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US5151384A Expired / Lapsed US ⏱️ 0.0 years remaining

Amorphous silicon switch with forming current controlled by contact region

Assignee: Littelfuse Inc
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Filing: 1989-07-13
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Granted: 1992-09-29
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Expires: 2009-07-13
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Abstract

Abstract PCT No. PCT/GB89/00797 Sec. 371 Date Jan. 14, 1991 Sec. 102(e) Date Jan. 14, 1991 PCT Filed Jul. 13, 1989 PCT Pub. No. WO90/00817 PCT Pub. Date Jan. 25, 1990.A method of making an electrical device comprising two electrodes and a body of a switching material formed by reacting amorphous silicon or silicon compound with a passivating agent to remove or reduce the number of unpaired electrons occuring therein. The method includes a forming step in which a forming current is passed through the amorphous silicon layer so as to form an n- or p- doped amorphous silicon layer adjacent to one of the electrodes. The doped silicon layer extends over part only of the device so that the forming current is at most 400 mA. The device exhibits a voltage controlled negative resistance (VCNR) and may be employed for example for transient protection.

Inventors

  • 👤 David M. Williams

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-04 23:25
CPC Classifications
H; H10; H10W; H10W72/00; H10W72/90; H10N; H10N70/00; H10N70/011; H10N70/021; H10N70/023; H10N70/026; H10N70/20; H10N70/25; H10N70/801; H10N70/821; H10N70/823; H10N70/826; H10N70/881; H10N70/884; H10W72/071; H10W72/075; H10W72/07551; H10W72/07554; H10W72/50; H10W72/531; H10W72/536; H10W72/541; H10W72/547; H10W72/551; H10W72/552; H10W72/5522; H10W72/59; Y; Y10; Y10S; Y10S438/00; Y10S438/90

Claims Analysis

Total Claims: 11
Claim 1
Independent Claim 145 words
A method of producing an electrical device which comprises: (a) reacting an amorphous silicon or silicon compound with a passivating agent in order to remove or reduce the number of unpaired electrons occurring in the silicon compound; (b) providing a first electrode in association with the amorphous silicon compound either before or after step (a); (c) providing a second electrode in association with the amorphous silicon compound either before or after step (a); and (d) conducting a "forming" step in which at least part of the amorphous silicon compound layer is restructured by passing an electric current through the device; the method including the formation of an n- or p- doped amorphous silicon layer which is adjacent to one of the electrodes and extends over part only of the device so that the maximum forming current passing through the device is limited to 400 mA.
Claim 2
Independent Claim 145 words
A method of producing an electrical device which comprises: (a) reacting an amorphous silicon or silicon compound with a passivating agent in order to remove or reduce the number of unpaired electrons occurring in the silicon compound; (b) providing a first electrode in association with the amorphous silicon compound either before or after step (a); (c) providing a second electrode in association with the amorphous silicon compound either before or after step (a); and (d) conducting a "forming" step in which at least part of the amorphous silicon compound layer is restructured by passing an electric current through the device; the method including the formation of an n- or p- doped amorphous silicon layer which is adjacent to one of the electrodes and extends over part only of the device so that the maximum forming current passing through the device is limited to 400 mA.
Claim 3
Dependent Claim 52 words
A method as claimed in claim 1, wherein steps (a) and (b) are conducted simultaneously by depositing a layer of the silicon or silicon compound on the first electrode in the presence of the passivating agent, followed by step (c) so that the electrodes are located on opposite sides of the layer.
Claim 4
Dependent Claim 30 words
A method as claimed in claim 1, wherein steps (b) and (c) are conducted simultaneously so that both electrodes are located on the same side of the amorphous silicon compound.
Claim 5
Dependent Claim 17 words
A method as claimed in claim 3, wherein steps (b) and (c) are conducted after step (a).
Claim 6
Dependent Claim 19 words
A method as claimed in claim 1, wherein the amorphous layer is deposited by plasma deposition or reactive sputtering.
Claim 7
Dependent Claim 27 words
A method as claimed in claim 1, wherein the forming step is conducted under conditions that limit the maximum current passing through the device to 200 mA.
Claim 8
Dependent Claim 20 words
A method as claimed in claim 6, wherein the maximum current is limited by means of a current limiting resistor.
Claim 9
Dependent Claim 32 words
A method as claimed in claim 1, wherein the n-doped amorphous silicon compound layer is formed by introducing an n- or p-dopant into the reactant during part only of the deposition step.
Claim 10
Dependent Claim 16 words
A method as claimed in claim 1, wherein the passivating agent comprises hydrogen or a halogen.
Claim 11
Dependent Claim 17 words
A method as claimed in claim 9, wherein the dopant comprises phosphine, arsine, diborane or boron trifluoride.

References Cited (Backward Citations)

US3271591A Cited
US4226898A Cited
EP0115124A1 Cited
EP0117045A2 Cited
EP0162529A1 Cited
US4665428A Cited
EP0196462A2 Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1995-09-29 1996-03-30 1996-09-29 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1999-09-29 2000-03-30 2000-09-29 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2003-09-29 2004-03-30 2004-09-29 $7700.00 Window Closed / Lapsed

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