependent Claim 131 words

A process of forming a laminated piezoelectric transducer, comprising the steps of: (a) providing a plurality of polarized piezoelectric films comprising a copolymer of about 60 to about 95 mole percent vinylidene fluoride and about 5 to about 40 mole percent trifluoroethylene; (b) interposing between and in surface contact with said films a solution comprising a copolymer of about 60 to about 95 mole percent vinylidene fluoride and about 5 to about 40 mole percent trifluoroethylene; (c) evaporating under an elevated temperature and pressure substantially all of the solvent thereby laminating said piezoelectric films; (d) applying an electroconductive layer over the exposed major surface of one of the outermost piezoelectric films; and (e) applying an additional electroconductive layer over the exposed major surface of the other of the outermost piezoelectric films.

Claim 16

Dependent Claim 131 words

A process of forming a laminated piezoelectric transducer, comprising the steps of: (a) providing a plurality of polarized piezoelectric films comprising a copolymer of about 60 to about 95 mole percent vinylidene fluoride and about 5 to about 40 mole percent trifluoroethylene; (b) interposing between and in surface contact with said films a solution comprising a copolymer of about 60 to about 95 mole percent vinylidene fluoride and about 5 to about 40 mole percent trifluoroethylene; (c) evaporating under an elevated temperature and pressure substantially all of the solvent thereby laminating said piezoelectric films; (d) applying an electroconductive layer over the exposed major surface of one of the outermost piezoelectric films; and (e) applying an additional electroconductive layer over the exposed major surface of the other of the outermost piezoelectric films.

Claim 17

Dependent Claim 20 words

A process according to claim 14 wherein said solution comprises about 20 to about 40 weight percent of the copolymer.

Claim 18

Dependent Claim 23 words

A process according to claim 15 wherein said solvent is selected from the group consisting of acetone, methyl ethyl ketone, and ethyl acetate.

Claim 19

Dependent Claim 24 words

A process according to claim 14 wherein the solution applied between at least two of said piezoelectric films further comprises finely divided electroconductive particles.

Claim 20

Dependent Claim 53 words

A process according to claim 17 wherein the solution having the finely divided electroconductive particles comprises: about 9 to about 24 weight percent of the copolymer of vinylidene fluoride and trifluoroethylene; about 12 to about 28 weight percent of silver flake; and about 60 to about 70 weight percent of the suitable solvent.

Claim 21

Dependent Claim 53 words

A process according to claim 18 wherein the solution having the finely divided electroconductive particles comprises: about 12 to about 16 weight percent of the copolymer of vinylidene fluoride and trifluoroethylene; about 18 to about 24 weight percent of silver flake; and about 60 to about 70 weight percent of the suitable solvent.

Claim 22

Dependent Claim 22 words

A process according to claim 14 wherein step (c) is carried out in a press with platens heated to about 50°-60° C.

Claim 23

Dependent Claim 24 words

A process according to claim 14 wherein said solution is interposed at a thickness of about 0.25 to about 3 mils between said films.

Claim 24

Dependent Claim 20 words

A process according to claim 14 wherein said polarized piezoelectric films have a thickness of at least about 100 microns.

Claim 25

Dependent Claim 9 words

A product produced by the process of claim 14.

Claim 26

Dependent Claim 9 words

A product produced by the process of claim 17.

Claim 27

Dependent Claim 52 words

A piezoelectric transducer, comprising: a plurality of stacked polarized piezoelectric films comprising a copolymer of vinylidene fluoride and trifluoroethylene laminated together with an evaporated solution which comprised a copolymer of vinylidene fluoride and trifluoroethylene and a suitable solvent, and a pair of electrodes sandwiched around the laminated stack of polarized piezoelectric films.

Claim 28

Dependent Claim 52 words

A piezoelectric transducer, comprising: a plurality of stacked polarized piezoelectric films comprising a copolymer of vinylidene fluoride and trifluoroethylene laminated together with an evaporated solution which comprised a copolymer of vinylidene fluoride and trifluoroethylene and a suitable solvent, and a pair of electrodes sandwiched around the laminated stack of polarized piezoelectric films.

