US5147520A
Expired / Lapsed
US
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Apparatus and method for controlling processing uniformity in a magnetron
Assignee: MCNC Research and Development Institute
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Filing: 1991-02-15
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Granted: 1992-09-15
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Expires: 2011-02-15
Abstract
Abstract An apparatus and method for producing a more uniform processing rate in a plasma processing magnetron. A pair of opposing spaced apart plasma barriers, preferably made of a non-magnetic material, are positioned on a substrate holder, such as an electrode for generating an electric field in the magnetron. The inner surfaces of the barriers are oriented transverse to the magnetic field of the magnetron and define a narrower spacing therebetween adjacent a predetermined portion of a substrate surface. The barriers may preferably be elongate rectangular bodies canted from parallel to each other to define a narrower spacing therebetween so that a more uniform processing rate is obtained across the entire substrate surface. The inherent non-uniformity of the magnetron may be detected by observing visual color bands appearing across a thin film on the substrate surface as it is being plasma processed. Alternatively, the plasma density may be measured at predetermined positions adjacent the substrate surface and this measured non-uniformity corrected by repositioning the barriers.
Inventors
- 👤 Stephen M. Bobbio
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 16:16
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32431; H01J37/32697; B; B01; B01J; B01J19/00; B01J19/08; B01J19/12; B01J19/122; B01J19/126; H01J37/34; H01J37/3402; H01J37/3405; H01J37/3408; H05; H05H; H05H1/00; H05H1/02; B01J2219/00; B01J2219/08; B01J2219/0894
Claims Analysis
Total Claims: 43
Claim 1
Independent Claim
128 words
A plasma confinement structure adapted for use in a magnetron plasma processing apparatus having a magnetic field parallel to a substrate surface to be processed, said plasma confinement structure comprising: a pair of opposing spaced apart electrostatic plasma confinement barriers formed of a nonmagnetic material; and means for supporting each of said pair of barriers adjacent opposite ends of the substrate and extending outwardly from the substrate surface; said pair of barriers having opposing inner surfaces being oriented transverse to the magnetic field, said opposing inner surfaces forming a narrower spacing therebetween adjacent a predetermined portion of the substrate surface so as to electrostatically confine the plasma and thereby raise the relative plasma processing rate for the predetermined portion of the substrate surface independent of the magnetic field.
Claim 2
Dependent Claim
128 words
A plasma confinement structure adapted for use in a magnetron plasma processing apparatus having a magnetic field parallel to a substrate surface to be processed, said plasma confinement structure comprising: a pair of opposing spaced apart electrostatic plasma confinement barriers formed of a nonmagnetic material; and means for supporting each of said pair of barriers adjacent opposite ends of the substrate and extending outwardly from the substrate surface; said pair of barriers having opposing inner surfaces being oriented transverse to the magnetic field, said opposing inner surfaces forming a narrower spacing therebetween adjacent a predetermined portion of the substrate surface so as to electrostatically confine the plasma and thereby raise the relative plasma processing rate for the predetermined portion of the substrate surface independent of the magnetic field.
Claim 3
Dependent Claim
35 words
The plasma confinement structure of claim 1 wherein each of said pair of barriers comprises an elongate rectangular body, and wherein each of said pair of rectangular bodies are canted from parallel to each other.
Claim 4
Dependent Claim
28 words
The plasma confinement structure of claim 2 wherein each of said barriers further comprises a transverse extending portion for increasing the lateral stability of each of said barriers.
Claim 5
Dependent Claim
20 words
The plasma confinement structure of claim 1 wherein said opposing inner surfaces of said pair of barriers are symmetrically curved.
Claim 6
Dependent Claim
52 words
The plasma confinement structure of claim 1 wherein said magnetron processing apparatus is adapted for producing a plasma having a stagnant region adjacent an electron drift region, and wherein said inner surfaces of said pair of barriers extend outwardly from the substrate surface a sufficient distance to laterally contain the stagnant region.
Claim 7
Dependent Claim
16 words
The plasma confinement structure of claim 1 wherein each of said pair of barriers is dielectric.
