Patent US4378510A successfully refreshed from Google Patents.
US4378510A
Expired / Lapsed
US
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Miniaturized accelerometer with piezoelectric FET
Assignee: Motorola Solutions Inc
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Filing: 1980-07-17
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Granted: 1983-03-29
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Expires: 2000-07-17
Abstract
Abstract An accelerometer comprising a piezoelectric device hard mounted to the gate electrode of a field effect transistor, thus avoiding the capacitance of an interconnecting coaxial cable connection and providing, therefore, improved frequency response in a smaller, more efficient package.
Inventors
- 👤 Charles E. Bennett
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 17:04
CPC Classifications
H; H10; H10D; H10D48/00; H10D48/50; G; G01; G01P; G01P15/00; G01P15/02; G01P15/08; G01P15/12; G01P15/124
Claims Analysis
Total Claims: 3
Claim 1
Independent Claim
50 words
An accelerometer comprising: a metal-oxide-semiconductor field-effect-transistor having a substrate, a source, a drain and an insulated gate; said gate further comprising piezoelectric means mounted thereon for sensing at least one of positive and negative acceleration, said piezoelectric means having a thickness being substantially greater than a thickness of said substrate.
Claim 2
Dependent Claim
50 words
An accelerometer comprising: a metal-oxide-semiconductor field-effect-transistor having a substrate, a source, a drain and an insulated gate; said gate further comprising piezoelectric means mounted thereon for sensing at least one of positive and negative acceleration, said piezoelectric means having a thickness being substantially greater than a thickness of said substrate.
Claim 3
Dependent Claim
28 words
The accelerometer according to claim 1 wherein said thickness of said piezoelectric means is in a range of from 5 to 20 times greater than said substrate thickness.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-03-28 | 1986-09-27 | 1987-03-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-03-28 | 1990-09-27 | 1991-03-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-03-28 | 1994-09-27 | 1995-03-29 | $7700.00 | Window Closed / Lapsed |