Claim 29

Dependent Claim 26 words

A piezoelectric transducer according to claim 25, further comprising: finely divided electroconductive particles in the evaporated solution disposed between at least two of the piezoelectric films.

Claim 30

Dependent Claim 73 words

A hydrophone, comprising: a plurality of transducers comprising a plurality of stacked polarized piezoelectric films comprising a copolymer of vinylidene fluoride and trifluoroethylene laminated together with an evaporated solution which comprised a copolymer of vinylidene fluoride and trifluoroethylene and a suitable solvent, and a pair of electrodes sandwiched around the laminated stack of polarized piezoelectric films; and means for electrically coupling the electrodes of said transducers to form a plurality of interconnected transducers.

Claim 31

Dependent Claim 73 words

A hydrophone, comprising: a plurality of transducers comprising a plurality of stacked polarized piezoelectric films comprising a copolymer of vinylidene fluoride and trifluoroethylene laminated together with an evaporated solution which comprised a copolymer of vinylidene fluoride and trifluoroethylene and a suitable solvent, and a pair of electrodes sandwiched around the laminated stack of polarized piezoelectric films; and means for electrically coupling the electrodes of said transducers to form a plurality of interconnected transducers.

Claim 32

Dependent Claim 14 words

A hydrophone according to claim 27 wherein said electrodes comprise an aluminum-silicon carbide composite.

Claim 33

Dependent Claim 25 words

A hydrophone according to claim 27, further comprising: finely divided electroconductive particles in the evaporated solvent disposed between at least two of the piezoelectric films.

Claim 34

Dependent Claim 133 words

A process of forming a laminated piezoelectric transducer, comprising the steps of: (a) applying an adhesive layer to the outer surface of an electroconductive conduit, said adhesive layer is selected to allow for electrical conduction between said conduit and a subsequently applied polarized piezoelectric film; (b) applying a solution comprising a copolymer of vinylidene fluoride and trifluoroethylene and a suitable solvent to one major face of a polarized piezoelectric film comprising a copolymer of vinylidene fluoride and trifluoroethylene; (c) wrapping said polarized piezoelectric film around said conduit so that said major face containing said solution faces said conduit; (d) evaporating substantially all of the solvent of said solution thereby laminating adjacent turns of said polarized piezoelectric film; and (e) applying an electroconductive layer over the exposed outer surface of said polarized piezoelectric film.

Claim 35

Dependent Claim 133 words

A process of forming a laminated piezoelectric transducer, comprising the steps of: (a) applying an adhesive layer to the outer surface of an electroconductive conduit, said adhesive layer is selected to allow for electrical conduction between said conduit and a subsequently applied polarized piezoelectric film; (b) applying a solution comprising a copolymer of vinylidene fluoride and trifluoroethylene and a suitable solvent to one major face of a polarized piezoelectric film comprising a copolymer of vinylidene fluoride and trifluoroethylene; (c) wrapping said polarized piezoelectric film around said conduit so that said major face containing said solution faces said conduit; (d) evaporating substantially all of the solvent of said solution thereby laminating adjacent turns of said polarized piezoelectric film; and (e) applying an electroconductive layer over the exposed outer surface of said polarized piezoelectric film.

Claim 36

Dependent Claim 19 words

A process according to claim 30 wherein said polarized piezoelectric film in step (c) is scrolled around said conduit.

Claim 37

Dependent Claim 38 words

A process according to claim 31 wherein said copolymer of said polarized piezoelectric film and said solution comprises from about 60 to about 95 mole percent vinylidene fluoride and from about 5 to about 40 mole percent trifluoroethylene.

Claim 38

Dependent Claim 20 words

A process according to claim 31 wherein said solution comprises about 20 to about 40 weight percent of said copolymer.

Claim 39

Dependent Claim 26 words

A process according to claim 33 wherein the solvent of said solution is selected from the group consisting of acetone, methyl ethyl ketone, and ethyl acetate.

Claim 40

Dependent Claim 9 words

A product produced by the process of claim 30.

Claim 41

Dependent Claim 9 words

A product produced by the process of claim 34.