Claim 8
Dependent Claim
24 words
The plasma confinement structure of claim 1 wherein said barrier support means comprises a flat plate cathode adapted for positioning of the substrate thereon.
Claim 9
Dependent Claim
31 words
The plasma confinement structure of claim 7 wherein each of said pair of barriers is electrically conductive, and wherein each of said pair of barriers is electrically connected to said cathode.
Claim 10
Dependent Claim
74 words
The plasma confinement structure of claim 1 wherein the magnetron plasma processing apparatus has an inherent non-uniform processing rate producing lower and higher relative processing rates over portions of the substrate surface, and wherein said opposing inner surfaces of said barriers have a narrower spacing therebetween adjacent the portions of the substrate subject to the lower processing rate of the magnetron to thereby produce a more uniform processing rate for the entire substrate surface.
Claim 11
Dependent Claim
87 words
The plasma confinement structure of claim 1 wherein the magnetron plasma processing apparatus has an inherent processing rate progressively increasing across the substrate surface from a first end to a second end thereof in a direction perpendicular to the magnetic field, and wherein said opposing inner surfaces of said barriers have a progressively narrower spacing therebetween adjacent the substrate surface extending from the second end of the substrate surface to the first end thereof to thereby produce a more uniform processing rate over the entire substrate surface.
Claim 12
Independent Claim
175 words
An apparatus for plasma processing a substrate surface, comprising: an evacuable chamber; means for generating a plasma in said evacuable chamber and adjacent the substrate surface, said plasma generating means comprising: means for generating a magnetic field parallel to the substrate surface; a first and second electrode having an insulator positioned therebetween, said first electrode adapted for holding the substrate thereon, said first and second electrodes for generating an electric field perpendicular to the substrate surface, said first and second electrodes adapted for predetermined relative powering; and a pair of opposing spaced apart electrostatic plasma confinement barriers positioned adjacent said first electrode and extending outwardly therefrom, said pair of barriers formed of a nonmagnetic material, said pair of barriers having opposing inner surfaces being oriented transverse to the magnetic field, said opposing inner surfaces forming a narrower spacing therebetween adjacent a predetermined portion of the substrate surface so as to electrostatically confine the plasma and thereby raise the relative plasma processing rate for the predetermined portion of the substrate surface independent of the magnetic field.
Claim 13
Independent Claim
175 words
An apparatus for plasma processing a substrate surface, comprising: an evacuable chamber; means for generating a plasma in said evacuable chamber and adjacent the substrate surface, said plasma generating means comprising: means for generating a magnetic field parallel to the substrate surface; a first and second electrode having an insulator positioned therebetween, said first electrode adapted for holding the substrate thereon, said first and second electrodes for generating an electric field perpendicular to the substrate surface, said first and second electrodes adapted for predetermined relative powering; and a pair of opposing spaced apart electrostatic plasma confinement barriers positioned adjacent said first electrode and extending outwardly therefrom, said pair of barriers formed of a nonmagnetic material, said pair of barriers having opposing inner surfaces being oriented transverse to the magnetic field, said opposing inner surfaces forming a narrower spacing therebetween adjacent a predetermined portion of the substrate surface so as to electrostatically confine the plasma and thereby raise the relative plasma processing rate for the predetermined portion of the substrate surface independent of the magnetic field.
Claim 14
Dependent Claim
33 words
The apparatus of claim 11 wherein each of said pair of barriers comprises an elongate rectangular body, and wherein each of said pair of rectangular bodies are canted from parallel to each other.
Claim 15
Dependent Claim
26 words
The apparatus of claim 12 wherein each of said barriers further comprises a transverse extending portion for increasing the lateral stability of each of said barriers.
Claim 16
Dependent Claim
18 words
The apparatus of claim 11 wherein said opposing inner surfaces of said pair of barriers are symmetrically curved.
Claim 17
Dependent Claim
50 words
The apparatus of claim 11 wherein said plasma generating means is adapted for producing a plasma having a stagnant region adjacent an electron drift region, and wherein said inner surfaces of said pair of barriers extend outwardly from said first electrode a sufficient distance to laterally contain the stagnant region.
