US4378510A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Miniaturized accelerometer with piezoelectric FET
Assignee: Motorola Solutions Inc
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Filing: 1980-07-17
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Granted: 1983-03-29
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Expires: 2000-07-17
Abstract
Abstract An accelerometer comprising a piezoelectric device hard mounted to the gate electrode of a field effect transistor, thus avoiding the capacitance of an interconnecting coaxial cable connection and providing, therefore, improved frequency response in a smaller, more efficient package.
Inventors
- 👤 Charles E. Bennett
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 10:57
CPC Classifications
H; H10; H10D; H10D48/00; H10D48/50; G; G01; G01P; G01P15/00; G01P15/02; G01P15/08; G01P15/12; G01P15/124
Claims Analysis
Total Claims: 3
Claim 1
Independent Claim
50 words
An accelerometer comprising: a metal-oxide-semiconductor field-effect-transistor having a substrate, a source, a drain and an insulated gate; said gate further comprising piezoelectric means mounted thereon for sensing at least one of positive and negative acceleration, said piezoelectric means having a thickness being substantially greater than a thickness of said substrate.
Claim 2
Dependent Claim
50 words
An accelerometer comprising: a metal-oxide-semiconductor field-effect-transistor having a substrate, a source, a drain and an insulated gate; said gate further comprising piezoelectric means mounted thereon for sensing at least one of positive and negative acceleration, said piezoelectric means having a thickness being substantially greater than a thickness of said substrate.
Claim 3
Dependent Claim
28 words
The accelerometer according to claim 1 wherein said thickness of said piezoelectric means is in a range of from 5 to 20 times greater than said substrate thickness.
References Cited (Backward Citations)
US3170076A
Cited
US3426424A
Cited
US3294988A
Cited
US3569747A
Cited
US3351786A
Cited
US3585415A
Cited
US3818426A
Cited
US3973146A
Cited
US3978508A
Cited
US4047214A
Cited
US4104921A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-03-28 | 1986-09-27 | 1987-03-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-03-28 | 1990-09-27 | 1991-03-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-03-28 | 1994-09-27 | 1995-03-29 | $7700.00 | Window Closed / Lapsed |