Claim 42

Dependent Claim 82 words

A piezoelectric transducer, comprising a polarized piezoelectric film comprising a copolymer of vinylidene fluoride and trifluoroethylene scrolled around an electroconductive conduit having an adhesive layer which allows for electrical conduction between said conduit and said piezoelectric film, and wherein adjacent turns of the scrolled polarized piezoelectric film are laminated together with an evaporated solution which comprised a copolymer of vinylidene fluoride and trifluoroethylene and a suitable solvent; and an electroconductive layer disposed over the exposed outer surface of said polarized piezoelectric film.

Claim 43

Dependent Claim 82 words

A piezoelectric transducer, comprising a polarized piezoelectric film comprising a copolymer of vinylidene fluoride and trifluoroethylene scrolled around an electroconductive conduit having an adhesive layer which allows for electrical conduction between said conduit and said piezoelectric film, and wherein adjacent turns of the scrolled polarized piezoelectric film are laminated together with an evaporated solution which comprised a copolymer of vinylidene fluoride and trifluoroethylene and a suitable solvent; and an electroconductive layer disposed over the exposed outer surface of said polarized piezoelectric film.

Claim 44

Dependent Claim 105 words

A hydrophone, comprising: a plurality of transducers comprising a polarized piezoelectric film comprising a copolymer of vinylidene fluoride and trifluoroethylene scrolled around an electroconductive conduit having an adhesive layer which allows for electrical conduction between said conduit and said piezoelectric film and wherein adjacent turns of the scrolled polarized piezoelectric film are laminated together with an evaporated solution which comprised a copolymer of vinylidene fluoride and trifluoroethylene and a suitable solvent, and an electroconductive layer disposed over the exposed outer surface of said polarized piezoelectric film; and means for electrically coupling the electroconductive conduits and said electroconductive layers to form a plurality of interconnected transducers.

Claim 45

Dependent Claim 105 words

A hydrophone, comprising: a plurality of transducers comprising a polarized piezoelectric film comprising a copolymer of vinylidene fluoride and trifluoroethylene scrolled around an electroconductive conduit having an adhesive layer which allows for electrical conduction between said conduit and said piezoelectric film and wherein adjacent turns of the scrolled polarized piezoelectric film are laminated together with an evaporated solution which comprised a copolymer of vinylidene fluoride and trifluoroethylene and a suitable solvent, and an electroconductive layer disposed over the exposed outer surface of said polarized piezoelectric film; and means for electrically coupling the electroconductive conduits and said electroconductive layers to form a plurality of interconnected transducers.

Claim 46

Dependent Claim 155 words

A process of forming a laminated piezoelectric transducer, comprising the steps of: (a) applying an adhesive layer to the outer surface of an electroconductive conduit, said adhesive layer is selected to allow for electrical conduction between said conduit and a subsequently applied polarized piezoelectric ribbon; (b) spirally wrapping a first polarized piezoelectric ribbon comprising a copolymer of vinylidene fluoride and trifluoroethylene around said conduit; (c) applying a solution comprising a copolymer of vinylidene fluoride and trifluoroethylene and a suitable solvent to one major face of an additional polarized piezoelectric ribbon comprising a copolymer of vinylidene fluoride and trifluoroethylene; (d) spirally wrapping the additional polarized piezoelectric ribbon around said conduit so that said major face containing said solution contacts said first polarized piezoelectric ribbon; (e) evaporating substantially all of the solvent of said solution thereby laminating said polarized piezoelectric ribbons; and (f) applying an electroconductive layer over the exposed surface of the outermost polarized piezoelectric ribbon.