Claim 18
Dependent Claim
30 words
The apparatus of claim 11 wherein each of said pair of barriers is electrically conductive and wherein each of said pair of barriers is electrically connected to said first electrode.
Claim 19
Dependent Claim
14 words
The apparatus of claim 11 wherein each of said pair of barriers is dielectric.
Claim 20
Dependent Claim
20 words
The apparatus of claim 11 further comprising means for measuring the plasma density at predetermined locations adjacent the substrate surface.
Claim 21
Dependent Claim
73 words
The apparatus of claim 11 wherein said plasma generating means has an inherent non-uniform processing rate with lower and higher relative processing rates over portions of the substrate surface, and wherein said opposing inner surfaces of said barriers have a narrower spacing therebetween adjacent the portions of the substrate subject to the lower processing rate of said plasma generating means to thereby produce a more uniform processing rate for the entire substrate surface.
Claim 22
Dependent Claim
84 words
The apparatus of claim 11 wherein said plasma generating means has an inherent processing rate progressively increasing over the substrate surface from a first end to a second end thereof in a direction perpendicular to the magnetic field, and wherein said opposing inner surfaces of said barriers have a progressively narrower spacing therebetween adjacent the substrate surface extending from the second end of the substrate surface to the first end thereof to thereby produce a more uniform processing rate for the entire substrate surface.
Claim 23
Independent Claim
131 words
An apparatus for plasma processing a substrate surface, comprising: an evacuable chamber; means for generating a plasma in said evacuable chamber and adjacent the substrate surface, said plasma generating means including means for generating a magnetic field parallel to the substrate surface; and a pair of opposing spaced apart electrostatic plasma confinement barriers positioned adjacent said first electrode and extending outwardly therefrom, said pair of barriers formed of a nonmagnetic material, said pair of barriers having opposing inner surfaces being oriented transverse to the magnetic field, said opposing inner surfaces forming a narrower spacing therebetween adjacent a predetermined portion of the substrate surface so as to electrostatically confine the plasma and thereby raise the relative plasma processing rate for the predetermined portion of the substrate surface independent of the magnetic field.
Claim 24
Independent Claim
131 words
An apparatus for plasma processing a substrate surface, comprising: an evacuable chamber; means for generating a plasma in said evacuable chamber and adjacent the substrate surface, said plasma generating means including means for generating a magnetic field parallel to the substrate surface; and a pair of opposing spaced apart electrostatic plasma confinement barriers positioned adjacent said first electrode and extending outwardly therefrom, said pair of barriers formed of a nonmagnetic material, said pair of barriers having opposing inner surfaces being oriented transverse to the magnetic field, said opposing inner surfaces forming a narrower spacing therebetween adjacent a predetermined portion of the substrate surface so as to electrostatically confine the plasma and thereby raise the relative plasma processing rate for the predetermined portion of the substrate surface independent of the magnetic field.
Claim 25
Dependent Claim
33 words
The apparatus of claim 21 wherein each of said pair of barriers comprises an elongate rectangular body, and wherein each of said pair of rectangular bodies are canted from parallel to each other.
Claim 26
Dependent Claim
26 words
The apparatus of claim 22 wherein each of said barriers further comprises a transverse extending portion for increasing the lateral stability of each of said barriers.
Claim 27
Dependent Claim
18 words
The apparatus of claim 21 wherein said opposing inner surfaces of said pair of barriers are symmetrically curved.
Claim 28
Dependent Claim
50 words
The apparatus of claim 21 wherein said plasma generating means is adapted for producing a plasma having a stagnant region adjacent an electron drift region, and wherein said inner surfaces of said pair of barriers extend outwardly from said substrate holder a sufficient distance to laterally contain the stagnant region.
Claim 29
Dependent Claim
24 words
The apparatus of claim 21 wherein said substrate holder comprises a flat plate cathode for generating an electric field perpendicular to the substrate surface.
Claim 30
Dependent Claim
31 words
The apparatus of claim 26 wherein each of said pair of barriers is electrically conductive and wherein each of said pair of barriers is electrically connected to said flat plate cathode.
Claim 31
Dependent Claim
14 words
The apparatus of claim 21 wherein each of said pair of barriers is dielectric.