Claim 47

Dependent Claim 155 words

A process of forming a laminated piezoelectric transducer, comprising the steps of: (a) applying an adhesive layer to the outer surface of an electroconductive conduit, said adhesive layer is selected to allow for electrical conduction between said conduit and a subsequently applied polarized piezoelectric ribbon; (b) spirally wrapping a first polarized piezoelectric ribbon comprising a copolymer of vinylidene fluoride and trifluoroethylene around said conduit; (c) applying a solution comprising a copolymer of vinylidene fluoride and trifluoroethylene and a suitable solvent to one major face of an additional polarized piezoelectric ribbon comprising a copolymer of vinylidene fluoride and trifluoroethylene; (d) spirally wrapping the additional polarized piezoelectric ribbon around said conduit so that said major face containing said solution contacts said first polarized piezoelectric ribbon; (e) evaporating substantially all of the solvent of said solution thereby laminating said polarized piezoelectric ribbons; and (f) applying an electroconductive layer over the exposed surface of the outermost polarized piezoelectric ribbon.

Claim 48

Dependent Claim 16 words

A process according to claim 39 wherein steps (c) through (e) are repeated at least once.

Claim 49

Dependent Claim 41 words

A process according to claim 39 wherein said copolymer of said first and additional polarized piezoelectric ribbons and said solution comprises from about 60 to about 95 mole percent vinylidene fluoride and from about 5 to about 40 mole percent trifluoroethylene.

Claim 50

Dependent Claim 20 words

A process according to claim 39 wherein said solution comprises about 20 to about 40 weight percent of said copolymer.

Claim 51

Dependent Claim 26 words

A process according to claim 42 wherein the solvent of said solution is selected from the group consisting of acetone, methyl ethyl ketone, and ethyl acetate.

Claim 52

Dependent Claim 9 words

A product produced by the process of claim 39.

Claim 53

Dependent Claim 9 words

A product produced by the process of claim 43.

Claim 54

Dependent Claim 99 words

A piezoelectric transducer, comprising: a first polarized piezoelectric ribbon comprising a copolymer of vinylidene fluoride and trifluoroethylene spirally wrapped around an electroconductive conduit having an adhesive layer which allows for electrical conduction between said conduit and said first polarized piezoelectric ribbon; an additional polarized piezoelectric ribbon comprising a copolymer of vinylidene fluoride and trifluoroethylene spirally wrapped around said conduit and laminated to said first polarized piezoelectric ribbon with an evaporated solution which comprised a copolymer of vinylidene fluoride and trifluoroethylene and a suitable solvent; and an electroconductive layer disposed over the exposed surface of the outermost polarized piezoelectric ribbon.

Claim 55

Dependent Claim 99 words

A piezoelectric transducer, comprising: a first polarized piezoelectric ribbon comprising a copolymer of vinylidene fluoride and trifluoroethylene spirally wrapped around an electroconductive conduit having an adhesive layer which allows for electrical conduction between said conduit and said first polarized piezoelectric ribbon; an additional polarized piezoelectric ribbon comprising a copolymer of vinylidene fluoride and trifluoroethylene spirally wrapped around said conduit and laminated to said first polarized piezoelectric ribbon with an evaporated solution which comprised a copolymer of vinylidene fluoride and trifluoroethylene and a suitable solvent; and an electroconductive layer disposed over the exposed surface of the outermost polarized piezoelectric ribbon.

Claim 56

Dependent Claim 122 words

A hydrophone, comprising: a plurality of transducers comprising a first polarized piezoelectric ribbon comprising a copolymer of vinylidene fluoride and trifluoroethylene spirally wrapped around an electroconductive conduit having an adhesive layer which allows for electrical conduction between said conduit and said first polarized piezoelectric ribbon; an additional polarized piezoelectric ribbon comprising a copolymer of vinylidene fluoride and trifluoroethylene spirally wrapped around said conduit and laminated to said first polarized piezoelectric ribbon with an evaporated solution which comprised a copolymer of vinylidene fluoride and trifluoroethylene and a suitable solvent; and an electroconductive layer disposed over the exposed surface of the outermost polarized piezoelectric ribbon; and means for electrically coupling the electroconductive conduits and said electroconductive layers to form a plurality of interconnected transducers.

Claim 57

Dependent Claim 122 words

A hydrophone, comprising: a plurality of transducers comprising a first polarized piezoelectric ribbon comprising a copolymer of vinylidene fluoride and trifluoroethylene spirally wrapped around an electroconductive conduit having an adhesive layer which allows for electrical conduction between said conduit and said first polarized piezoelectric ribbon; an additional polarized piezoelectric ribbon comprising a copolymer of vinylidene fluoride and trifluoroethylene spirally wrapped around said conduit and laminated to said first polarized piezoelectric ribbon with an evaporated solution which comprised a copolymer of vinylidene fluoride and trifluoroethylene and a suitable solvent; and an electroconductive layer disposed over the exposed surface of the outermost polarized piezoelectric ribbon; and means for electrically coupling the electroconductive conduits and said electroconductive layers to form a plurality of interconnected transducers.

Claim 58

Dependent Claim 72 words

A process of forming a piezoelectric transducer on a semiconductor substrate, comprising the steps of: (a) coating a layer comprising a copolymer of vinylidene fluoride and trifluoroethylene over a first surface of said semiconductor substrate, said semiconductor substrate having an electroconductive layer disposed over a second surface substantially opposed to said first surface; and (b) applying an electrical field across said electroconductive layer and said copolymer layer to polarize said copolymer layer.

Claim 59

Dependent Claim 72 words

A process of forming a piezoelectric transducer on a semiconductor substrate, comprising the steps of: (a) coating a layer comprising a copolymer of vinylidene fluoride and trifluoroethylene over a first surface of said semiconductor substrate, said semiconductor substrate having an electroconductive layer disposed over a second surface substantially opposed to said first surface; and (b) applying an electrical field across said electroconductive layer and said copolymer layer to polarize said copolymer layer.

Claim 60

Dependent Claim 23 words

A process according to claim 48 wherein the copolymer layer of step (a) is spin coated or solution cast onto said semiconductor substrate.

Claim 61

Dependent Claim 20 words

A process according to claim 48 wherein a corona discharge is used to polarize said copolymer layer in step (b).

Claim 62

Dependent Claim 31 words

A process according to claim 48 wherein a temporary electroconductive layer is applied over the exposed surface of said copolymer layer and said copolymer layer is poled directly in step (b).

Claim 63

Dependent Claim 92 words

A process according to claim 48, further comprising the steps of: (c) providing a polarized piezoelectric film comprising a copolymer of vinylidene fluoride and trifluoroethylene; (d) interposing between and in surface contact with said copolymer layer and said polarized piezoelectric film a solution comprising a copolymer of vinylidene fluoride and trifluoroethylene and a suitable solvent; (e) evaporating substantially all of the solvent of said solution thereby laminating said polarized copolymer layer and said polarized piezoelectric film; and (f) applying an additional electroconductive layer over the exposed surface of said polarized piezoelectric film.

Claim 64

Dependent Claim 81 words

A process according to claim 52, further comprising between steps (e) and (f) the steps of: providing an additional film comprising a copolymer of vinylidene fluoride and trifluoroethylene; interposing between and in surface contact with the exposed surface of the previously laminated film and said additional film a solution comprising a copolymer of vinylidene fluoride and trifluoroethylene and a suitable solvent; and evaporating substantially all of the solvent of said solution thereby laminating said additional film with said previously laminated film.

Claim 65

Dependent Claim 42 words

A process according to claim 52 wherein said copolymer of said polarized piezoelectric film, said polarized copolymer layer and said solution comprises from about 60 to about 95 mole percent vinylidene fluoride and from about 5 to about 40 mole percent trifluoroethylene.

Claim 66

Dependent Claim 20 words

A process according to claim 52 wherein said solution comprises about 20 to about 40 weight percent of said copolymer.

Claim 67

Dependent Claim 32 words

A process according to claim 55 wherein the solvent of said solution is selected from the group consisting of acetone, methyl ethyl ketone, and ethyl acetate and said semiconductor substrate comprises silicon.

Claim 68

Dependent Claim 9 words

A product produced by the process of claim 52.

Claim 69

Dependent Claim 9 words

A product produced by the process of claim 56.