Claim 32
Dependent Claim
73 words
The apparatus of claim 21 wherein said plasma generating means has an inherent non-uniform processing rate producing lower and higher relative processing rates over portions of the substrate surface, and wherein said opposing inner surfaces of said barriers have a narrower spacing therebetween adjacent the portions of the substrate subject to the lower processing rate of said plasma generating means to thereby produce a more uniform processing rate for the entire substrate surface.
Claim 33
Dependent Claim
84 words
The apparatus of claim 21 wherein said plasma generating means has an inherent processing rate progressively increasing over the substrate surface from a first end to a second end thereof in a direction perpendicular to the magnetic field, and wherein said opposing inner surfaces of said barriers have a progressively narrower spacing therebetween adjacent the substrate surface extending from the second end of the substrate surface to the first end thereof to thereby produce a more uniform processing rate for the entire substrate surface.
Claim 34
Dependent Claim
20 words
The apparatus of claim 21 further comprising means for measuring the plasma density at predetermined locations adjacent the substrate surface.
Claim 35
Independent Claim
107 words
A method for raising a relative processing rate for a portion of a substrate surface in a magnetron plasma processing apparatus, the magnetron having a magnetic field parallel to the substrate surface, said method comprising the steps of: generating a plasma adjacent the substrate surface, the magnetic field confining the plasma adjacent the substrate surface; and more narrowly electrostatically confining the plasma, in a lateral direction transverse to the magnetic field, adjacent a predetermined portion of the substrate surface so as to electrostatically confine the plasma and thereby raise the relative plasma processing rate for the predetermined portion of the substrate surface independent of the magnetic field.
Claim 36
Independent Claim
107 words
A method for raising a relative processing rate for a portion of a substrate surface in a magnetron plasma processing apparatus, the magnetron having a magnetic field parallel to the substrate surface, said method comprising the steps of: generating a plasma adjacent the substrate surface, the magnetic field confining the plasma adjacent the substrate surface; and more narrowly electrostatically confining the plasma, in a lateral direction transverse to the magnetic field, adjacent a predetermined portion of the substrate surface so as to electrostatically confine the plasma and thereby raise the relative plasma processing rate for the predetermined portion of the substrate surface independent of the magnetic field.
Claim 37
Dependent Claim
41 words
The method of claim 32 wherein said step of generating the plasma comprises generating a plasma having a stagnant region adjacent an electron drift region, and wherein said step of confining the plasma comprises confining the plasma in the stagnant region.
Claim 38
Dependent Claim
66 words
The method of claim 32 wherein said step of confining the plasma comprises the steps of: providing a pair of plasma barriers; and positioning the pair of barriers adjacent the substrate surface in an opposing spaced apart relation so that the inner surfaces of the barriers are transverse to the magnetic field and form a narrower spacing therebetween adjacent the predetermined portion of the substrate surface.
Claim 39
Dependent Claim
43 words
The method of claim 34 wherein said step of confining the plasma comprises the steps of: providing a pair of elongate rectangular plasma barriers; and positioning the pair of barriers in an opposing spaced apart relation and canted from parallel to each other.
Claim 40
Dependent Claim
32 words
The method of claim 34 further comprising the steps of: detecting an inherent non-uniformity of the magnetron plasma processing apparatus; and repositioning the pair of plasma barriers to correct for the non-uniformity.
Claim 41
Dependent Claim
51 words
The method of claim 36 wherein said detecting step comprises the steps of: partially plasma processing a thin film on the substrate surface; and observing visible color bands caused by interference light produced by light reflected from the partially processed thin film surface and reflected from the surface of the substrate.
Claim 42
Dependent Claim
18 words
The method of claim 36 wherein said detecting step comprises measuring the plasma density adjacent the substrate surface.
Claim 43
Dependent Claim
24 words
The method of claim 36 further comprising repeating said detecting and said repositioning steps to achieve a desired uniformity over the entire substrate surface.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-09-15 | 1996-03-16 | 1996-09-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-09-15 | 2000-03-16 | 2000-09-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-09-15 | 2004-03-16 | 2004-09-15 | $7700.00 | Window Closed / Lapsed |