Claim 70

Dependent Claim 143 words

A process of forming a laminated piezoelectric transducer on a semiconductor substrate, comprising the steps of: (a) forming an electroconductive layer over a surface of a semiconductor substrate; (b) coating a layer comprising a copolymer of vinylidene fluoride and trifluoroethylene over said electroconductive layer; (c) applying an electrical field across said electroconductive layer and said copolymer layer to polarize said copolymer layer; (d) providing a polarized piezoelectric film comprising a copolymer of vinylidene fluoride and trifluoroethylene; (e) interposing between and in surface contact with said polarized copolymer layer and said polarized piezoelectric film a solution comprising a copolymer of vinylidene fluoride and trifluoroethylene and a suitable solvent; (f) evaporating substantially all of the solvent of said solution thereby laminating said polarized copolymer layer and said polarized piezoelectric film; and (g) applying an additional electroconductive layer over the exposed surface of said copolymer film.

Claim 71

Dependent Claim 143 words

A process of forming a laminated piezoelectric transducer on a semiconductor substrate, comprising the steps of: (a) forming an electroconductive layer over a surface of a semiconductor substrate; (b) coating a layer comprising a copolymer of vinylidene fluoride and trifluoroethylene over said electroconductive layer; (c) applying an electrical field across said electroconductive layer and said copolymer layer to polarize said copolymer layer; (d) providing a polarized piezoelectric film comprising a copolymer of vinylidene fluoride and trifluoroethylene; (e) interposing between and in surface contact with said polarized copolymer layer and said polarized piezoelectric film a solution comprising a copolymer of vinylidene fluoride and trifluoroethylene and a suitable solvent; (f) evaporating substantially all of the solvent of said solution thereby laminating said polarized copolymer layer and said polarized piezoelectric film; and (g) applying an additional electroconductive layer over the exposed surface of said copolymer film.

Claim 72

Dependent Claim 23 words

A process according to claim 59 wherein the copolymer layer of step (a) is spin coated or solution cast onto said electroconductive layer.

Claim 73

Dependent Claim 83 words

A process according to claim 59, further comprising between steps (f) and (g) the steps of: providing an additional polarized piezoelectric film comprising a copolymer of vinylidene fluoride and trifluoroethylene; interposing between and in surface contact with the exposed surface of the previously laminated film and said additional film a solution comprising a copolymer of vinylidene fluoride and trifluoroethylene and a suitable solvent; and evaporating substantially all of the solvent of said solution thereby laminating said additional film with said previously laminated film.

Claim 74

Dependent Claim 42 words

A process according to claim 59 wherein said copolymer of said polarized piezoelectric film, said polarized copolymer layer and said solution comprises from about 60 to about 95 mole percent vinylidene fluoride and from about 5 to about 40 mole percent trifluoroethylene.

Claim 75

Dependent Claim 20 words

A process according to claim 59 wherein said solution comprises about 20 to about 40 weight percent of said copolymer.

Claim 76

Dependent Claim 32 words

A process according to claim 63 wherein the solvent of said solution is selected from the group consisting of acetone, methyl ethyl ketone, and ethyl acetate and said semiconductor substrate comprises silicon.

Claim 77

Dependent Claim 9 words

A product produced by the process of claim 59.

Claim 78

Dependent Claim 9 words

A product produced by the process of claim 64.

Claim 79

Dependent Claim 72 words

A piezoelectric transducer, comprising: a first polarized piezoelectric layer comprising a copolymer of vinylidene fluoride and trifluoroethylene disposed over a semiconductor substrate having a first electroconductive layer; an additional polarized piezoelectric layer laminated to said first polarized piezoelectric layer with an evaporated solution which comprised a copolymer of vinylidene fluoride and trifluoroethylene and a suitable solvent; and an additional electroconductive layer disposed over the exposed surface of the outermost polarized piezoelectric layer.

Claim 80

Dependent Claim 72 words

A piezoelectric transducer, comprising: a first polarized piezoelectric layer comprising a copolymer of vinylidene fluoride and trifluoroethylene disposed over a semiconductor substrate having a first electroconductive layer; an additional polarized piezoelectric layer laminated to said first polarized piezoelectric layer with an evaporated solution which comprised a copolymer of vinylidene fluoride and trifluoroethylene and a suitable solvent; and an additional electroconductive layer disposed over the exposed surface of the outermost polarized piezoelectric layer.

Claim 81

Dependent Claim 22 words

A piezoelectric transducer according to claim 67, further comprising: a plurality of additional polarized piezoelectric layers laminated together with said evaporated solution.

Claim 82

Dependent Claim 13 words

A piezoelectric transducer according to claim 67 wherein said semiconductor substrate comprises silicon.

Claim 83

Dependent Claim 37 words

A piezoelectric transducer according to claim 67 wherein said first electroconductive layer is disposed on a surface of said semiconductor substrate which is substantially opposed to the surface of said substrate bearing said first polarized piezoelectric layer.

Claim 84

Dependent Claim 24 words

A piezoelectric transducer according to claim 67 wherein said first electroconductive layer is disposed between said semiconductor substrate and said first polarized piezoelectric layer.

Claim 85

Dependent Claim 70 words

A process of forming a piezoelectric transducer on a semiconductor substrate, comprising the steps of: (a) forming a first electroconductive layer over at least a portion of a first surface of said semiconductor substrate; (b) forming a layer comprising a copolymer of vinylidene fluoride and trifluoroethylene over the first electroconductive layer; and (c) applying an electrical field across said semiconductor substrate and said copolymer layer to polarize said copolymer layer.

Claim 86

Dependent Claim 70 words

A process of forming a piezoelectric transducer on a semiconductor substrate, comprising the steps of: (a) forming a first electroconductive layer over at least a portion of a first surface of said semiconductor substrate; (b) forming a layer comprising a copolymer of vinylidene fluoride and trifluoroethylene over the first electroconductive layer; and (c) applying an electrical field across said semiconductor substrate and said copolymer layer to polarize said copolymer layer.

Claim 87

Dependent Claim 24 words

A process according to claim 72 wherein the copolymer layer of step (a) is spin coated or solution cast over the first electroconductive layer.

Claim 88

Dependent Claim 20 words

A process according to claim 72 wherein a corona discharge is used to polarize said copolymer layer in step (c).

Claim 89

Dependent Claim 31 words

A process according to claim 72 wherein a second electroconductive layer is applied over the exposed surface of said copolymer layer and said copolymer layer is poled directly in step (c).

Claim 90

Dependent Claim 37 words

A process according to claim 72 wherein a film having a resistivity approximately equal to the resistivity of said copolymer layer is applied over the copolymer layer and the copolymer layer is press poled in step (c).

Claim 91

Dependent Claim 17 words

A process according to claim 76 wherein the film is removed from the copolymer layer after poling.

Claim 92

Dependent Claim 14 words

A process according to claim 77 wherein the film comprises unpolarized vinylidene fluoride-trifluoroethylene copolymer.

Claim 93

Dependent Claim 20 words

A process according to claim 78 wherein a plurality of vinylidene fluoride-trifluoroethylene copolymer films are stacked on the copolymer layer.

Claim 94

Dependent Claim 21 words

A process according to claim 72 wherein said first electroconductive layer is patterned to have at least two electrically unconnected regions.

Claim 95

Dependent Claim 31 words

A process according to claim 80, further comprising the steps of: forming through-holes in said semiconductor substrate to make electrical connections with the electrically unconnected regions of said first electroconductive layer.

Claim 96

Dependent Claim 24 words

A process according to claim 72 wherein said first electroconductive layer is disposed over substantially all of said first surface of the semiconductor substrate.

Claim 97

Dependent Claim 13 words

A process according to claim 72 wherein said semiconductor substrate is doped silicon.

Claim 98

Dependent Claim 30 words

A process according to claim 72 wherein said copolymer comprises from about 60 to about 95 mole percent vinylidene fluoride and from about 5 to about 40 mole percent trifluoroethylene.

Claim 99

Dependent Claim 9 words

A product produced by the process of claim 80.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	1995-10-06	1996-04-06	1996-10-06	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	1999-10-06	2000-04-06	2000-10-06	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2003-10-06	2004-04-06	2004-10-06	$7700.00	Window Closed / Lapsed

Laminated piezoelectric structure and process of forming the same

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